請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/28352
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕(Kuang-Yuh Huang) | |
dc.contributor.author | Ren-Feng Ding | en |
dc.contributor.author | 丁仁峰 | zh_TW |
dc.date.accessioned | 2021-06-13T00:05:53Z | - |
dc.date.available | 2013-08-16 | |
dc.date.copyright | 2011-08-16 | |
dc.date.issued | 2011 | |
dc.date.submitted | 2011-08-05 | |
dc.identifier.citation | [1] Martin D., Gertjan S.V.,and Namboodiri P., 'Superlubricity of Graphite,' Phys. Rev. Lett., Vol. 92, No. 12, 2004, pp. 126101-126104.
[2] 井澤實著,杜光宗編譯,「精密定位技術及其設計技術」,建宏出版社,台北市,1992。 [3] Tian Y., Shirinzadeh B., and Zhang D., 'Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation,' Microelectron. Eng. 87, 2, Feb. 2010, pp. 230-241. [4] Breguet, J.-M. and Clavel, R., 'Stick and slip actuators: design, control, performances and applications,' Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on, Nov. 1998, pp. 89-95, 25-28. [5] Hwu E. T., Huang K. Y., and Hwang I. S., 'SMM Actuator for Nano-Scale Positioning,' Optomechatronic Sensors, Actuators, and Control. Edited by Moon, Kee S. Proceedings of the SPIE, Vol. 5602, 2004, pp. 218-225. [6] 陳劭侖,“雙軸奈米級定位系統之設計開發與性能測試”,國立臺灣大學工學院機械工程學系碩士論文,2010。 [7] 朱慶國,“雙軸超音波定位平台之研製”,國立清華大學工程與系統科學學系碩士論文,2004。 [8] Sandhu A., Okamoto A., and Shibasaki I., 'Nano and micro Hall-effect sensors for room-temperature scanning hall probe microscopy,' Microelectronic Engineering, Vol. 73-74, Micro and Nano Engineering 2003 ,Jun. 2004, pp. 524-528. [9] 李浚瑋,“壓電蜂鳴片之機電特性與應用研究”,國立聯合大學電機工程學系碩士論文,2007。 [10] 謝禮忠,“碟型超音波致動器在光碟機尋軌系統之應用”,國立清華大學工程與系統科學學系碩士論文,2004。 [11] Ernest O. D., 'Measurement Systems Application and Design' Fifth Edition, McGraw-Hill, 2004. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/28352 | - |
dc.description.abstract | 精密定位系統被廣泛地運用於掃描探針顯微術(Scanning Probe Microscopy, SPM)以及奈米尺度加工等領域。精密定位系統提供工具或工件精確的位移控制。除了追求定位範圍和解析度的提升外,將致動器與感測器更緊緻地整合在一起亦成為其擴展在更緊密系統運用範疇的關鍵議題。
因其體積小、高致動解析度和高動態的特性,壓電元件為目前最被廣泛使用的精密致動元件。為了讓我們開發的定位系統以更為經濟化的方式實現,普及且低價之壓電蜂鳴片被用來開發精密致動器以取代昂貴的進口元件。透過慣性滯滑原理,壓電蜂鳴片驅動精密螺旋機構產生長行程且高解析的致動位移。為了緊密整合和避免負载效應,霍爾元件和微小永久磁石被採用來實現非接觸式增量式位移的量測。 本論文開發的三軸精密定位系統由三組致動器和位移感測器建構而成,可分別產生X軸、Y軸方向的位移以及Z軸方向的旋轉。透過我們精心構思的交叉架構概念讓三軸致動器和感測器都能配置在同一平面上,有效地壓縮系統高度使其能應用於掃描探針顯微鏡上進行量測樣品的定位致動。 三軸精密定位系統X和Y兩軸方向總行程達5 mm,最小平均步進量為0.53 nm,往復步進量差異為0.03 nm,θ軸方向總角度行程360度,最小平均步進角度0.25度。低於共振頻2 kHz,平均步進量隨頻率增量而提升。環形磁陣列霍爾感測器於線性位移量測解析度可達10 nm,角度位移量測解析度可達0.02度。線性致動器的最大驅動力是150 gf (=1.5 N )。 | zh_TW |
dc.description.abstract | Precision positioning systems are extensively used in Scanning Probe Microscopy(SPM), nano-scale processing system and other domains. Precision positioning systems provide precise position control for tool or work piece. Besides the pursuit of long-stroke and high-resolution, the intensive integration of actuator and sensor becomes key issue for widening application fields in more compact systems.
Because of its small size, high actuation resolution and high dynamic characteristics, the piezoelectric element becomes the most widely used component of precision actuators. In order to realize our developed economical positioning system, the popular and inexpensive piezo buzzer is chosen to develop precision actuators instead of using expensive imported piezoelements. Through the inertial stick-slip driving principle, the piezo buzzer tangentially and reciprocally drives the precision screw mechanism to induce long-stroke and high resolution motion. For enhancing compact integration and avoiding loading effect of displacement senor, the Hall sensor and tiny magnets are utilized to develop noncontact incremental displacement measurement. The three-axis positioning system developed in this thesis consists of three sets of actuators with displacement sensors, which produce X-axis, Y-axis and Z-axis rotational displacements, respectively. Through our developed ingenious cross structure concept, three sets of actuators with sensors can be well configured on a same plane, thus effectively shrinking the system height to be adapted to any SPM-system for positioning measured sample. The maximum stroke for the X-axis and Y-axis actuators is 5 mm, and its average minimum step is about 0.53 nm, and its reciprocal step error is 0.03 nm. The maximum stroke for Z-axis rotational actuator is 360 degree, and its average minimum angular step is 0.25 degree. Below the resonance frequency of 2 kHz, the average step increases in proportion to frequency increment. For the Hall Sensor with the magnetic ring array, the linear displacement measurement resolution reaches 10 nm, and the angular displacement measurement resolution is about 0.02 degree. The maximum driving force of the linear actuator is 150 gf (=1.5 N ). | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T00:05:53Z (GMT). No. of bitstreams: 1 ntu-100-R98522625-1.pdf: 16849816 bytes, checksum: b42e169da4c3e1499332f8c103a3909c (MD5) Previous issue date: 2011 | en |
dc.description.tableofcontents | 口試委員會審定書 I
致謝 II 中文摘要 III 英文摘要 IV 目錄 VI 表目錄 IX 圖目錄 X 符號表 XIII 第一章 緒論 1 1.1文獻回顧 1 1.2研究動機與目標 6 1.3內容簡介 7 第二章 三軸壓電蜂鳴片致動器定位系統 8 2.1 系統功能架構與概念設計 8 2.2 壓電蜂鳴片致動器 9 2.3 環形磁陣列霍爾感測器 12 2.3.1 線性位移感測器 12 2.3.2 旋轉位移感測器 13 第三章 理論分析與模擬 14 3.1 慣性滯滑致動理論分析與模擬 14 3.1.1 壓電蜂鳴片 14 3.1.2 慣性滯滑致動 17 3.2 環形磁陣列量測理論分析與模擬 21 3.2.1 霍爾元件 21 3.2.2 線性位移量測 23 3.2.3 角度位移量測 25 3.2.4 訊號處理 27 第四章 致動器與感測器之性能測試與分析 29 4.1壓電蜂鳴片致動器之性能測試 30 4.1.1 磁預壓夾持力F_m 33 4.1.2 驅動電壓U_pp 36 4.1.3 驅動頻率f_d 37 4.1.4 驅動負載質量m_l 38 4.2 環形磁陣列霍爾感測器之性能測試 40 第五章 三軸壓電蜂鳴片致動器定位系統之性能驗證 45 5.1 角度位移性能測試 47 5.2 線性位移性能測試 48 5.3 多軸定位性能測試 51 第六章 結論及未來展望 55 參考文獻 57 附錄 59 | |
dc.language.iso | zh-TW | |
dc.title | 壓電蜂鳴片致動器與環形磁陣列霍爾感測器於三軸定位系統之開發探討 | zh_TW |
dc.title | Design and Development of A Three-Axes Positioning System Using Piezo-Buzzer Actuators and Hall Sensors with Magnetic Ring Array | en |
dc.type | Thesis | |
dc.date.schoolyear | 99-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蔡得民,林沛群 | |
dc.subject.keyword | 壓電蜂鳴片,霍爾元件,環形磁陣列,致動器,感測器,三軸精密定位系統, | zh_TW |
dc.subject.keyword | Piezo buzzer,Hall Sensor,Magnetic ring array,Actuator,Sensor,Three-axis positioning system, | en |
dc.relation.page | 79 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2011-08-06 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-100-1.pdf 目前未授權公開取用 | 16.45 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。