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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 陳炳煇 | |
| dc.contributor.author | Yi-Ting Cheng | en |
| dc.contributor.author | 鄭伊廷 | zh_TW |
| dc.date.accessioned | 2021-06-08T06:24:13Z | - |
| dc.date.copyright | 2006-07-31 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-27 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/25675 | - |
| dc.description.abstract | An integrated DNA detection system using CMOS-MEMS technology was developed in this thesis. The integrated DNA detection system includes two parts: 1. CMOS biochip: The CMOS biochip, which is fabricated by TSMC 0.35 um 2P4M standard CMOS process combined with post-micromachining processes, is composed of DNA biosensors (microelectrodes), a current amplifier circuit, and a temperature system for single base pair mismatch detection. 2. Integrated microfluidic device: A glass substrate where the CMOS biochip was bonded and a PDMS microfluidic chip.
A novel technique using a self-assembly method combined with cascode current mirrors to amplify electrical signals is presented. The electric current passing through the gold nanoparticle multilayer, which is formed by complementary target DNA, exceeds that through the gold nanoparticle monolayer by three orders of magnitude. The lowest detectable concentration of target DNA on this biochip is 0.1 nM. After being amplified by the current mirrors, the electrical signal of the multilayer gold nanoparticle structure over a nanogap is successfully amplified to the level of mA and can then be measured by a commercial Volt-ohm-Milliammeter. With temperature sensors and heaters, single mutation of target DNA could be distinguished by about 2oC difference in melting temperature. Finally, after the combination of CMOS biochip and PDMS microfluidic chip, the whole DNA detection system can be portable and the ability of automation can be also increased. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T06:24:13Z (GMT). No. of bitstreams: 1 ntu-95-F91522102-1.pdf: 4616165 bytes, checksum: 551cdad3d24f664a38fcea0538e90e4d (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | Acknowledgement I
Abstract II Nomenclature IV Table of Content V List of Tables VIII List of Figures X Chapter 1 Introduction 1 1.1 General Remarks 1 1.2 Motivation and Objectives 3 1.3 Literature Survey 6 1.3.1 Gold Nanoparticle Probes for Electrical Detection of DNA 6 1.3.2 CMOS Compatible Materials as Temperature Sensor 7 1.3.3 Integrated Microfluidic Device 8 1.4 Thesis Outline 9 Chapter 2 Design Principle 14 2.1 Principle of Electrical DNA Detection Method 14 2.2 Principle of Single Base Pair Mismatch Detection 16 2.2.1 Melting Temperature Calculations 17 2.3 Design Principles and Simulation of Temperature System 18 2.2.1 Design Principles of Temperature System 18 2.2.2 ANSYS Simulation of Temperature System 19 2.4 Circuit Design of Current Amplifier 20 2.5 Design of the CMOS Biochip 21 2.5.1 CMOS 0.35 um 2P4M Whole Chip Layout 22 2.5.2 Subsystems of the CMOS biochip 23 Chapter 3 Post-CMOS Micromachining Process 36 3.1 Post-CMOS Micromachining Process Flow of the CMOS Biochip 36 3.2 Isotropic Wet Etching for Metal Layer 37 3.3 Anisotropic Dry Etching for Silicon Dioxide 38 3.4 Anisotropic Wet Etching for Silicon Substrate 38 3.5 Microelectrode Formation 39 3.6 Etching Depth Ruler 39 3.7 Wire Bonding 40 Chapter 4 Integrated Microfluidic Device 51 4.1 Fabrication Processes of Integrated Microfluidic Device 51 4.1.1 Fabrication Processes of Detection Electrodes on Glass Slide 51 4.1.2 Fabrication Processes of PDMS Microfluidic Chip 52 4.2 Detection Principle of Integrated Microfluidic Device 53 4.2.1 Preparation Step of the Integrated System 53 4.2.2 Detection Step of the Integrated System 54 Chapter 5 Experimental Apparatuses and Procedures 66 5.1 Experimental Apparatuses 66 5.1.1 Experimental Apparatuses Used in Post-CMOS Process 66 5.1.2 Experimental Apparatuses Used in Integrated Microfluidic Device Fabrication process 66 5.1.3 Measurement Apparatus 67 5.2 Experimental Reagents 68 5.3 Experimental Procedures 70 5.3.1 Experimental Procedures of DNA Hybridization of Self-assembly Multilayer Gold Nanoparticle (AuNP) 70 5.3.2 Calibration Procedure for the Relationship Between Resistance and Temperature of Temperature Sensor (Poly 2) 72 5.3.3 Experimental Procedure of Single Base Pair Mismatch Detection 72 Chapter 6 Results and Discussion 86 6.1 Electrical DNA Detection of CMOS Biochip 86 6.2 Results of Single Base Pair Mismatch Detection 87 6.2.1 Calculation of Melting Temperature 87 6.2.2 ANSYS Simulation Results of Temperature System 88 6.2.3 Experimental Results of Single Base Pair Mismatch Detection 88 6.3 Experimental Results of CMOS Biochip Integrated with Current Amplifier Circuit 89 6.4 Experimental Results of Integrated Microfluidic Device 90 Chapter 7 Conclusions and Future Prospects 101 References 103 | |
| dc.language.iso | en | |
| dc.subject | 自組裝 | zh_TW |
| dc.subject | 微流體晶片 | zh_TW |
| dc.subject | 單一鹼基錯位 | zh_TW |
| dc.subject | DNA 檢測 | zh_TW |
| dc.subject | 電流放大器 | zh_TW |
| dc.subject | CMOS | zh_TW |
| dc.subject | 奈米金粒子 | zh_TW |
| dc.subject | CMOS | en |
| dc.subject | microfluidic chip | en |
| dc.subject | single base pair mismatch | en |
| dc.subject | current amplifier | en |
| dc.subject | self-assembly | en |
| dc.subject | gold nanoparticles | en |
| dc.subject | DNA detection | en |
| dc.title | 以CMOS-MEMS技術開發之整合型DNA檢測系統 | zh_TW |
| dc.title | Development of an Integrated DNA Detection
System Using CMOS-MEMS Technology | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 博士 | |
| dc.contributor.oralexamcommittee | 戴慶良,顏家鈺,楊燿州,苗志銘,李達生 | |
| dc.subject.keyword | CMOS,DNA 檢測,奈米金粒子,自組裝,電流放大器,單一鹼基錯位,微流體晶片, | zh_TW |
| dc.subject.keyword | CMOS,DNA detection,gold nanoparticles,self-assembly,current amplifier,single base pair mismatch,microfluidic chip, | en |
| dc.relation.page | 107 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2006-07-30 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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