台灣地區半導體產業廢棄物產出因子推估之研究

Abstract

本研究主要之目的為依據行政院環保署所建立之半導體產業相關製造程序之廢棄物產出因子，比對驗證各年度產業實際申報量與推估量之差異性，以及根據物質流之觀點，應用半導體產業製程之原物料使用量、產品產量及廢棄物產生量，利用統計學之迴歸分析方法求得有害廢棄物產出量推估模式。本研究選擇二家台灣半導體產業中具代表性之企業各廠作為研究對象，然而依據產品及製程之不同，各廠略有差異，故於推估過程中比較各廠製程中使用之原物料及各類添加劑之比例及變動趨勢，並探討其與企業產能之相關性，依據統計分析過程以誤差進行模式推估與修正。 本研究結果顯示，A企業與B企業標準化迴歸分析模式差異相當大。然而，A企業與B企業標準化迴歸分析模式中仍有少數相同之參數，如：有害廢棄物產出總量之共同參數為硫酸銅使用量；pH值小(等)於2.0之廢液之共同參數為單位產品之有機添加劑使用量；閃火點小於60℃之廢液量之共同參數為磷酸類使用量及硫酸銅使用量。故其模式仍有相關性存在。推估結果顯示製程中所使用的添加劑比例變動性愈大，則實際產出量與推估產出量之差異也愈大。 由於半導體產業之積体電路製程有害廢棄物產出量佔事業廢棄物中有害廢棄物產出總量之比例相當高，標準化迴歸模式相關參數之應用若能以企業整體之資源投入與產出物質流進行分析，將能獲得更完整且更準確之推估結果，預期對於提升事業廢棄物資訊管理系統之功能擴展與應用，對於降低有害事業廢棄物流向及輸出入管制所衍生之環境風險之管理策略評估亦將有所助益。

The main goal of this research was to compare the difference between actual quantity and estimates, and to demonstrate with the waste discharge factors of seminconductor industry built by EPA. In terms of the material flow balance, the discharge model of hazardous waste according to quantity of materials, products and waste were evaluated by regression analysis. In this research, two representative companies were selected to be the subject. But there was difference among those factories with products and processes. So, the percentage and variation of different materials were compared with each other in this process of estimation. And the correlation between them and capacity of the two companies was analysed and the models were corrected subject to the deviation. According to the results, there were many differences between models of company A and company B. But there were also a few common parameters between them, for instance, the quantity of cupric sulfate used was the common parameter of total quantity of hazardous waste discharge; total quantity of organic additive per unit product was the common parameter of the quantity of waste liquor which pH value was less than (or equal to) 2.0; the quantity of phosphonate therapy and cupric sulfate used were the common parameters of the quantity of waste liquor which flash point was less than 60℃. So, the correlation was present between the parameters. The results of estimation showed that the more vary of additives rate used, the more diverse between actual discharge of hazardous waste and estimative one. Because the percentage of total quantity of hazardous waste discharge from advanced I.C. porocessing of semiconduct industry was high, the results of estimation will be more complete and accurate if the integral parameters of feed and output are applied to the mass flow analysis for standardized regression model. Thus, the function of industrial waste management system will be expandable and useful to decrease the risk of hazardous waste management.