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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕 | |
dc.contributor.author | Yen-Hung Chen | en |
dc.contributor.author | 陳彥宏 | zh_TW |
dc.date.accessioned | 2021-06-12T18:22:17Z | - |
dc.date.available | 2011-08-12 | |
dc.date.copyright | 2011-08-12 | |
dc.date.issued | 2011 | |
dc.date.submitted | 2011-08-08 | |
dc.identifier.citation | [1] Hwu E.T. and Huang K.Y., “Design and Development of a Multiaxial Astigmatic Displacement Measuring System.” Doctor Thesis of National Taiwan University, 1996。
[2] Chien C.C. and Huang K.Y.,” The Influence of Variable Focal Length of the DVD pick-up head on the Performance of the Displacement Measurement System ”, Master Thesis of National Taiwan University。 [3]張良知, “儀器總覽-光學量測儀器:邁克爾遜干涉儀”, 國家實驗研究院儀器科技研究中心,28-31 頁(1998) [4] Ishii, S., Nishimura, T., Ishizuka, K.,and Tsukiji, M, “Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement.” U.S. Patent No. 4,912,320, 1990. [5]Su D.C. , Chiu M.H.,and Chen C.D. “A heterodyne interferometer using an electro-optic modulator for measuring small displacements” ,J. Opt, Vol. 27, pp.19-23,1996. [6] Armstrong, T. R. and Fitzgerald, M. P., “An Autocollimator Based on the Laser Head of a Compact Disc Player”, Meas. Sci. Technol. 3, pp.1072-1076, 1992. [7] Rowsell, T. D., “Remote Measurement of Small Displacements Using a CD Pickup Head”, Med. Eng. Phys. Vol. 17, pp.459-461, 1995. [8] Ehrmann, K., Ho, Arthur., and Schindhelm K., “A 3D Optical Profilometer Using a Compact Disc Reading Head”, Meas. Sci. Technol. 9, pp.1259-1265, 1998. [9] Fan, K. C., Lin, C. Y., and Shyu, L. H., “The Development of a Low-cost Focusing Probe for Profile Measurement”, Meas. Sci. Technol. 11, pp.N1-N7, 2000. [10] Quercioli, F., Tiribilli, B., Ascoli, C., Baschieri, P., and Frediani, C., “Monitoring of an Atomic Force Microscope Cantilever with a Compact Disk Pickup”, Review of Scientific Instruments, Vol. 70, No. 9, pp.3620-3624, 1999. [11] Hwu, E. T., Huang, K. Y., Hung, S. K., and Hwang, I. S., “Measurement of Cantilever Displacement Using a Compact Disk/Digital Versatile Disk Pickup Head”, Japanese Journal of Applied Physics, Vol. 45, No. 3B, pp.2368-2371,2006. [12]“Optical DVD Pick-up Specifications : Model TOP1100S”, TopRay Technologies, Inc. [13] 張守進,劉醇星,姬梁文,“半導體雷射”,科學發展,349期,pp.14-21,2002。 [14] Han, C., Lee, J., and Kim, S., “Digital Versatile Disc/Compact Disc-Compatible Pickup Head with Dual-Lena Lever Actuator for Next-Generation Applications”, Jpn. J. Appl. Phys., Vol. 39, Part 1, No. 5A, pp.2630-2634, 2000. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/27818 | - |
dc.description.abstract | 像散式讀取頭本可擷取光碟片上奈米尺度的資料軌,使用其聚焦誤差訊號(Focus Error Signal)之線性區則更可量測到奈米位移量,但其行程被侷限於6 um內;而量測行程可藉由更換物鏡焦距延長其感測位移範圍,但解析度會隨著量測行程增加而降低。為了擴大像散式讀取頭之量測行程與高解析度,本研究目的在於研究像散式讀取頭的干涉現象,並利用其開發雷射干涉儀。去除讀取頭物鏡所得的平行雷射光束,再配合半反射鏡與光干涉原理,像散讀取頭也可以在其投射面上創造出來干涉條紋。兩個光電感測器用來擷取反射鏡位移所產生的干涉條紋的變化,藉由分析干涉光變化達成奈米級且長位移之量測系統。
研究內容包括像散式干涉儀系統和兩個雙軸磁預壓水平調整平台的開發,讓讀取頭、半反射鏡和待測反射鏡可以容易對正。除了干涉寬度和訊號之間的干涉儀分析外,由像散式讀取頭所開發的雷射干涉也透過實驗機台進行位移量測驗證。位移量測行程從6 um延長到100 mm,最大位移量測解析度可達5 nm。 | zh_TW |
dc.description.abstract | Astigmatic pickup head is developed for capturing nano-scale data from the DVD disc. It can also be applied to measure nano-scale displacement by using its linear region of the focus error signal (FES), but the linear measurement range is only about 6 um. In order to extend its measurement range, object lens with long focal length is chosen, but it also induces resolution reduction.
In order to derive large measurement range and high resolution, the goal of this thesis is to study the interference phenomenon of the astigmatic pickup head and apply it to develop a laser interferometer. Through realizing parallel laser beam by removing the object lens, the astigmatic pickup head can also generate interference fringes on its projection plane by using the interference principle and half mirror. Two photoelectric sensors are utilized to capture the fringe change, which is induced by the displacement of a reflective mirror. Its displacement measurement resolution depends on the laser wave length, and the parallel laser beam reaches a longer measurement range. This research includes the development of the astigmatic interferometer system with two precision 2-axes adjustment stages, which make the complicated alignment easily among the pickup head, the half mirror and the measured reflective mirror. Besides the interferometric analysis between the interference fringe and the output signal, our developed laser interferometer from the astigmatic pickup head is also verified by displacement measurement experiments. Its displacement measurement range is extended from 6 um to 100 mm, and its maximum resolution achieves 5 nm. | en |
dc.description.provenance | Made available in DSpace on 2021-06-12T18:22:17Z (GMT). No. of bitstreams: 1 ntu-100-R98522618-1.pdf: 5261085 bytes, checksum: 7f9a2cb546ccdb0b2f62eaf5c0e5916d (MD5) Previous issue date: 2011 | en |
dc.description.tableofcontents | 目錄
口試委員會審定書……………………………………………………I 致謝………………………………………………………………………………II 中文摘要………………………………………………………………………III 英文摘要………………………………………………………………………IV 目錄………………………………………………………………………………VI 表目錄……………………………………………………………………………VIII 圖目錄……………………………………………………………………………IX 符號表……………………………………………………………………………XI 第一章 緒論 …………………………………………………………1 1.1 研究背景 ……………………………………………………………1 1.2 文獻回顧 ……………………………………………………………2 1.3 研究目標 ……………………………………………………………5 1.4 內容簡介 ……………………………………………………………6 第二章 光干涉原理與應用…………………………………7 2.1 光干涉 ………………………………………………………………7 2.2 各類雷射干涉儀 ………………………………………………9 2.2.1 菲索干涉儀……………………………………………………10 2.2.2 麥克森干涉儀………………………………………………11 2.2.3馬赫詹達干涉儀 ……………………………………………11 第三章 像散式讀取頭架構與光路分析 …………13 3.1像散式讀取頭架構………………………………………………13 3.2讀取頭光路分析……………………………………………………17 3.2.1聚焦誤差訊號分析 …………………………………………17 3.2.2像散式讀取頭擴散光路 …………………………………19 3.3 像散式干涉現象之分析探討 ……………………………20 3.3.1干涉儀基本架構 ………………………………………………20 3.3.2像散式干涉現象分析 ………………………………………23 3.3.3干涉光與光感測器分析比較……………………………24 第四章 像散式干涉儀系統………………………………………27 4.1 系統架構……………………………………………………………………27 4.2干涉儀電路 ………………………………………………………………29 4.2.1雷射二極體功率自動調整電路…………………………29 4.2.2訊號放大電路…………………………………………………………30 4.3 干涉儀訊號處理…………………………………………………………31 第五章 干涉儀整體性能測試與分析…………………………36 5.1實驗機台與控制流程 …………………………………………………36 5.2長行程位移量測 ……………………………………………………………36 5.3像散式干涉儀解析度測試 …………………………………………38 5.4穩定性測試 ……………………………………………………………………40 5.5誤差分析探討 ………………………………………………………………43 第六章 結論與未來展望………………………………………………44 參考文獻 ………………………………………………………………………………45 附錄 ………………………………………………………………………………………47 | |
dc.language.iso | zh-TW | |
dc.title | 像散式讀取頭干涉現象探討與位移量測應用 | zh_TW |
dc.title | Investigation of Interference Phenomenon of
Astigmatic Pick-up Head and its Application in Displacement Measurement | en |
dc.type | Thesis | |
dc.date.schoolyear | 99-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蔡得民,林沛群 | |
dc.subject.keyword | 像散讀取頭,像散現象,位移量測,麥克森干涉儀,雷射干涉儀, | zh_TW |
dc.subject.keyword | Astigmatic pickup head,Astigmatic phenomenon,Displacement measurement,Michelson interferometer,Laser interferometer, | en |
dc.relation.page | 50 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2011-08-08 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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