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標題: | 鈮酸鋰表面電漿子共振感測元件之研製 Design and Fabrication of Lithium Niobate Surface Plasmon Resonance Sensors |
作者: | Chung-Hsun Li 李忠勳 |
指導教授: | 王維新(Way-Seen Wang) |
關鍵字: | 鈮酸鋰,表面電漿波,表面電漿子共振,感測器,質子交換法, Lithium niobate,surface plasma wave(SPW),surface plasmon resonance(SPR),sensor,proton exchange(PE), |
出版年 : | 2006 |
學位: | 碩士 |
摘要: | 本研究成功地製作出鈮酸鋰表面電漿子共振感測器。鈮酸鋰具有雙折射率以及良好的電光效應,筆者利用雙折射率的特性,在正Z切之鈮酸鋰晶片上以質子交換法製作出單導橫向磁場模態的波導,接著在波導表面鍍上金膜以及二氧化鈦薄膜,金膜用以激發表面電漿波,氧化物薄膜可以使得此感測器操作在折射率為1.33 ~ 1.4之待測液體。本實驗在金膜厚度為60nm以及二氧化鈦薄膜厚度為35、40nm的條件下,成功地在鈮酸鋰上激發表面電漿子共振,且由波長量測法可以得到靈敏度分別為436.84nm/RIU、501.32nm/RIU,實驗所得到的結果與理論模擬相當的吻合。此種光波導耦合式表面電漿子共振器不需要額外的極化控制器,將可以更進一步地縮小表面電漿子共振感測系統的體積。另外,鈮酸鋰具有良好電光係數,所以可利用來改變表面電漿子共振所造成的相位變化,文獻中指出利用相位量測法可以得到很高的靈敏度,因此利用鈮酸鋰的電光效應來製作高靈敏度的感測系統,相信無論在製作成本或是元件體積都具有相當大的優勢,筆者利用模擬的方式探討相位的變化量,並設計出馬赫任德電光調變器結合表面電漿子共振感測器,所得的靈敏度高達9.62848 10-8 RIU。 Lithium niobate (LiNbO3) based surface plasmon resonance (SPR) sensor is demonstrated in this paper. LiNbO3 possesses the birefringence and the good electro-optical (EO) effect. We use the birefringence to fabricate the waveguide where only TM-polarized wave can be guided on +Z-cut LiNbO3 with the proton-exchanged method. Then the thin film of gold and titanium dioxide (TiO2) are sequentially deposited on the surface of the waveguide. Gold is used to excite surface plasma wave (SPW) and the oxide layer can adjust the operated range of refractive index of analyte to 1.33 ~ 1.4. With 60nm-thick gold, 35 and 40nm-thick TiO2, SPR is successfully excited on LiNbO3 and the sensitivities are respectively determined to be 436.84nm/RIU and 501.32nm/RIU with wavelength interrogation, which agree well with the theoretical simulation. This waveguide-based SPR sensor requires no extra polarization controller. Thus the size of the SPR sensor system can be reduced further. In addition, LiNbO3 has good EO effect, which can be utilized to change the phase shift caused by SPR, and the highly sensitive sensor can be achieved by phase interrogation in previous papers. Therefore, the highly sensitive sensor system with the EO effect possessed by LiNbO3 has a great potential on fabrication cost and the size of the sensor system. We discuss the phase shift with the modeling and finish the design of the Mach-Zehnder based SPR sensor. The calculated sensitivity is as high as 9.62848 10-8 RIU. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/33736 |
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顯示於系所單位: | 光電工程學研究所 |
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