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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 林清富 | |
| dc.contributor.author | Pei-Yuan Chen | en |
| dc.contributor.author | 陳培元 | zh_TW |
| dc.date.accessioned | 2021-06-08T06:28:27Z | - |
| dc.date.copyright | 2006-08-01 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-25 | |
| dc.identifier.citation | 第二章
[1] J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton University Press, 1995). [2] E. Pennisi, “Naturalist's Surveys Show That British Butterflies Are Going, Going...,” Science, vol. 303, p.1747, (2004) [3] L. P. Biró, Zs. Bálint, K. Kertész, Z. Vértesy, G. I. Márk, Z. E. Horváth, J. Balázs, D. Méhn, I. Kiricsi, V. Lousse, J.-P.Vigneron, “Role of Photonic-Crystal-Type Structures in the Thermal Regulation of a Lycaenid Butterfly Sister Species Pair,” Phys. Rev. E, vol. 67,p.021907, (2003) [4] http://www.lostseaopals.com.au/opals/index.asp [5] http://www.ntrc.itri.org.tw/dict/content.jsp?newsid=685 [6] K. Sakoda, Optical Properties of Photonic Crystals, (2001) [7] J. D. Joannopoulos, Handbook of photonic Band Gap Materials, (1993) [8] Steven G. Johnson, J.D. Joannopoulos Designing synthetic optical media: photonic crystals. Acta Materialia vol.51 p.5823, (2003) [9] E. Yablonovitch, “Inhibited Spontaneous Emission in Solid-State Physis and Electronics,” Phys. Rev. Lett 58, 2059, (1987) [10] S.John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett 58, 2486, 1987 [11] E. Yablonovitch, “Photonic crystals: semiconductor of light,” Scientific America December, 47, 2000 [12] 欒丕綱, 陳啟昌, 光子晶體, (2005) [13] C. Kittle, Introduction to Solid State Physics, 8th Ed, John Wiley & Sons, USA, (2005) [14] S. John and R. Rangarjan : Phys. Rev. Lett. B, Vol 38, 10101 (1988) [15] M. Plihal and A. A. Maradudin : Phys. Rev. B, Vol 44, 8569 (Oct, 1991) [16] Karlheinz Bierwirth : IEEE Trans. Microwave Theory and Tech., Vol 34, p1104 (Nov, 1986) [17] Dennis M. Sullivan : Electromagnetic Simulation Using The FDTD Method. IEEE press, New York, (2001) [18] S.T. Peng and C.K. Tzuang: The lecture on Photonic Bandgap Structure at Chiao Tung University, (Aug 20, 2001) [19] Russel et al. : J. Lightwave Technol. 17, p1982 (1999) [20] R-soft Band SOLVE Manual [21] http://www.vanguard.com.tw/home.htm [22] Amnon Yariv, Optical Electronics in Modern Communications, 5th edition, Oxford University Press, (1997) 第三章 [1] C.Y. Chang, S. M. Sze, ULSI technology, McGraw-Hill, (1996) [2] 科學人2005年8月號〈衝破晶圓製造瓶頸的一滴水〉 [3] S. Noda, T. Baba, Roadmap on photonic crystal, (Springer, 2003) [4] J. D. Joannopoulos. Handbook of photonic Band Gap Materials. (1993) [5] http://www.sandia.gov/media/photonic.htm [6] E. Yablonovitch, T. M. Gmitter. And K. M. Leung. Phys.Rev. Lett. 67, 2295 (1991) [7] Peter E. Gise, Richard Blanchard ; prepared by the Fairchild Management and Career Development Center, Semiconductor and integrated circuit fabrication techniques, Reston Pub. Co., (1979) [8] Allen Holberg, CMOS Analog Circuit Design, OxFord University Press, (2002) [9] 劉斡中, 金屬光子盒之製作及光電特性分析, (2004) [10] AB-M, Inc. http://www.maskaligner.com/company.html 第四章 [1] J. Kalkman,E. de Bres, and A. Polman J. Selective excitation of erbium in silicon-infiltrated silica colloidal photonic crystals, Appl. Phys., Vol. 95, No. 5, 1 (March 2004) [2] 許明祺, 三維結構光子晶體合成及其表面化學之特性研究, (2002) [3] 巫晟逸, 自組裝高分子光子晶體製備, (2002) [4] S. Noda and T. Baba, Roadmap on Photonic Crystals, (2003) [5] Steven G. Johnson, http://ab-initio.mit.edu/photons/tutorial/ [6] Tianhong Cuia, Guirong Liang, APPLIED PHYSICS LETTERS 86, 064102 (2005) 第五章 [1] D.L. Bullock, C. Shih, R.S. Margulies,J. Opt. Soc. Am. B 10 399, (1993) [2] J.D. Joannopoulus, R.D. Meade, J.N.Winn, Photonic Crystals, PrincetonUniversity Press, (1995) [3] Susumu Noda, Toshihiko Baba, incooperation with OITDA “Roadmap onphotonic crystals” CH6, p.244~p.249.Kluwer Academic Publishers. [4] E. Yablonovitch, Phys. Rev. Lett. 58 2059, (1987) [5] E. Yablonovitch, T.J. Gmitter, K.M.Leung, Phys. Rev. Lett. 67 2295, (1991) [6] S.Y. Lin, E. Chow, V. Hietala, P.R.Villeneuce, J.D.. Joannopoulos, Science282 274, (1998) 100 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/25756 | - |
| dc.description.abstract | 摘要
1980 年代起，新名詞－光子晶體迅速竄紅於光電，電子和材料界﹔十幾年之後，其技術日趨進步。本論文將以光子晶體為主角，說明其原理，電磁作用，製造方式，波導，以及光子晶體的用途等等。 光子晶體在光與電波磁波中，主要的特性是由於不同介電常數的材料週期排列所成的結構，其規則排列週期寬度約為可見光至紅外光波長的1/4~1/2 （約80~800nm）。目前學界在光子晶體製作方面的相關研究，可概分為兩種製作屬性上完全相異的製程技術： (一) 奈米微影技術(Nanolithography)。 (二) 堆疊技術(Self-Assembly)。 本論文所探討的製程亦包含以上兩者﹔(1)以曝光機定義線寬200nm之圖樣於已旋塗光阻之矽晶片上，再施以RIE技術後，得到週期性的孔隙矽晶片。(2)以乙醇，銨水，TEOS，DI自行合成粒徑100nm至200nm之SiO2粒子，並將之形成堆疊的光子晶體。期待這樣子的結構在未來能夠改良各種發光光源。 | zh_TW |
| dc.description.abstract | Abstract
Since 1980s, Photonic Crystal rapidly becomes very popular for optoelectronics and is widely studied as photonic materials. In this thesis, we will describe the principle of photonic crystals, their manufacture technology, their wave-guiding and electromagnetic function, and their applications. The main characteristic of electromagnetic wave in Photonic Crystal is the periodic structure of different dielectric constant. The width of regular period is from visible light to infrared.(80~800nm). The research in Photonic Crystal fabrication could be separated into two different fabrication techniques: (1) Nanolithography (2) Self-Assembly This thesis research fabrications above: (1) Spinning upon photoresist on Si wafer and defining 200nm line width by deep UV aligner. We get periodic hole in Si wafer using RIE technique. (2) Synthesizing SiO2 particles with C2H5OH, NH4OH, TEOS, DI water. The diameter of particles is about 100nm to 200nm. Use the SiO2 particles to fabricate Self-Assembly Photonic Crystal. We look forward to this structure to improve various light sources. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T06:28:27Z (GMT). No. of bitstreams: 1 ntu-95-R93943141-1.pdf: 4657628 bytes, checksum: 4e18b9045e8120b3cd06844847cea515 (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | 目 錄
第一章 簡介 1.1 簡介 ．．．．．．．．．．．．．．．．．．．．． 1 1.2 論文導覽 ．．．．．．．．．．．．．．．．．．． 6 第二章 光子晶體之原理及模擬 2.1 簡介 ．．．．．．．．．．．．．．．．．．．．． 8 2.2 光子晶體基本概念 ．．．．．．．．．．．．．．． 11 2.3 光子晶體模擬計算 ．．．．．．．．．．．．．．． 13 2.3.1 平面波展開法(PWE)與有限時間差分法(FDTD) ． 16 2.3.2 光子晶體共振腔原理 ．．．．．．．．．．． 20 2.4 光子晶體折射率與頻帶禁域之線性變化 ．．．．． 23 2.4.1 線性變化之模擬 ．．．．．．．．．．．．． 23 2.4.2 線性變化之應用 ．．．．．．．．．．．．． 28 2.5 總結．．．．．．．．．．．．．．．．．．．．． 34 第三章 光子晶體之奈米微影技術製程 3.1 簡介 ．．．．．．．．．．．．．．．．．．．．． 38 3.2 光子晶體之奈米微影技術製程 ．．．．．．．．． 40 3.3 光子晶體製作流程 ．．．．．．．．．．．．．． 44 3.4 奈米微影技術．．．．．．．．．．．．．．．．． 46 3.5 奈米微影技術參數調校 ．．．．．．．．．．．． 50 3.6 光阻．．．．．．．．．．．．．．．．．．．．． 56 3.7 總結．．．．．．．．．．．．．．．．．．．．． 60 第四章 光子晶體之堆疊技術製程及量測 4.1 簡介 ．．．．．．．．．．．．．．．．．．．． 63 4.2 光子晶體之堆疊技術製程 ．．．．．．．．．．． 66 4.3 光子晶體共振腔製程 ．．．．．．．．．．．．． 71 4.4 元件光激發光量測．．．．．．．．．．．．．． 75 4.5 總結．．．．．．．．．．．．．．．．．．．． 92 第五章 總結 5.1 論文回顧．．．．．．．．．．．．．．．．．． 96 5.2 未來展望．．．．．．．．．．．．．．．．．． 98 | |
| dc.language.iso | zh-TW | |
| dc.subject | Photonic Crystal | en |
| dc.title | 光子晶體元件特性模擬與光子晶體製造技術研究 | zh_TW |
| dc.title | Characteristic Simulation and Fabrication Technique of hotonic Crystal Structure | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳敏璋,邱奕鵬 | |
| dc.subject.keyword | 光子晶體, | zh_TW |
| dc.subject.keyword | Photonic Crystal, | en |
| dc.relation.page | 100 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2006-07-26 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
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