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  1. NTU Theses and Dissertations Repository
  2. 理學院
  3. 物理學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/35311
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DC 欄位值語言
dc.contributor.advisor梁啟德(Chi-Te Liang)
dc.contributor.authorShih-Kai Linen
dc.contributor.author林士凱zh_TW
dc.date.accessioned2021-06-13T06:47:40Z-
dc.date.available2005-08-01
dc.date.copyright2005-08-01
dc.date.issued2005
dc.date.submitted2005-07-28
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/35311-
dc.description.abstract本論文主要是探討多銦氮化銦鎵薄膜InxGa1-xN (x = 1, 0.98, 0.92,
0.8, 0.7) 的電子傳輸性質。我們測量了大溫度範圍下氮化銦鎵的電子
傳輸特性。我們發現在實驗誤差範圍內,樣品的載子濃度在測量的溫
度範圍內幾乎與溫度無關,這是金屬的行為。此外我們利用van der
Pauw 四點量測法計算樣品的電阻率。綜合電阻率與載子濃度的數據
顯示,我們的樣品隨著鎵的成分上升,有一個由金屬到半導體的轉
變。我們也計算了樣品的載子遷移率,載子遷移率在整個量測的溫度
範圍內,隨著鎵成分的升高而降低,這也印證了氮化銦的傳輸特性優
於氮化鎵。由於金屬電阻率在低溫下遵守Bloch T5 定理,對於銦濃
度大於等於92% 的樣品,我們檢查了它們的電阻率與Bloch T5 定
理的符合程度。分析的結果顯示高銦成分的樣品的電阻率非常符合
Bloch T5 定理,從而進一步的支持了高銦濃度的氮化銦鎵薄膜傳輸特
性與金屬十分類似。
zh_TW
dc.description.abstractThis thesis focuses on electron transport properties in InxGa1−xN (x =1,
0.98, 0.92, 0.8, 0.7) thin films. We have performed transport measurements
on InxGa1−xN thin films over a wide temperature range. We observed that
within experimental error, the carrier densities are temperature independent.
Besides, the resistivities, combined with the carrier densities, show
a tendency of transition from metal to semiconductor with increasing Ga
composition. The calculated mobility shows that for metallic like samples
(InxGa1−xN with x ≥0.92), the dominant scattering mechanism is the imperfection
scattering over the whole temperature range. We also showed
that Bloch T5 curves fit very well the resistivities of samples InxGa1−xN
with x =1, 0.98, 0.92, once again supporting that very high In composition
InxGa1−xN films can be considered as degenerate electron systems in which
the Fermi level is much higher than conduction-band bottom over the whole
measurement range.
en
dc.description.provenanceMade available in DSpace on 2021-06-13T06:47:40Z (GMT). No. of bitstreams: 1
ntu-94-R92222049-1.pdf: 1710478 bytes, checksum: 9f9b555b81d69e2dccb11aa32cfd2405 (MD5)
Previous issue date: 2005
en
dc.description.tableofcontents1 Introduction 1
2 Theoretical background 4
2.1 Classical Hall effect . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Van der Pauwmethod . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Electrical transport properties . . . . . . . . . . . . . . . . . . 10
2.3.1 Ohm’s law and electrical conductivity . . . . . . . . . . 10
2.3.2 Relaxation time approximation . . . . . . . . . . . . . 12
2.3.3 The temperature-dependent electron resistivity of metals 14
3 Sample fabrication and Hall measurements 20
3.1 Sample fabrication . . . . . . . . . . . . . . . . . . . . . . . . 20
3.1.1 Metal-organic vapor phase epitaxy . . . . . . . . . . . 20
3.1.2 Sample structure . . . . . . . . . . . . . . . . . . . . . 21
3.2 Hall measurements . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2.1 Experimental setup . . . . . . . . . . . . . . . . . . . . 23
3.2.2 Ohmic contacts . . . . . . . . . . . . . . . . . . . . . . 23
3.2.3 Elimination of background voltage . . . . . . . . . . . 25
4 Electrical properties of In-rich InxGa1−xN films 27
4.1 Deviation of the Rxy fromzero at zero magnetic field . . . . . 27
4.2 Temperature dependence of carrier density, resistivity and mobility
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.3 Curve fitting of Bloch T5 law . . . . . . . . . . . . . . . . . . 38
5 Conclusions 42
Bibliography 44
dc.language.isoen
dc.subject氮化銦鎵zh_TW
dc.subjectInGaNen
dc.title多銦氮化銦鎵薄膜之電子傳輸特性zh_TW
dc.titleElectron transport in In-rich InxGa1-xN filmsen
dc.typeThesis
dc.date.schoolyear93-2
dc.description.degree碩士
dc.contributor.coadvisor張本秀(Pen-Hsiu Chang)
dc.contributor.oralexamcommittee陳永芳(Yung-Fang Chen)
dc.subject.keyword氮化銦鎵,zh_TW
dc.subject.keywordInGaN,en
dc.relation.page47
dc.rights.note有償授權
dc.date.accepted2005-07-29
dc.contributor.author-college理學院zh_TW
dc.contributor.author-dept物理研究所zh_TW
顯示於系所單位:物理學系

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