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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Lu-Jung Chen | en |
dc.contributor.author | 陳律蓉 | zh_TW |
dc.date.accessioned | 2021-06-13T01:25:29Z | - |
dc.date.available | 2014-08-09 | |
dc.date.copyright | 2011-08-09 | |
dc.date.issued | 2011 | |
dc.date.submitted | 2011-08-02 | |
dc.identifier.citation | Abadal, G., Davis, Z.J., Helbo, B., Borrise, X., Ruiz, R., Boisen, A., Campabadal, F., Esteve, J., Figueras, E., P’erez-Murano F., Barniol, N., “Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection”, Nanotechnology, Vol. 12(2), pp. 100-104, 2001.
Arntz, Y., Seelig, J.D., Lang, H.P., Zhang, J., Hunziker, P., Ramseyer, J.P., Meyer, E., Hegner, M., Gerber, Ch., “Label-free protein assay based on a nanomechanical cantilever array”, Nanotechnology, Vol. 14, pp. 86-90, 2003. Baller, M.K., Lang, H.P., Fritz, J., Gerber, Ch., Gimzewski, K.J., Drechsler, U., Rothuizen, H., Despont, M., Vettiger, D., Battiston, F.M., Ramseyer, J.P., Fornaro, P., Meyer, E., Guntherodt, H.J., “A cantilever array-based artificial nose”, Ultramicroscopy, Vol. 82, pp. 1-9, 2000. Battiston, F.M., Ramseyer, J.P., Lang, P.H., Baller, M.K., Gerber, Ch., . Gimzewski, J.K., Meyer E., Guntherodt, H.J., “A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout”, Sensors and Actuators B, Vol. 77, pp. 122-131, 2001. Berger, R., Delamarche, E., Lang, H.P., Gerber, Ch., Gimzewski, J.K., Meyer, E., Guntherodt, H.J., “Surface stress in the self-assembly of alkanethiols on gold”, Science, Vol. 276, pp. 2021-2024, 1997. Binning, G., Quate, C.F., Gerber, Ch., “Atomic force microscope”, Physical review letters, Vol. 56, No. 9, pp. 930-933, 1986. Braun, T., Barwich, V., Ghatkesar, M.K., Bredekamp, A.H., Gerber, C., Hegner, M., Lang, H.P., “Micromechanical mass sensors for biomolecular detection in a physiological environment”, Physics Review, E72, 031907, 2005. Burg, T.P., Manalis, S.R., “Suspended microchannel resonators for biomolecular detection”, Applied Physics Letters, Vol. 83, No. 13, pp. 2698-2700, 2003. Burg, T.P., Member, IEEE, Mirza, Amir R., Milovic, N., Tsau, Christine H., Popescu, George A., Foster, John S., Manalis, Scott R., “Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection”, Journal of Microelectromechanical Systems, Vol. 15, No. 6, 2006. Burg, T.P., Godin, M., Knudsen, S.M., Shen, W., Carlson, G., Foster, J.S., Babcock, K., Manalis, S.R., “Weighing of biomolecules, single cells and single nanoparticles in fluid”, Nature, Vol. 446, pp. 1066-1069, 2007. Canavese, G., Marasso, S.L., Quaglio, M., Cocuzza, M., Ricciardi, C., Pirri, C.F., “Polymeric mask protection for alternative KOH silicon wet etching”, Journal of Micromechanics and Microengineering, Vol. 17, No. 7, pp. 1387-1393, 2007. Chunara, R., Godin, M., Knudsen, Scott M., Manalis, Scott R., “Mass-based readout for agglutination assays”, Applied Physics Letters, Vol. 91, No. 19, pp. 193902 - 193902-3, 2007. Enders, O., Korte, F., Kolb, H.A., “Lorentz-force-induced excitation of cantilevers for oscillation-mode scanning probe microscopy”, Surface and Interface Analysis, Vol. 36, pp. 119-123, 2004. Franks, W., Lange, D., Lee, S., Hierlemann, A., Spencer, N., Baltes, H., “Nanochemical surface analyzer in CMOS technology”, Ultramicroscopy, Vol. 91(1-4), pp. 21-27, 2002. Fritz, J., Baller, M.K., Lang, H.P., Rothuizen, H., Vettiger, P., Meyer, E., Guntherodt, H.-J., Gerber, Ch., Gimzewski, J.K., “Translating biomolecular recognition into nanomechanics”, Science, Vol. 288, pp. 316-318, 2000. Godin, M., Bryan, A.K., Burg, T.P., Babcock, K., Manalis, Scott R., “Measuring the mass, density, and size of particles and cells using a suspended microchannel resonator”, Applied Physics Letters, Vol. 91, No. 12, pp. 123121 - 123121-3, 2007. Hansen, K.M., Ji, H.F., Wu, G., Datar, R., Cote, R., Majumdar, A., Thundat, T., “Cantilever-based optical deflection assay for discrimination of DNA single-nucleotide mismatches”, Analytical Chemistry, Vol. 73, pp. 1567-1571, 2001. Ji, H.F., Hansen, K.M., Hu, Z., Thundat, T., “Detection of pH variation using modified microcantilever sensors”, Sensors and Actuators B, Vol. 72, pp. 233-238, 2001. Johansson, A., Hansen, O., Hales, J., Boisen, A., “Temperature effects in Au piezoresistors integrated in SU-8 cantilever chips”, Journal of Micromechanics and Microengineering, Vol. 16, pp. 2564-2569, 2006. Kim, B.H., Kern, D.P., Raible, S., Weimar, U., “Fabrication of micromechanical mass-sensitive resonators with increased mass resolution using SOI substrate”, Microelectronic Engineering, Vol. 61-62, pp. 947-953, 2002. Lee, C., Itoh, T., Ohashi, T., Maeda, R., Suga, T., “Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid”, Journal of Vacuum Science & Technology B, Vol. 15(4), pp. 1559-1563, 1997. Lee, J.H., Yoon, K.H., Hwang, K.S., Park, J., Ahn, S., Kim, T.S., “Label free electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein”, Biosensors and Bioelectronics, Vol. 20, pp. 269-275, 2004. Liu, F., Zhang, Y., Ou-Yang, Z.C., “Flexoelectric origin of nanomechanic deflection in DNA-microcantilever system”, Biosensors and Bioelectronics, Vol. 18, pp. 655-660, 2003. Mamin, H.J., Rugar, D., “Thermomechanical writing with an atomic force microscope tip”, Applied Physics Letters, Vol. 61, pp. 1003–1005, 1992. Marie, R., Jensenius, H., Thaysen, J., Christensen, C.B., “Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors”, Ultramicroscopy, Vol. 91, pp. 29-36, 2002. Mckendry, R., Zhang, J., Arntz, Y., Strunz, T., Hegner, M., Lang, H.P., Baller, M.K., Certa, U., Meyer, E., Guntherodt, H.J., Gerber, C., “Multiple label-free biodetection and quantitative DNA-binding assays on a nanomechanical cantilever array”, Proceedings of the National Academy of Sciences of the United States of America, Vol. 99, No. 15, pp. 9783-9788, 2002. Mello L.D., Kubota, L.T., “Review of the use of biosensors as analytical tools in the food and drink in biomolecular sensors”, Science, Vol. 311, pp. 1592-1595, 2006. Moulin, A.M., O’Shea, S.J., Welland, M.E., “Microcantilever-based biosensors”, Ultramicroscopy, Vol. 82, pp. 23-31, 2000. Pei, J., Tian, F., Thundat, T., “Glucose biosensor based on the microcantilever”, Analytical Chemistry, Vol. 76, pp. 292-297, 2004. Ramadan, M.A.M., Shrive, A.K., Holden, D., Myles, A.A., Volanakis, J.E., DeLucas, L.J., Greenhough, T.J., “The three-dimensional structure of calcium-depleted human C-reactive protein from perfectly twinned crystals”, Acta Crystallographica, Section D, Vol. 58, pp. 992-1001, 2002. Rasmussen, P.A., Thaysen, J., Hansen, O., Eriksen, S.C., Boisen, A., “Optimised cantilever biosensor with piezoresistive read-out”, Ultramicroscopy, Vol. 97, pp. 371-376, 2003. Ridker, P.M., “High-sensitivity C-reactive protein potential adjunct for global risk assessment in the primary prevention of cardiovascular disease”, Circulation, Vol. 103, pp. 1813-1818, 2001. Ridker, P.M., Glynn, R.J., Hennekens, C.H., “C-reactive protein adds to the predictive value of total and HDL cholesterol in determining risk of first myocardial infarction”, Circulation, Vol. 97, No. 20, pp. 2007-2011, 1998. Scheller, F., Schubert, F., Biosensors, Elsevier Science Publishing Inc., New York, USA, 1992. Seidel, H., Csepregi, L., Heuberger, A., Baumgartel, H., “Anisotropic etching of crystalline silicon in alkaline solutions”, Journal of The Electrochemical Society, Vol. 137, pp. 3612-3626, 1990. Suresh, M.V., Singh, S.K., Agrawal, A., “Interaction of calcium-bound C-reactive protein with fibronectin is controlled by pH” The Journal of Biological Chemistry”, Vol. 279, pp. 52552-52557, 2004. Thaysen, J., Boisen, A., Hansen, O., Bouwstra, S., “Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical wheatstone bridge arrangement”, Sensors and Actuators A, Vol. 83, pp. 47-53, 2000. Tortonese, M., Barrett, R.C., Quate, C.F., “Atomic resolution with an atomic force microscope using piezoresistive detection”, Applied Physics letters, Vol. 62, No. 8, pp. 834-846, 1993. Tortonese, M., Yamada, H., Barrett, R.C., Quate, C.F., “Atomic force microscopy using a piezoresistive cantilever”, Solid-State Sensors and Actuators, pp. 448-451, 1991. Veijola, T., Corman, T., Enoksson, P., Stemme, G., ”Dynamic simulation model for a vibrating fluid density sensor”, Sensors and Actuators A, Vol. 79, pp. 213-224, 1999. Wu, G., Ji, H., Hansen, K., Thundat, O., Datar, R., Cote, R., Hagan, M.F., Chakraborty, A.K., Majumdar, A., “Origin of nanomechanical cantilever motion generated from biomolecular interactions”, Proceedings of the National Academy of Sciences, Vol. 98, pp. 1560-1564, 2001. Wu, G., Dater, R.H., Hansen, K.M., Thundat, T., Cote, R.J., Majumdar, A., “Bioassay of prostate-specific antigen (PSA) using microcantilevers”, Nature Biotechnology, Vol. 19, pp. 856-860, 2001. Yang, Y.T., Callegari, C., Feng, X.L., Ekinci, K.L., Roukes, M.L., “Zeptogram-scale nanomechanical mass sensing”, Nano Letters, Vol. 6, pp. 583-586, 2006. Yeh, T.H., Willerson, J.T., “Coming of age of C-reactive protein: using inflammation markers in cardiology”, Circulation, Vol. 107, pp. 370-372, 2003. Ziegler, C., “Cantilever-based biosensors”, Analytical and Bioanalytical Chemistry, Vol. 379, pp. 946-959, 2004. Zurn, S., Hsieh, M., Smith, G., Markus, D., Zang, M., Hughes, G., Nam, Y., Arik, M., Polla, D., “Fabrication and structural characterization of a resonant frequency PZT microcantilever”, Smart Materials And Structures, Vol. 10, pp. 252-261, 2001. http://www.life.nctu.edu.tw/~mb 施敏、張俊彥,半導體元件與物理與製作技術,高立圖書公司,1996。 林清泉, “臨床血清免疫學”,第二版,藝軒出版社,1997。 行政院國家科學委員會精密儀器發展中心出版,”微機電系統技術與應用”,2003。 游育諺,高靈敏度之壓阻式微懸臂梁生物感測器應用於蛋白質分子之即時檢測,國立台灣大學應用力學所碩士論文,2006。 林重安,應用共振式微懸臂樑感測器量測C反應蛋白之研究,國立台灣大學應用力學研究所碩士論文,2010。 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/29929 | - |
dc.description.abstract | 隨著半導體製程技術的進步,生醫檢測系統之目標逐漸以將檢測系統與設備微小化、提高穩定度、增加可攜帶性、減少外界環境影響以及降低成本為主。一般檢測的方法是利用化學或螢光標的配合架設光場進行檢測,而本研究以原子力顯微鏡與光纖干涉量測技術為設計基礎,進行共振式微懸臂樑感測器之製作,依類型可分為傳統共振式微懸臂樑生物感測器、分區鍍金之共振式微懸臂樑生物感測器以及開放式微流道之共振式微懸臂樑生物感測器,希望能夠藉由微懸臂樑之共振頻會隨著質量改變而改變的特性,以量測共振頻率偏移來取代螢光標的的檢測方法。其後進行免疫反應實驗來證明本研究成功製作出共振式微懸臂樑生物感測器,經由將感測晶片浸泡在含有待鍵結分子之溶液中做為化學表面修飾方法來鍵結C反應蛋白進行共振頻之量測。本實驗挑選了傳統共振式微懸臂樑生物感測器與分區鍍金之共振式微懸臂樑生物感測器做為檢測對象,選擇1000 μg/mL與1 μg/mL兩種C反應蛋白溶液濃度進行檢測,而根據實驗結果,儘管C反應蛋白濃度不同,在鍵結開始的30分鐘內之共振頻變化即可達到總變化量之66%以上,表示本研究中所提出之共振式微懸臂樑生物感測器製作方法可行。而根據此一系列製程,以及本實驗架構之微小化、低成本、高穩定度、可攜帶性等優點,未來也可繼續朝向微流道共振式微懸臂樑生物感測器之開發做為目標。 | zh_TW |
dc.description.abstract | Based on the atomic force microscopy and the technology of fiber interferometry, this study designed the resonant based micro-cantilever beam bio-sensors which can be classified as traditional resonant micro-cantilever beam bio-sensors, resonant micro-cantilever beam plating with Cr/Au in different block bio-sensors, and suspended microchannel resonator without channel packaging bio-sensors. Based on the fact that the resonant frequency of cantilevers would change with their mass, biomedical detection would be proceed by measuring the resonant frequency shift, and this study chose immune detection technique to detect C-reactive protein (CRP) which was immobilized on micro-cantilever using surface micromachining technique. Two types of sensor-chips, traditional resonant micro-cantilever beam bio-sensors and resonant micro-cantilever beam plating with Cr/Au in different block bio-sensors, were used to detect the different concentrations of CRP solution (1000 μg/mL and 1 μg/mL). A distinct change in the resonant frequency of micro-cantilever was observed as a function of time. Resonant frequency decreased rapidly over 66% from initial value in 30 minutes of C-reactive protein antigen-antibody interacted. As a result, the resonant based micro-cantilever beam bio-sensors in this study offers advantages including the miniaturization of devices, the improvement of stability, the reduction of environmental impacts and costs. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T01:25:29Z (GMT). No. of bitstreams: 1 ntu-100-R98543030-1.pdf: 4289690 bytes, checksum: 71ec1abe9fdab013ab00d94d02df0cf5 (MD5) Previous issue date: 2011 | en |
dc.description.tableofcontents | 目錄
誌謝 I 摘要 II Abstract III 目錄 IV 表目錄 VIII 圖目錄 IX 符號說明 XIV 第一章 緒論 1 1-1 前言 1 1-2 研究動機及目的 3 1-3 文獻回顧 4 1-3-1 微懸臂樑感測器之發展背景 4 1-3-2 C反應蛋白簡介 7 1-4 研究方法 9 1-5 論文架構 10 第二章 生物感測器 12 2-1 生物感測器之基本工作原理 12 2-1-1 生物感測器之分類 13 2-1-2 分子親和力作用與抗體與抗原之特異性鍵結 14 2-2 微懸臂樑生物感測器轉換之機制 16 2-2-1 共振式感測器 17 2-3 轉換訊號量測法 18 2-3-1 壓阻式量測法 19 2-3-2 光學式量測法 19 第三章 共振式微懸臂樑生物感測器之設計與製作 22 3-1 微機電製程技術 22 3-1-1 光罩設計與製作 23 3-1-2 基材清潔 23 3-1-3 黃光微影製程 25 3-1-4 蝕刻製程 29 3-1-5 薄膜沉積製程 31 3-2 傳統共振式微懸臂樑生物感測器 34 3-2-1 傳統共振式微懸臂樑生物感測器之設計 34 3-2-2 傳統共振式微懸臂樑生物感測器之製作程序 36 3-3 分區鍍金之共振式微懸臂樑生物感測器 38 3-3-1 分區鍍金之共振式微懸臂樑生物感測器之設計 39 3-3-2 分區鍍金之共振式微懸臂樑生物感測器之製作程序 40 3-4 開放式微流道之共振式微懸臂樑生物感測器 41 3-4-1 開放式微流道之共振式微懸臂樑生物感測器之設計 42 3-4-2 開放式微流道之共振式微懸臂樑生物感測器之製作程序 43 第四章 實驗設備與架構 46 4-1 實驗架構 46 4-2 原子力顯微鏡 47 4-3 光干涉量測技術 48 4-3-1 壓電致動器驅動電路設計 49 4-3-2 光纖干涉儀設計 50 4-4 免疫反應實驗流程 51 4-5 量測實驗流程 53 第五章 實驗結果與討論 55 5-1 傳統共振式微懸臂樑生物感測器之結果與討論 55 5-1-1 使用氫氧化鉀溼蝕刻製程之結果與討論 55 5-1-2 未使用氫氧化鉀溼蝕刻製程之結果與討論 58 5-2 分區鍍金之共振式微懸臂樑生物感測器之結果與討論 59 5-3 開放式微流道之共振式微懸臂樑生物感測器之結果與討論 61 5-4 免疫反應實驗量測結果 62 5-4-1 不同濃度下之共振頻率偏移 63 第六章 結論與未來展望 67 6-1 結論 67 6-2 未來展望 69 6-2-1 微流道共振式微懸臂樑生物感測器之設計 69 6-2-2 微流道共振式微懸臂樑生物感測器之製作程序 71 參考文獻 73 附表 79 附圖 81 表目錄 表1-1 C反應蛋白出現的疾病(林清泉,1997) 79 表2-1 生物感測器之辨識分類(Scheller et al., 1992) 80 圖目錄 圖1-1 動物細胞膜之構造 81 圖1-2 全球蛋白質藥物市場 81 圖1- 3 自我組裝單層膜(self-assembled monolayers)之檢測 82 圖1- 4 單一核苷酸在DNA雜交過程中變異之檢測 82 圖1- 5 前列腺癌腫瘤標記蛋白之定量檢測 82 圖1- 6即時性之生物分子的量測 83 圖1-7 真空封裝之微流道共振式微懸臂樑感測器之開發 83 圖1- 3 葡萄糖之定量檢測 84 圖1-9 原子力顯微鏡示意圖 84 圖1-10 常見的掃描式探針顯微鏡 85 圖1-11 C反應蛋白之構型示意圖 85 圖1-12 C反應蛋白與高密度脂蛋白之相對危險比例 86 圖2-1 生物感測器之架構與常見的轉換器 87 圖2-2 懸臂樑生物感測器之轉換器 88 圖2-3 壓阻式微懸臂樑生物感測器 88 圖2-4 壓組式微懸臂樑感測器換能機制 89 圖2-5 光槓桿量測技術 89 圖2-6 雷射都卜勒光學振動量測儀之光路架構 90 圖2-7 光干涉技術量測模組示意圖 90 圖3-1 氫氧化鉀濕蝕刻製程之傳統共振式微懸臂樑生物感測器尺寸三視圖 91 圖3-2 未用氫氧化鉀濕蝕刻製程之傳統共振式微懸臂樑生物感測器尺寸三視圖 91 圖3-3 使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑生物感測器製作程序 92 圖3-4 未使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑生物感測器製作程序 93 圖3-5 分區鍍金之共振式微懸臂樑生物感測器尺寸三視圖 94 圖3-6 微懸臂樑分區鍍金示意圖 94 圖3-7 分區鍍金之共振式微懸臂樑生物感測器製作程序 95 圖3-8 開放式微流道之共振式微懸臂樑生物感測器尺寸三視圖 96 圖3-9 微流道尺寸圖 96 圖3-10 開放式微流道之共振式微懸臂樑生物感測器製作程序 97 圖4-1 實驗架構 98 圖4-2 生物感測器與夾艙 98 圖4-3夾艙 99 圖4-4 探頭與混合機 99 圖4-5 電控箱及其顯示螢幕 100 圖4-6 光纖干涉儀之架構圖 100 圖4-7 光纖干涉儀干涉訊號 101 圖4-8 微懸臂樑表面化學修飾之流程 101 圖4-9 不同頻率下干涉儀所量測到的干涉訊號 102 圖4-10 微懸臂樑掃頻之結果 102 圖5-1 光學顯微鏡下之使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑 103 圖5-2 掃描式電子顯微鏡下之使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑 103 圖5-3 干涉暨雷射共軛焦表面分析儀下之使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑 103 圖5-4 使用氫氧化鉀溼蝕刻製程製作之傳統共振式微懸臂樑生物感測器重複性測試結果 104 圖5-5 光學顯微鏡下之未使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑 104 圖5-6 干涉暨雷射共軛焦表面分析儀下之未使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑 105 圖5-7 未使用氫氧化鉀溼蝕刻製程製作之傳統共振式微懸臂樑生物感測器重複性測試結果 105 圖5-8 光學顯微鏡下之分區鍍金之共振式微懸臂樑 106 圖5-9 干涉暨雷射共軛焦表面分析儀下之分區鍍金之共振式微懸臂樑 106 圖5-10 分區鍍金之共振式微懸臂樑生物感測器重複性測試結果 107 圖5-11 光學顯微鏡下之開放式微流道之共振式微懸臂樑 107 圖5-12 掃描式電子顯微鏡下之開放式微流道之共振式微懸臂樑 108 圖5-13 干涉暨雷射共軛焦表面分析儀下之開放式微流道之共振式微懸臂樑 108 圖5-14 干涉暨雷射共軛焦表面分析儀下之開放式微流道 108 圖5-15 開放式微流道之共振式微懸臂樑生物感測器重複性測試結果 109 圖5-16 未使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑生物感測器,C反應蛋白濃度為1000 μg/mL之量測結果 109 圖5-17 未使用氫氧化鉀溼蝕刻製程之傳統共振式微懸臂樑生物感測器,C反應蛋白濃度為1 μg/mL之量測結果 110 圖5-18 鍍金類型為從尖端起長40 μm、寬30 μm的分區鍍金之共振式微懸臂樑生物感測器,C反應蛋白濃度為1000 μg/mL之量測結果 110 圖5-19 鍍金類型為從尖端起長40 μm、寬30 μm的分區鍍金之共振式微懸臂樑生物感測器,C反應蛋白濃度為1 μg/mL之量測結果 111 圖5-20 鍍金類型為距離尖端40 μm處起長40 μm、寬30 μm的分區鍍金之共振式微懸臂樑生物感測器,C反應蛋白濃度為1000 μg/mL之量測結果 111 圖5-21 鍍金類型為距離尖端40 μm處起長40 μm、寬30 μm的分區鍍金之共振式微懸臂樑生物感測器,C反應蛋白濃度為1 μg/mL之量測結果 112 圖5-22 不同類型以及不同濃度下無因次化之共振頻率變化 112 圖5-23 同一類型之共振式微懸臂樑生物感測器在不同濃度下無因次化之共振頻率變化 113 圖5-24 不同類型之共振式微懸臂樑生物感測器在同一濃度下無因次化之共振頻率變化 114 | |
dc.language.iso | zh-TW | |
dc.title | 共振式微懸臂樑生物感測器之開發 | zh_TW |
dc.title | Development of a resonance micro-cantilever beam bio-sensor | en |
dc.type | Thesis | |
dc.date.schoolyear | 99-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 戴鴻名(Hung-Ming Tai),吳光鐘(Kuang-Chong Wu),張正憲(Jeng-Shian Chang) | |
dc.subject.keyword | 微機電製程,共振式微懸臂樑,生物感測器,光纖干涉儀, | zh_TW |
dc.subject.keyword | MEMS,resonant based micro-cantilever,bio-sensor,fiber interferometry, | en |
dc.relation.page | 115 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2011-08-03 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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