一種壓電作動器之分析與設計

Abstract

文中利用Mason等效電路及傳輸矩陣推導分析換能特性之工具Smith chart、Return Loss及Transducer Loss。再以Matlab程式數值模擬及分析各參數及黏著層對壓電換能特性的影響，同時也討論匹配電路之設計。 本文之數值模擬是以產生基體聲波波長為1.064μm之元件作為討論之對象，分別對三個基體材料做分析，並找出其中最佳之設計。 最後，簡單地提出一壓電元件之設計流程，以提供有系統的壓電元件最佳化設計方法。

The primary aim of the research is to provide a comprehensive design process of the piezoelectric device. This simulation is based on Mason equivalent circuit model and transfer matrix method. Besides, the Smith chart, Return Loss and Transducer Loss have been carried out. The theory is applied to a piezoelectric device which excite 1.064μm acoustic wavelength to propagate in the substrate, three different materials of substrate have been chosen in the discussion. By using the Matlab simulation, several important factors including the influence of the bonding layer that affects the performance of piezoelectric transducers have been studied. Furthermore, the designs of matching network will be discussed. Finally, a piezoelectric device’s design procedure to offer a systematic way for the optimum designs of piezoelectric devices is presented.