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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蔡睿哲(Jui-che Tsai) | |
| dc.contributor.author | Li-Cheng Lu | en |
| dc.contributor.author | 呂理誠 | zh_TW |
| dc.date.accessioned | 2021-06-13T00:27:17Z | - |
| dc.date.available | 2008-07-27 | |
| dc.date.copyright | 2007-07-27 | |
| dc.date.issued | 2007 | |
| dc.date.submitted | 2007-07-26 | |
| dc.identifier.citation | [1]J. C. Tsai and M. C. Wu, “Design, fabrication, and
characterization of a high fill-factor, large scan-angle, two-axis scanner array driven by a leverage mechanism,”Journal of Microelectromechanical Systems”, vol. 15, no. 5, pp. 1209-1213, Oct.2006. [2]J. C. Tsai, L. Fan, D. Hah, and M. C. Wu, “A high fill-factor, large scan-angle, two-axis analog micromirror array driven by leverage mechanism,” 2004 IEEE/LEOS International Conference on Optical MEMS, pp.30-31, 2004 [3]J. C. Tsai and M. C. Wu, “A high port-count wavelength-selective switch using a large scan-angle, high fill-factor, two-axis MEMS scanner array,” IEEE Photonics Technology Letters, Vol. 18, No. 13,pp. 1439-1441, Jul. 2006 [4]K. Isamoto, K. Kato, A. Morosawa, C. Chong, H. Fujita, H.Toshiyoshi, 'A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining,' IEEE J. Sel. Topics Quantum Electron. 10, p.570-578 (2004). [5]Hakan Urey et,al. “MEMS Scanners for Display and Imaging Applications” (SPIE 2004) [6]Wine, David W.; Helsel, Mark P.; Jenkins, Lorne; Urey, Hakan;Osborn, Thor D.”Performance of a biaxial MEMS-based scanner for microdisplay applications” (Microvision, Inc.) Proc. SPIE Vol. 4178,p.186-196, 08/2000. [7]Young-Chul Ko et al., “Eye-type scanning mirror with dual vertical combs for laser display” in Sensors and Actuators A 126 (2006) p.218–226. [8]Daryl J. Dagel et al., “Large-Stroke MEMS Deformable Mirrors for Adaptive Optics” in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE 2006 p.572 59 [9]Changho Chong et al., “Optically Modulated MEMS Scanning Endoscope” in IEEE PHOTONICS TECHNOLOGY LETTERS, VOL.18, NO. 1, JANUARY 1, 2006. [10]Toshiyoshi, H.; Piyawattanametha, W.; Cheng-Ta Chan; Wu, M.C.”Linearization of electrostatically actuated Surface micromachined 2-D optical scanner” in Journal of Microelectromechanical Systems,Volume 10, Issue 2, June 2001 P.205 – 214. [11] J.C Chiou and Y.C. Lin ,”A multiple electrostatic electrodes torsion micromirror device with device with linear stepping angle effect in Microelectromechanical” in Systems, Journal of Volume 12, Issue 6, Dec 2003. [12] J. Zhang, Y. C. Lee, V. M. Bright and J. Neff, “Digitally positioned micromirror for open-loop controlled. applications”, Proceedings of the IEEE MEMS, Las Vegas, NV, p. 536-539 (2002). [13] Yi Zhao, Francis E.H. Tay, Guangya Zhou and Fook Siong Chau,“Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control” in SENSORS AND ACTUATORS A November 2006 P. 421-428. [14] Zhao Y, Tay E H F, Chau F S and Zhou G Y , “Linearization of the scanning field for 2D torsional. micromirror by RBF neural network” in Sensors Actuators A. 2005 p.230–236.. [15] 台大光電所 蘇國棟博士 蔡睿哲博士“奈米光機電'上課講義 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/28875 | - |
| dc.description.abstract | 微機電式微掃描鏡，已有諸多在光通訊、投影顯示、醫學影像等
的實際應用。靜電驅動式微掃描鏡由於靜電力矩與施加電壓的二次非線性效應，造成操作及控制上，必需輔以回授機制來校正非線性效應所造成的誤差。之前已有文獻針對於靜電驅動式平行板結構的微掃描鏡,利用差動電壓操作的方式來達到線性控制微掃描鏡。該操作方式是屬於開迴路式的驅動方式，既可以節省回授電路的功率消耗，亦可以減低微掃描鏡操作時，兩個互相垂直的旋轉軸之間的干擾。有別於平行板結構，我們針對靜電式垂直梳型結構的微掃描鏡，利用差動電壓對(Vx,Vy)疊加於直流偏壓(Vbias)，來驅動鏡面下的槓桿元件。首先我們以模擬來找出理想的直流偏壓工作點，並定義微掃描鏡的線性掃描範圍，再以實驗去觀察線性掃描範圍內的光點分布情形。在本實驗裡驗證了以差動電壓驅動來達到線性化操作的可行性。 | zh_TW |
| dc.description.abstract | MEMS (Micro-Electro-Mechanical Systems) scanners have been widely adopted in telecommunications, projection displays, and biomedical images. If we want to linearize the scanning field of a MEMS scanner, which is distorted by
the intrinsic nonlinearity of the electrostatic torques, we must have an effective feedback mechanism to calibrate deviations.Several approaches have been proposed to suppress the scan pattern distortion of parallel-plate structure. Hiroshi et al. demonstrated the linearization of a two-axis parallel-plate MEMS scanner by using a differential-voltage driving scheme, which was relatively simple and was realized in open-loop operation. It not only reduces the power consumptions, but also suppresses the crosstalk of two orthogonal scan axes.A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characterization (angle vs. voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with leverage mechanism.First of all, We find the optimize DC bias voltage form simulations by mathcad, and try to define the range of linear scanning fields. Second, Observing the distribution of laser light spots in linear scanning fields of different DC bias voltages. Finally the experimental results indicate that the differential voltage operation is effective to linearize the scanning field of lever-driven two-axis analog micromirrors. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T00:27:17Z (GMT). No. of bitstreams: 1 ntu-96-R94941049-1.pdf: 5182999 bytes, checksum: 590c2421dfc602ced6674cd70f3c1752 (MD5) Previous issue date: 2007 | en |
| dc.description.tableofcontents | 誌謝………………………………….…………………….…….I
中文摘要………………………………………….………….….II 英文摘要………………………….………………….…………III 第一章 緒論………………………………….....……………….1 1.1 微光學鏡面在光通訊上的應用…………….……..………..2 1.2 微掃描鏡在顯示方面的應用………………………………….5 1.3 微光學鏡面在天文方面的應用…………………………….…9 1.4 微掃描鏡在醫療影像方面的應用…………………………...10 第二章 文獻回顧-微鏡之線性化操作…………….............13 2.1 平行板結構與梳形結構……………………………………...13 2.2 差動電壓操作………………………………………………...15 2.3 開迴路式線性化驅動方式…………………………………...17 2.4 閉迴路式線性化操作………………………………………...20 第三章 槓桿驅動微掃描鏡的設計與製造…………....………..23 3.1 槓桿與梳型驅動(Comb Drive)結構……………….…………23 3.2 微掃瞄鏡結構………………………………………………...24 3.3 二軸自由關節 (2-degrees-of-freedom (DOF) joint)……25 3.4 製造…………………………………………………………...26 3.5 元件特性……………………………………………………...28 3.6 總結…………………………………………………………...29 第四章 模擬-最佳工作點的選擇………………………….......30 4.1 模擬的幾何架構……………………………………………...30 4.2 模擬步驟……………………………………………………...31 4.3 誤差函數……………………………………………………...31 4.4 模擬結果與圖形……………………………………………...32 4.5 結論…………………………………………………………...39 第五章 實驗架構與實驗結果…………………………....……..40 5.1 實驗架構及步驟……………………………………………...40 5.2 光感測元件 PSD(Position Sensitive Detector)….…….43 5.3 圖控程式語言 LabVIEW…………………….…………… ...45 5.4 差動電壓操作的實驗數據與分析…………………………...48 5.5 透鏡像差對於掃描區域所造成的影響……………………...53 5.6 非差動(傳統)電壓操作的實驗數據………………………...55 第六章 結論……………………………………………………....57 參考資料………………………………………………………….…58 | |
| dc.language.iso | zh-TW | |
| dc.subject | 線性化 | zh_TW |
| dc.subject | 微機電系統 | zh_TW |
| dc.subject | 二維微掃描鏡 | zh_TW |
| dc.subject | 梳型驅動致動器 | zh_TW |
| dc.subject | 差動 | zh_TW |
| dc.subject | linearization | en |
| dc.subject | comb-drive actuator | en |
| dc.subject | differential | en |
| dc.subject | Microelectromechanical systems | en |
| dc.subject | two-axis scanner | en |
| dc.title | 以垂直梳型致動器驅動之雙軸旋轉微鏡片之線性化 | zh_TW |
| dc.title | Linearization of a Two-Axis MEMS Scanner
Driven by Vertical Comb-Drive Actuators | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 95-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 蘇國棟(Guo-Dung Su),孫家偉(Chia-Wei Sun) | |
| dc.subject.keyword | 微機電系統,二維微掃描鏡,線性化,梳型驅動致動器,差動, | zh_TW |
| dc.subject.keyword | Microelectromechanical systems,two-axis scanner,linearization,comb-drive actuator,differential, | en |
| dc.relation.page | 59 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2007-07-26 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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