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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 顏家鈺 | |
| dc.contributor.author | Yao-Ting Mao | en |
| dc.contributor.author | 毛耀霆 | zh_TW |
| dc.date.accessioned | 2021-06-13T04:12:00Z | - |
| dc.date.available | 2006-08-01 | |
| dc.date.copyright | 2006-07-28 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-24 | |
| dc.identifier.citation | [1] In Soh, H.T., Guarini, K.W., Quate, C.F., Scanning probe lithography, Kluwer Academic Publishers, Boston, Dordrecht, London, 2001.
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Instrm., 72 (1), pp. 136-141, Jan., 2001. [12] Porter, Jr., Lon A., Alexander E. Ribbe, and Jillian M. Buriak, “Metallic Nanostructures via Static Plowing Lithography,” Nano Letters, 3 (8), pp. 1043-1047, 2003. [13] Kunze, U and B. Klehn, “Nanolithography with an AFM by means of vector-scan controlled dynamic plowing,” J. Appl. Phys., Vol. 85, pp. 3897-3903, 1999. [14] Yamamoto, S., H. Yamada, and H. Tokumoto, “Nanometer Modification of Non-Conductive Materials Using Resist-Films by Atomic Force Microscopy,” Jpn. J. Appl. Phys. 1, 34, pp. 3396, 1995. [15] Sohn, L. L. and R. L. Willett, “Fabrication of nanostructures using atomic-force-microscope-based lithography,” Appl. Phys. Lett., 67 (11), pp. 1552-1554, Sep., 1995. [16] Bouchiat, V. and D. Esteve, “Lift-off lithography using an atomic force microscope,” Appl. Phys. Lett., 69 (20), pp. 3098-3100, Nov., 1996. [17] Magno, R. and B. 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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/32591 | - |
| dc.description.abstract | 本文藉由掃描式探針顯微鏡提出三維的奈米微影。以前的研究已經可以證明伺服控制對壓電材料能產生有效的三維控制。然而對於試片材料的動態掌握，且用於微影上尚未有有效的結論。本篇研究指出利用探針與試片的特性，及多種微影的演算法則使得試片表面上的材料有推擠，排開的效果。並且探討成因及比較彼此的差異性。本篇論文顯示經由特殊的演算法則，可以得到更為立體的微影圖形。此外介紹 Model Reference Control(I/O linearization control)，可以由設計過程，看到其模擬表現，並且藉由實驗，驗證此控制符合設計的需求。 | zh_TW |
| dc.description.abstract | This thesis addresses the 3-dimensional scanning probe microscope (SPM) lithography. Previous researches have shown that servo control imposes significant effect on the behavior of the piezo-electric actuators used in the SPM system; however, there is very little discussion on the dynamics of sample material and lithography effect. This paper points out that the debris can be push and squeezed by the properly controlling the relationship between the probe and the sample. The thesis shows that an appropriate multi-dimensional lithography algorithm is essential to good 3D lithography and discusses the corresponding effects. This paper also addresses the more concrete lithography results by special algorithm. The design procedure for a model reference controller is also presented to achieve dynamic matching among different axes. The experimental results confirm the design specifications. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T04:12:00Z (GMT). No. of bitstreams: 1 ntu-95-R93522809-1.pdf: 2951697 bytes, checksum: 3a1b63a1303922525a3d4d073d8ca607 (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | 目錄
摘要 I ABSTRACT II 目錄 III 表目錄 V 圖目錄 VI 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 2 1.3 研究動機與目的 5 1.4 論文架構 7 第二章 原子力顯微鏡(AFM)系統 8 2.1 原子力顯微鏡介紹 8 2.2 原子力顯微鏡硬體架構 9 2.2.1 AFM作用原理 9 2.2.2 壓電圓管 11 2.2.3 探針懸臂樑 12 2.2.4 光位移感測器(position sensitive photo detector, PSPD) 14 2.2.5 原子力顯微鏡的操作模式 15 2.3 實驗硬體與軟體設備 16 第三章 研究方法 26 3.1 系統識別 26 3.2控制器的設計 33 3.2.1 PID控制器 33 3.2.2 Model Reference (I/O linearization control)原理簡介 38 3.2.3 Model reference(I/O linearization control)數位設計方式： 44 3.2.4 Model reference(I/O linearization control)simulation： 47 第四章 實驗與結果 57 4.1. PI控制器 57 4.2 PI 控制器的微影結果 64 4.2.1方陣微影結果 64 4.2.2棋盤微影結果 67 4.2.3台灣地圖微影結果 69 4.2.4任意圖片的微影結果 71 4.2.5太極圓微影結果 73 4.2.6螺旋微影結果 75 4.2.7立體奈米線方法一 80 4.2.8立體奈米線方法二 84 4.2.9立體奈米點方法一 86 4.2.10立體奈米點方法二 91 4.3 model reference控制器 92 4.4 model reference 控制器的微影結果 99 4.4.1三角波 99 4.4.2方波 101 4.4.3立體台灣 102 4.5 MR與PI 控制器的比較 106 4.5.1 小方陣 106 第五章 結論與未來展望 108 | |
| dc.language.iso | zh-TW | |
| dc.subject | 掃描式探針顯微鏡 | zh_TW |
| dc.subject | 壓電材料 | zh_TW |
| dc.subject | Model reference control | en |
| dc.subject | SPM | en |
| dc.subject | PZT | en |
| dc.title | 以掃描探針顯微鏡研製三維奈米結構 | zh_TW |
| dc.title | SPM Technology for Machining Tree-Dimensional Nano Patterns | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 胡竹生,李世光 | |
| dc.subject.keyword | 掃描式探針顯微鏡,壓電材料, | zh_TW |
| dc.subject.keyword | SPM,PZT,Model reference control, | en |
| dc.relation.page | 112 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-07-26 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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