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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/32066Full metadata record
| ???org.dspace.app.webui.jsptag.ItemTag.dcfield??? | Value | Language |
|---|---|---|
| dc.contributor.advisor | 王維新(Way-Seen Wang) | |
| dc.contributor.author | Kuan-Yu Chen | en |
| dc.contributor.author | 陳冠宇 | zh_TW |
| dc.date.accessioned | 2021-06-13T03:30:12Z | - |
| dc.date.available | 2011-07-31 | |
| dc.date.copyright | 2006-07-31 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-26 | |
| dc.identifier.citation | [1] D. Piehler, “Compact blue/green solid state lasers for the OEM marketplace,” Proc. of IEEE Lasers and Electro-Optics Society Annual Meeting, Vol. 2(31), pp.439-440, 31 Oct.-3 Nov. 1994.
[2] G. J. Dixon, “Compact blue-green lasers get down to business,” IEEE Circuits and Devices Magazine, Vol. 9(6), pp.18-22, 34, Nov. 1993. [3] R. L. Gunshor and A. V. Nurmiko, “The first compact blue/green diode lasers-wide-bandgap II-VI semiconductors come of age,” Proc. of the IEEE, Vol. 82(10), pp.1503-1513, Oct. 1994. [4] R. L. Gunshor, N. Otsuka, and A. V. Nurmiko, “Blue lasers on the horizon,” IEEE Spectrum, Vol. 30(5), pp.28-33, May 1993. [5] S. K. Renukunta and D. H. Wells, “Optical memory and blue lasers,” IEEE Potentials, Vol. 13(4), pp.14-18, Oct.-Nov. 1994. [6] T. Wiener and S. Karp, “The role of blue/green laser systems in strategic submarine communications,” IEEE Transactions on Communications, Vol. 28(9), pp.1602-1607, Sep. 1980. [7] J. J. Puschell, R. J. Giannaris, and L. Stotts, “The autonomous data optical relay experiment: first two way laser communication between an aircraft and submarine,” Telesystems Conference, 1992. NTC-92., pp.14/27-14/30, 19-20 May 1992. [8] D. L. Begley, “Laser cross-link systems and technology,” IEEE Communication Magazine, August, pp.126-132, 2000. [9] Dow Chemical Company, Midland, MI. [10] P. E. Garrou, R. H. Heistand, M. G. Dibbs, T. A. Mainal, C. E. Mohler, T. M. Stokich, P. H. Townsend, G. M. Adema, M. J. Berry, and I. Turlik, “Rapid thermal curing of BCB dielectric,” IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 16, No. 1, Feb. 1993. [11] A. Modafe, N. Ghalichechian, M. Powers, M. Khbeis, and R. Ghodssi, “Embedded benzocyclobutene in silicon: an integrated fabrication process for electrical and thermal isolation in MEMS,” Microelectronic Engineering, Vol. 82, pp.154-167, 2005. [12] H. Gundlach, A. Knorr, S. Nijsten, K. Kumar, Z. Bian, R. Talevi, E. O. Shaffer, A. E. Kaloyeros, and R. E. Geer, “ Integration study of benzocyclobutene with CVD-based aluminum metallization,” in Proc. Interconnect Technology Conf., pp.277-279, June 1998. [13] 陳松良，「鈮酸鋰藍光方向耦合器之研製」，國立臺灣大學光電工程學研究所碩士論文，2005年。 [14] C. F. Kane and R. R. Krchnavek, “Benzocyclobutene optical waveguides,” IEEE Phot. Tech. Lett., Vol. 7, No. 5, May 1995. [15] Y. G. Zhao, W. K. Lu, Y. Ma, S. S. Kim, and S. T. Ho, “Polymer waveguides useful over a very wide wavelength range from the ultraviolet to infrared,” Appl. Phys. Lett., Vol. 77, No. 9, Nov. 2000. [16] 許志瑋，「高分子光波導元件之研製」，國立臺灣大學光電工程學研究所博士論文，2004年。 [17] http://ibme.mc.ntu.edu.tw/EP3/index.htm，國立台灣大學醫工所醫用微感測器實驗室網頁。 [18] J. A. Woollam Co., Inc., Lincoln, Nebraska. [19] P. E. Dyer and J. Sidhu, “Excimer laser ablation and thermal coupling efficiency to polymer films,” J. Appl. Phys. 57(4), 15 Feb. 1985. [20] A. Strååt and F. Nikolajeff, “Study of benzocyclobutene as an optical material at elevated temperatures,” Applied Optics, Vol. 40, No. 29, 10-Oct. 2001. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/32066 | - |
| dc.description.abstract | 本論文首次成功的以波長248nm的KrF準分子雷射，藉由直接照射 benzocyclobutene(BCB)的方式改變BCB的折射率而製作出導單模態藍光(473nm)的埋入式BCB光波導。
本研究同時也以稜鏡耦合系統，頻譜式橢偏儀等儀器，量測各波長下以不同雷射發數及雷射重複率照射後BCB的折射率；藉由調整雷射照射發數與光罩寬度，我們可以得到不同長寬比的光場場型。此外，本研究提出的藍光BCB光波導製程，相較於傳統乾式蝕刻製程來的簡單而且容易變化。 | zh_TW |
| dc.description.abstract | In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by prism coupler and spectroscopic ellipsometer, are dependent on the number of laser shots and the pulse repetition rate. By arranging the number of laser shots and the mask width, mode sizes with different aspect ratios can be obtained. Moreover, the proposed UV illumination method is much simpler and more flexible than the conventional dry etching method. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T03:30:12Z (GMT). No. of bitstreams: 1 ntu-95-R93941008-1.pdf: 3091937 bytes, checksum: e219f8d89b2df743aa5ba1b0811fa9a0 (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | 第一章 序論 1
1-1 研究背景 1 1-2 研究動機 1 1-3 內容概述 2 第二章 BCB高分子材料之簡介 3 2-1 BCB之特性 3 2-2 光學特性 5 第三章 藍光單導條件模擬 7 3-1 光束傳播法 7 3-2 模擬結果 8 3-2.1 改變折射率差 8 3-2.2 改變波導寬度 11 第四章 光波導製作 15 4-1 傳統BCB光波導之製作 15 4-2 基板與緩衝層之選擇 15 4-3 製作流程 17 4-3.1 晶片製備 17 4-3.2 雷射照射 19 第五章 量測與結果 21 5-1 量測架設 21 5-1.1 稜鏡耦合系統量測 21 5-1.2 頻譜式橢偏儀量測 22 5-1.3 光場量測 23 5-1.4 BCB光波導穩定性量測 24 5-2 量測結果 25 5-2.1 緩衝層折射率量測 25 5-2.2 雷射照射發數對BCB折射率變化之影響 30 5-2.3 雷射照射發數對光場之影響 36 5-2.4 雷射重複率對光場之影響 40 5-2.5 BCB光波導穩定性量測 42 5-2.6 電子束掃瞄式顯微鏡影像 44 第六章 結論與未來展望 47 參考文獻 48 中英文名詞對照 50 | |
| dc.language.iso | zh-TW | |
| dc.title | Benzocyclobutene高分子藍光光波導之研製 | zh_TW |
| dc.title | Fabrication of Blue-Laser Benzocyclobutene Optical Waveguide by UV Illumination | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 張宏鈞,王子建,陳瑞鑫 | |
| dc.subject.keyword | 藍光,光波導,高分子,準分子雷射, | zh_TW |
| dc.subject.keyword | Benzocyclobutene,BCB,Cyclotene,Optical Waveguide,Excimer Laser,KrF, | en |
| dc.relation.page | 50 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-07-28 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| Appears in Collections: | 光電工程學研究所 | |
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| File | Size | Format | |
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| ntu-95-1.pdf Restricted Access | 3.02 MB | Adobe PDF |
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