利用鈮酸鋰二維非線性光子晶體倍頻產生紅、綠、藍雷射光源之研究

Abstract

本篇論文主要可以分為準相位匹配原理的介紹、二維週期性極化反轉非線性光子晶體的製作，以及In-situ即時光學影像觀察系統架設等三大部分。 首先在原理部分，吾人簡單的介紹了非線性頻率轉換，與準相位匹配的理論。 接著在製程部分，吾人介紹本實驗室建立的高電壓極化反轉系統，並逐一說明幾種常使用的製程方式，包括：高溫鋰離子外擴散法、厚膜光阻絕緣層法、高介電係數SiO2薄膜絕緣層法以及光阻法的改良，最後互相比較其優缺點。目前已經在厚度500500μm 的鈮酸鋰中成 功製作出週期6.8μm 與以上的二維週期性極化反轉結構，有效長度 可達6mm；可達成以二倍頻技術輸出紅光、綠光雷射光源。 最後在In-situ 即時觀察部分，吾人利用簡單的架構以及光學的 方式，可確實觀察到在進行高電壓極化反轉時，微米極區域的側擴散 現象，證實了In-situ 系統的可行性。

This thesis is organized into three parts: (a) an introduction to the theory of quasi-phase matching, (b) the design and fabrication of two-dimensional periodically poled congruent grown LiNbO3 (2D-PPCLN), and (c) the in-situ observation system. At first, the theory of nonlinear frequency conversion and quasi-phase matching is briefly introduced. Several fabrication methods, including using the surface domain inversion to make periodically poled structure, and using the high permittivity material or photoresist as insulator to make periodically poled structure were tested and comparison was made. A 500μm thickness 2D-PPCLN with 6.8μm period and 6mm effective length is made. A simple I n-situ observation system was presented. This non-destructive technique provides visual information of the quality and dynamics of domain formation during the PPCLN fabrication process.