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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/31791完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 吳政忠(Tsung-Tsong Wu) | |
| dc.contributor.author | Jun-Yi Wu | en |
| dc.contributor.author | 吳俊億 | zh_TW |
| dc.date.accessioned | 2021-06-13T03:20:20Z | - |
| dc.date.available | 2007-07-31 | |
| dc.date.copyright | 2006-07-31 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-27 | |
| dc.identifier.citation | References
1. Yu-He Chiang, “The Study of Smart Humidity Sensors” , Master of F. C. university (2001) 2. 洪永杰,“HIH系列溼度感測元件使用說明”, http://designer.mech.yzu.edu.tw 3. H. Wohltjen, R. Dessy, “ Surface acoustic wave probe for chemical analysis”, Anal. Chem 51, p1458~1478 (1979) 4. H. Wohltjen,” Mechanism of operation and design consideration for surface acoustic wave device vapour sensors ”, Sensors and Actuators 5, p307~324 (1984) 5. S. G. Joshi, J. G. Brace, “ Measurement of humidity using surface acoustic waves”, Proc. IEEE Ultrasonics Symp., San Francisco, CA, U.S.A., p600~602 (1985) 6. M. . NIEUWENHUIZEN, A. J. NEDERLOF, “A SAW Gas Sensor for Carbon Dioxide and Water. Preliminary Experiments”, Sensors and Actuators B 2, p97~101 (1990) 7. T. Nomura, K. Oofuchi, T. Yasuda, S. Furukawa, “ SAW humidity sensor using dielectric hygroscopic polymer film “, IEEE Ultra. Symp., p503~506 (1994) 8. Kofi Korsah, C.L. Ma, Bill Dress,” Harmonic frequency analysis of SAW resonator chemical sensors: application to the detection of carbon dioxide and humidity”, Sensors and Actuators B 50, p110~116 (1998) 9. Edmilson R. Braga, Alberto Y. Nakano, “ A SAW resonator sensor system employed in humidity measurements ”, SBMO/IEEE MTT-S IMOC’99 Proc, p342~345 (1999) 10. M. Penza, G. Cassano, “ Relative humidity sensing by PVA-coated dual resonator SAW oscillator”, Sensors and Actuators B 68, p300~306, (2000) 11. Wang, S. M. (2002), “The design and measurement of an IF SAW filter,” Master thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan. 12. Lin, G. M. (2003), “Analysis of RF Wide Band Layered SAW filter Using Slanted Finger Interdigital Transducer”, Master thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan. 13. Abbott, B. P., “A Coupling-of-Modes Model for SAW Transducers With Arbitrary Reflectivity Weighting,” Ph.D. dissertation, the Department of Electrical Engineering at the University of Central Florida Orlando, Florida (1989). 14. Abbott, B. P., Hartmann, C. S. and Malocha, D. C., “A Coupling-of-Modes Analysis of Chirped Transducers Containing Reflective Electrode Geometries,” Proc. IEEE Ultra. Symposium, pp.129 ~134, (1989). 15. Abbott, B. P., “A Derivation of the Coupling-of-Modes Parameters Based on the Scattering Analysis of SAW Transducers and Gratings,” Proc. IEEE Ultra. Symposium, pp. 5~10, (1991) . 16. Abbott, B. P., Hartmann, C. S. and Malocha, D. C., “Transduction Magnitude and Phase for COM Modeling of SAW Devices,” IEEE Transactions on Ultrasonics, Ferroelectics, and Freq.Contr., vol. 39, Jan., pp. 54~60, (1992) 17. Ming-Sheng Young, “ Characteristics of Surface Acoustic Wave Sensor”, Master of National C.K. university (2002) 18. Siemens Matsushita Components, “Principles of SAW-stabilized oscillators and transmitters” 19. Ron F. Schmitt, John W. Allen, Randy Wright, “Rapid design of SAW oscillator electronics for sensor applications”, Sensors and Actuators B 76, p80~85, (2001) 20. Mini-Circuits, “biasing MMIC amplifiers” 21. Jay W. Grate, Mark Klusty, “ Surface acoustic Wave Vapor Sensors Based on Resonator Devices”, Anal. Chem. 63, p1719~1727, (1991) 22. A. Snow, H. Wohtjen,” Poly(ethylene maleate)-cyclopentadiene: a model reactive polymer–vapor system for evaluation of a SAN microsensor”, Anal. Chem. 56 , p1411–1416. (1984) 23. Relative humidty: http://en.wikipedia.org/wiki/Relative_humidity 24. C. Caliendo, A. D’Amico, P. Verardi, E. Verona, “ Surface acoustic wave H2 sensor on silicon substrate ”, IEEE Ultra. Symp. , p569~574 (1988) 25. Wieslaw Jakubik, “ Hydrogen detection in Surface Acoustic Wave gas sensor based on interaction speed ”, IEEE, p1514~1517 (2004) 26. Samuel J. Ippolito, Sasikaran Kandasamy, “ A layered Surface Acoustic Wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen sensing “, Sensor Letters Vol. 1, p1~4 (2003) 27. Samuel J. Ippolito, S. Kandasamy, K. Kalantar-Zadeh, W. Wlodarski, “ Layered SAW hydrogen sensor with modified tungsten trioxide selective layer “, Sensors and Actuators B 108, p553~557 (2005) | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/31791 | - |
| dc.description.abstract | With the development of industries, there is a growing need for sensitive, accurate, and inexpensive sensors of measuring relative humidity. Humidity sensors are expected for a broad spectrum of applications in meteorology, chemical industry, process control, medical instrument, agriculture, and etc. A good sensor should be characterized by high sensitivity, wide dynamic range, fast response, good reproducibility, easy interface electronics, small size, and minimum cost. It is hard for single sensing system matches all these criterions. However, surface acoustic wave ( SAW) sensing devices are promising candidates to pursue the above goals.
In this thesis, the 145MHz based SAW resonator is fabricated and integrated with the amplifier to form a SAW-based oscillator. To function as a humidity sensor, hygroscopic polymer polyethylenimine is coated on the delay line of the resonator as sensing film by airbrush method. Moreover, dual delay line configuration is constructed for the common mode rejection for external influences such as temperature, drift, etc. Then, the sensing devices are exposed to repeated cycles with various relative humidity to investigate the performances including sensitivity, reproducibility, and repeatability. The results reveal good linearity between frequency shifts and various relative humidity and enough short-term repeatability. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T03:20:20Z (GMT). No. of bitstreams: 1 ntu-95-R93543010-1.pdf: 1677991 bytes, checksum: 5cb74216802839e912a2a16695c08e7f (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | Acknowledgements I
Abstract II Lists of Notations III Table of Contents V List of Figures VII List of Tables IX Chapter 1 Introduction 1 1-1 Research Motivation 1 1-2 Classification of Humidity Sensors 2 1-3 Literature Review 3 1-4Contents of the Chapters 4 Chapter 2 Abbott COM & Principles of SAW Sensor 7 2-1 Coupling-of- Modes Model 7 2-1.1 First Order Wave Equations 7 2-1.2 Propagation Loss 9 2-1.3 Reflectivity Coupling 10 2-1.4Transduction Coupling 13 2-1.5 [P] Matrix 15 2-1.6 Simulation of Two-Port SAW Filter 19 2-2 Principles of SAW Sensor 22 2-2.1 Mass Loading Effect 23 2-2.2 Chemically Interactively Film 24 2-2.3 Sensitivity 25 Chapter 3 Preparation of SAW Sensor System 32 3-1 Principles of SAW-based Oscillators 32 3-1.1 Oscillators with Two-port Resonators 33 3-1.2 Fabrication of the SAW Resonator 34 3-1.3 Design of the Amplifier 36 3-2 Dual Delay Line Configuration 38 3-3Deposition of Chemically Interactive Film 39 3-3.1 Selection of Sensing Film 40 3-3.2 Spray-Coated Polymer Filmr 40 3-4 Gas Flow System for Various Relative Humidity 41 Chapter 4 Construction of SAW Sensor System & Humidity Measurements 51 4-1 Fabrication of SAW sensor 51 4-1.1 Measurement of SAW oscillator 51 4-1.2 Measurement of Dual Delay Line Configuration 52 4-2 Deposition of Hygroscopic Film 52 4-3 Temperature Effect on SAW Sensor 53 4-4 Interface of Data Acquisition & Real-time Visualization 54 4-5 Measurements of Sensors toward Various RH 55 4-5.1 Repeatability 55 4-5.2 Sensitivity 56 4-5.3 Noise & Limit of Detection 58 Chapter 5 Conclusions and Future Work 71 5-1 Conclusions 71 5-2 Future work 72 References 73 | |
| dc.language.iso | en | |
| dc.subject | 靈敏度 | zh_TW |
| dc.subject | 表面聲波 | zh_TW |
| dc.subject | 共振器 | zh_TW |
| dc.subject | 溼度感測器 | zh_TW |
| dc.subject | 聚乙基亞胺 | zh_TW |
| dc.subject | 噴槍 | zh_TW |
| dc.subject | Sensitivity | en |
| dc.subject | Surface acoustic wave | en |
| dc.subject | Resonator | en |
| dc.subject | Humidity sensor | en |
| dc.subject | Polyethylenimine | en |
| dc.subject | Airbrush | en |
| dc.title | 128°YX-LiNbO3基底表面聲波式溼度感測器之研究 | zh_TW |
| dc.title | Study of 128°YX-LiNbO3 Based Surface Acoustic Wave Humidity Sensor | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 劉佩玲(Pei-Ling Liu),郭茂坤(Mao-Kueng Kuo) | |
| dc.subject.keyword | 表面聲波,共振器,溼度感測器,聚乙基亞胺,噴槍,靈敏度, | zh_TW |
| dc.subject.keyword | Surface acoustic wave,Resonator,Humidity sensor,Polyethylenimine,Airbrush,Sensitivity, | en |
| dc.relation.page | 75 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-07-30 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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