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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 吳政忠,劉佩玲 | |
| dc.contributor.author | "Liu, Wang-Ning" | en |
| dc.contributor.author | 劉萬能 | zh_TW |
| dc.date.accessioned | 2021-06-13T02:42:25Z | - |
| dc.date.available | 2007-12-15 | |
| dc.date.copyright | 2006-12-15 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-12-05 | |
| dc.identifier.citation | REFERENCES
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Braga A.M.B., Barbone P., Herrmann G., “Wave propagation in Piezoelectric Layered Media with Some Applications”, J. Intelligent Material Systems and Structures, 2(4), pp. 542-557, 1991. 9. T.-T. wu, Y.-Y. Chen, “Analysis of Surface Acoustic waves in Layered Piezoelectric Media and its Application to the Design of SAW Devices,” The Chinese Journal of Mechanics-Series A, Vol. 19 10. Ivan D. Avranov, “High Q metal strip SSBW Resonators Using a SAW design”, IEEE Trans. UFFC, 37, pp,530-534, 1990. 11. 王聖銘, “中頻表面聲波濾波器之設計與量測”, 國立臺灣大學應用力學研究所碩士論文. 12. Sheng-Yuan Chu, Walter Water, “Influences of reflector gratings on the properties of Love wave acoustic sensors in ZnO/Quartz structure.”, Integrated Ferroelectrics, 51:121-125, 2003. 13. 黃志達, “ZnO/ST-cut Quartz 振盪式層狀表面聲波黏度感測器”, 國立臺灣大學應用力學研究所碩士論文. 14. Sheng-Yuan Chu, Walter Water, Jih-Tsang Liaw, “An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure” Ultrasonics 41, 2003, 133-139. 15. Bernhard Jakoby, Michael J. Vellekoop, “Viscosity sensing using a Love wave device”, Sensors and Actuators A, 68, pp. 275-281, 1998. 16. 無線電高頻電路，袁杰，pp.10-2，全華科技。 17. 高頻電路設計，市川 裕一、青木 勝，全華科技。 18. 高頻通訊電路設計，袁帝文、王岳華、謝孟翰、王弘毅，高力圖書。 19. Ron F. Schmitt, John W. Allen, Randy Wright, ”Rapid design of SAW electronics for sensor applications”, Sensors and Actuators B 76, 2001, 80-85. 20. Bernhard Jakoby, Jeroen Bastemeijer, Michael J. Vellekoop. ”Temperature-compensated Love-wave sensors on quartz substrates”, Sensor and Actuators, 82, pp.83-88, 2000. 21. D.S. Ballantine, Jr., R.M. White, S.J. Martin, E. T. Zellers, H. Wohltjen, “Acoustic Wave Sensors Theory, Design, and Physico-Chemical Applications”, San Diego : Academic Press, c1997. 22. 邱佳松,”The study of high frequency acoustic wave oscillator and applications”, 中原大學碩士論文, 2002. 23. Yu-Tang Shen, Cheng-Liang Huang, Robert Chen, Long Wu, “A novel SH-SAW sensor system”, Sensors and Actuators B, 107(2005) 283-290. 24. Ventsislav M. Yantchev and Vesseline L. Strashilov, “Coupling-of-Modes Analysis of STW Resonators Including Loss Mechanism”, IEEE Transactions on ultrasonics, Ferroelectrics, and Frequency Control, vol. 49, No. 3, March 2002. 25. 陳永裕, ”A Theoretical and Experimental Study of Layered SAW Devices”, 台灣大學博士論文, 2002. 26. 水瑞鐏,”Characterization of ZnO Thin Film and its applications on communication devices and liquid sensors”,成功大學博士論文, 2002. 27. J. Du, G.L. Harding, A.F. Collings, P.R. Dencher, ”An experimental study of Love-wave acoustic sensors operating in liquids”, Sensors and Actuators A, 60(1997) 54-61. 28. B. Jakoby, A. Venema, and M. J. Vellekoop, “Design of Love wave sensor devices for the operation in liquid environments”, IEEE Ultrasonics Symp. 375, 1997. 29. Kourosh Kalantar Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, “A novel Love-mode device based on a ZnO/ST-cut quartz crystal structure for sensing applications”, Sensors and Actuators A, 100 (2002) 135-143. 30. Yung-Yu Chen and Tsung-Tsong Wu (2004) “Exact analyses of Love wave liquid sensors based on SiO2/quartz and ZnO/quartz structures,” 21th National Conference on Mechanical Engineering, Kaoshiung, Taiwan. 31. J. Du, G. L. Harding, J.A. Ogilvy, P.R. Dencher, M. Lake, ”A study of Love-wave acoustic sensors”, Sensors and Actuators A, 56 (1996) 211-219. 32. Geoffrey L Harding and Jia Du,”Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers”, Smart Mater. Struct. 6 (1997) 716-720. 33. Kourosh Kalantar-Zadeh, Wojtek Wlodarski, Adrian Trinchi, Anthony Holland, “Love mode SAW sensors with ZnO layer operating in gas and liquid media”, 2002 IEEE International Frequency Control Symposium and PDA Exhibition, 268. 34. A Leidl, I Oberlack, U Schaber, B Mader and S Drost, “Surface acoustic wave devices and applications in liquid sensing”, Smart Mater Struct. 6, 680-688, 1997. 35. Ren-Chuan Chang, Sheng-Yuan Chu, Cheng-Shong Hong, Yu-Ting Chuang, “An investigation of preferred orientation of doped ZnO films on the 36° YX-LiTaO3 substrates and fabrications of Love-mode devices”, Surface & Coatings Technology 200 (2006) 3235-3240. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/31314 | - |
| dc.description.abstract | 所有表面聲波中，拉福波基於波導層可增強表面橫波能量且可保護交指叉換能器(IDT)，是最適於液體感測。選擇氧化鋅(ZnO)當波導層，拉福波感測器之機電耦合係數與頻率的溫度係數(TCF)都將趨向有利的改善。結合聚二甲基矽氧化硫(PDMS)所製成之流穿式樣品槽於拉福波感測器上，可對集中於兩組交指叉電極間的微量樣品作感測，且可減少液體電性對於電極邊界條件所產生之不良影響。
在本論文，將133MHz石英基材上鍍上氧化鋅(ZnO/ST-cut quartz)之拉福波感測器整合於震盪器，形成拉福波震盪器。拉福波感測器之敏感度值隨著低黏滯性液體會有增加之趨勢，拉福波震盪器的頻率溫度係數為11ppm/℃。為了消除感測時之環境因素影響，諸如溫度、濕度等，應用雙震盪器之電路結構於感測當中。感測裝置用於量測數種甘油與水的不同混合比例，並且量測三次已確定其重複性，實驗結果顯示拉福波感測器適用於低黏滯性之量測。 | zh_TW |
| dc.description.abstract | Among surface acoustic wave (SAW) sensors, Love wave, which is based on the guiding layer can enhance the energy of SH wave and protect IDT, is suited for using in liquid measurement. By choosing ZnO as a guiding layer, the performance of Love wave sensor will be improved including electromechanical coefficient and temperature coefficient of frequency (TCF). The Polydimethylsiloxane (PDMS) flow cell incorporated on Love wave sensor allows a tiny controlled amount of analyte to be confined solely upon the sensing area between IDTs and prevents unwanted electric interactions with IDTS.
In this thesis, the 133MHz ZnO/ST-cut Quartz based Love wave sensor was fabricated and integrated the amplifier to form a Love wave oscillator. The sensitivity of Love wave sensor was measured higher with lower viscosity and TCF of our design Love wave oscillator was performed 11ppm/ ℃. Dual oscillator configuration was constructed to eliminate most environment factors such as temperature, humidity and etc. Then, the sensing device was used to measure with various glycerin mixed with DI water. In order to investigate the repeatability performance, all the measurement was done three times. The results show our design Love wave sensor is suitable for low viscosity sensing. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T02:42:25Z (GMT). No. of bitstreams: 1 ntu-95-R93543043-1.pdf: 1197561 bytes, checksum: ed484a1222b8e81276286539aa2dda9d (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | Table of Contents
口試委員會審定書 …………………………………………………... i 志謝 …………………………………………………………………… ii 中文摘要 …………………………………………………………….... iii ABSTRACT ……………………………………………………………… iv TABLE OF CONTENTS ………………………………………… v LIST OF FIGURES ………………………………………… vii LIST OF TABLES ……………………………………………… ix LIST OF NOTATIONS ……………………………………………… x CHAPTER 1 INTRODUCTION ……………………………… 01 1-1 Literature Review …………………………………... 01 1-2 Research Motivation …………………………………... 03 1-3 Content of the Chapters ………………………………….. 05 CHAPTER 2 THEORY AND DESIGN OF LOVE WAVE SENSOR … 06 2-1 Surface Acoustic Waves in Layered Piezoelectric Medium … 06 2-2 Surface wave propagation in viscous liquid ………………... 10 2-3 Dispersion Relation ………………………………………… 15 2-4 Sensor design considerations ……………………………… 17 2-4-1 Substrate of a Love wave sensor …………………… 19 2-4-2 Waveguide Material …………………………………… 20 CHAPTER 3 DESIGN OF LOVE WAVE OSCILLATOR …………… 22 3-1 Configuration of Love wave sensor ….……………………….. 22 3-2 Fabrication of Love wave sensor …………………………… 25 3-2.1 Fabrication of sensor …………………………… 25 3-2.2 Thickness of ZnO …………………………… 32 3-2.3 Frequency response …………………………… 33 3-3 Oscillator ………………………………………. 35 3-3-1 Amplifier design ……………………………. 36 3-3-2 Phase shifter ……………………………. 39 3-3-3 Love wave oscillator ……………………………. 41 3-4 Dual oscillator configuration ……………………………. 44 CHAPTER 4 RESULTS AND DISCUSSIONS …………………. 47 4-1 Measurement setup …………………………………. 47 4-1-1 PDMS flow cell …………………………………. 47 4-1-2 The structure of measurement …………………. 51 4-2 Sensitivity ……………………………………………. 54 4-3 Temperature effect and noise ……………………………. 57 4-4 Analyte preparation for viscosity measurement ……………. 61 4-5 Measurement of liquid viscosity ………………………. 62 4-6 Repeatability ………………………………………. 64 CHAPTER 5 CONCLUSION AND FUTURE WORKS ………. 65 5-1 Conclusion ……………………………………………. 65 5-2 Future perspectives ………………………………………. 66 REFERENCES …………………………………………………. 67 | |
| dc.language.iso | en | |
| dc.subject | 拉福波感測器 | zh_TW |
| dc.subject | 黏滯性 | zh_TW |
| dc.subject | 流穿式樣品槽 | zh_TW |
| dc.subject | 震盪器 | zh_TW |
| dc.subject | 表面聲波 | zh_TW |
| dc.subject | Viscosity | en |
| dc.subject | Flow cell | en |
| dc.subject | Oscillator | en |
| dc.subject | Love wave | en |
| dc.subject | Surface acoustic wave | en |
| dc.subject | Resonator | en |
| dc.subject | ZnO/ST-cut Quartz | en |
| dc.title | 共振式拉福波震盪器之設計與應用 | zh_TW |
| dc.title | Design and Application of A Resonantor Type Love Wave Oscillator | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 95-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.advisor-orcid | ,劉佩玲(peiling@spring.iam.ntu.edu.tw) | |
| dc.contributor.oralexamcommittee | 郭茂坤 | |
| dc.subject.keyword | 表面聲波,拉福波感測器,震盪器,流穿式樣品槽,黏滯性, | zh_TW |
| dc.subject.keyword | Surface acoustic wave,Love wave,Resonator,ZnO/ST-cut Quartz,Flow cell,Oscillator,Viscosity, | en |
| dc.relation.page | 70 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-12-06 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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|---|---|---|---|
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