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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 李世光 | |
| dc.contributor.author | Chib-Bin Kuo | en |
| dc.contributor.author | 郭志斌 | zh_TW |
| dc.date.accessioned | 2021-06-13T04:21:37Z | - |
| dc.date.available | 2007-07-25 | |
| dc.date.copyright | 2006-07-25 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-21 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/33003 | - |
| dc.description.abstract | 波導干涉術(Waveguide Inteferometery)的基本原理是利用全反射的方式將光侷限在一介質中傳遞，當周遭的介質特性發生變化時，會使得光通過波導所產生的相位變化有所差異且TE與TM偏極態所產生的變異量不同，藉由干涉術的方式以及演算法可將兩偏極態的相位變化分別取出。由於此方式能提供兩偏極態對於邊界上變化的檢測資訊，因此可應用於生物分子反應的檢測。
本研究主要目的為建構一套多通道的波導干涉儀系統，其中包含多通道的波導晶片與光學機構設計。波導晶片方面乃利用半導體製程中的電漿輔助氣相沉積法(Plasmon Enhanced Chemical Vapor Deposition, PECVD)製造摻鍺二氧化矽(SiO2-Ge)做為光波導材料，並使用蝕刻的方式做出多個通道於波導晶片上，特色為成本低且架構簡單；在系統光路方面可切換物光與參考光的偏極態，並使用分光鏡與一可調整角度之反射鏡將光分別導入兩不同波導通道中，通過波導後再利用楊氏干涉儀架構將兩道光結合，接著通過四分之一波板與分析板以CCD擷取拍攝干涉條紋，影像由IMAQ影像擷取卡送回個人電腦作以五步相移演算法分析，其中相移的方式是旋轉系統中的分析板來達成。最後可由本系統程式根據物光的相位變化量算出波導邊界上的改變。 實驗中首先採不同濃度之葡萄糖(Glucose)水溶液為檢測樣本，經實驗結果驗證隨濃度增加相位變化亦隨之增加，經分析後可得到此系統具有量測小數點下四位折射率的解析度。此外本系統以ELISA之方式量測C反應蛋白(C-reactive protein, CRP)之專一性鍵結反應，並藉由雙偏極態所量測的訊號可反解出生物樣本薄膜的折射率與厚度值，該檢測結果將可使研究學者對於C反應蛋白之特性有更進一步的瞭解。 | zh_TW |
| dc.description.abstract | Waveguide interferometer is a special kind of evanescent wave sensors, which combines waveguide and interferometer. When a light beam propagates in a waveguide structure, the evanescent field can detect the property of surrounding dielectric media. Since the optical phase of TE and TM polarized light is influenced by both the boundary index and thickness variations to different degree, the evanescent wave can detect the boundary index and thickness variations precisely. Capitalize on this effect, the TE and TM mode polarizations can be used to provide independent information so as to deconvolute the thickness and the refractive index of bio-samples.
In this dissertation, a multi-channel waveguide interferometer system that includes low-cost optical wavrguide and new optical mechanism was built. The newly proposed waveguide chip is fabricated using a plasma enhanced chemical vapor deposition (PECVD) system. Since this process is a standard semiconductor fabrication technique in silicon oxynitride on silicon, the success rate of making this chip is high. The composition of waveguide was SiO2 permeating by Ge. By adding the flux time of Ge, the index would increase. In addition, the channel structure was fabricated by wet eaching process. The optical configuration was developed based on Young’s Interferometry and the the polarization of amplelight and reference light could be exchanged in the system. Besides, a quarter wave plate, an analyzer, a CCD camera, and a personal computer consisted the phase modulation and signal analysis system of this waveguide interferometer. This newly developed multi-channeled waveguide interferometer system has been proved to have the ability of having 10-4 resolution in measuring reflective indices by measuring different glucose concentrations solutions. Furthermore, the study also verifies the capability of the ELISA experiment inherented within the newly developed system by detecting C-creative protein (CRP). By measuring both the TE and the TM modes, the newly developed system program converts the experimental results into the related bio-reaction information for further researches. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T04:21:37Z (GMT). No. of bitstreams: 1 ntu-95-R93543003-1.pdf: 2659441 bytes, checksum: 8baa4829f0704f5795a7009cce9ad849 (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | 中文摘要 i
Abstract ii 目錄 iv 圖目錄 vii 表目錄 x 第 1 章 緒論 1 1-1 研究背景與動機 1 1-2 文獻探討 3 1-2-1 生醫晶片檢測系統 3 1-2-2 波導干涉技術之研究與應用 6 1-3 研究貢獻 10 1-4 論文架構 10 第 2 章 波導干涉儀之基本原理 12 2-1 三層波導之分析 12 2-1-1 波動光學分析法 12 2-1-2 漸逝波現象 20 2-1-3 幾何光學分析法 22 2-2 波導模態之耦合方式 26 2-3 光學干涉原理 29 2-3-1 基本光學干涉 29 2-3-2 光相位解析法 33 2-3-3 步進式相移架構 37 2-3-4 旋轉分析板相移法 39 2-4 波導干涉儀系統靈敏度之探討 41 2-5 生物樣本參數之分析 43 2-5-1 四層波導之分析 43 2-5-2 光學參數與生物樣本參數之關係 46 第 3 章 多通道波導晶片設計與製作 48 3-1 波導晶片介紹 48 3-2 波導晶片材料備製 49 3-2-1 電漿輔助氣相沈積法 49 3-2-2 波導基板與材料選擇 51 3-3 波導晶片製作流程 52 3-4 波導晶片參數量測 58 第 4 章 多通道波導干涉儀之研製 59 4-1 系統光路設計 59 4-2 系統元件選擇與機構設計 61 4-2-1 元件選擇 61 4-2-2 機構設計 63 4-2-3 系統流道製作 65 4-3 校正系統光路 66 4-3-1 光路校準步驟 66 4-3-2 偏極元件校準步驟 69 4-3-3 波導耦合調校步驟 70 4-4 系統檢測流程 71 4-4-1 系統操作界面 71 4-4-2 系統量測步驟 73 第 5 章 實驗模擬與分析 75 5-1 波導模態分析 75 5-2 波傳常數模擬 77 5-3 多披覆層折射率與厚度變化分析 82 第 6 章 實驗結果與討論 84 6-1 多通道波導晶片導光性測試 84 6-2 旋轉分析板相位調製法測試 85 6-3 葡萄糖水溶液量測 87 6-3-1 葡萄糖水溶液樣本備製 87 6-3-2 訊號重複性與再現性 88 6-3-3 樣本折射率量測 90 6-4 生物薄膜量測 93 6-4-1 酵素免疫分析法(ELISA)反應與量測步驟 94 6-4-2 分子薄膜量測結果與分析 95 第 7 章 結論與未來展望 100 7-1 結論 100 7-2 未來展望 101 第 8 章 參考文獻 103 | |
| dc.language.iso | zh-TW | |
| dc.title | 多通道波導干涉儀之設計與研製 | zh_TW |
| dc.title | Design and Fabrication of a Multi-Channel Waveguide Interferometer | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.coadvisor | 吳光鐘 | |
| dc.contributor.oralexamcommittee | 林世明,黃榮山,金立德 | |
| dc.subject.keyword | 波導干涉儀,多通道, | zh_TW |
| dc.subject.keyword | waveguide interferometer,multi-channel, | en |
| dc.relation.page | 108 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-07-24 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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