協同上下游資訊之排程研究－以離子植入區為例

Abstract

半導體晶圓製造中的離子植入區為重要製程之一，離子植入機台中的燈絲元的有趣特點為不同種類在製品會影響到機台失效率消長，因此進行此區域製程類別選擇時需要特別考量此因素。 當在製品堆積於離子植入區，進行排程規劃時，此時發現在製品P及N種類工作量不均衡，導致離子植入區的失效發生機率增加，我們希望向上游提出一個要求，插入一個緊急在製品訂單，選擇新在製品的種類及加入時點，藉著此行為能夠降低離子植入區排程的失效狀況。 本研究將考慮到離子植入區的失效特性，提出一個新的概念－將下游的資訊往上游傳遞，藉著供應鏈節點合作行為來發展排程，並建立一個控制機制來判斷合適的時機進行資訊傳遞。不同於以往進行排程時，只考慮一個單區域內的在製品，本研究將延伸至跨區域的在製品，藉著上下游的資訊傳遞，能夠消弭排程中突發狀況所造成的變異性。 本研究的主要貢獻分為兩部分，第一部分為發展一個快速有效且考慮機台失效特性的方法。第二部分提出合適的時點來啟動控制機制，研究發現若上游機台發生突發狀況，在製品種類組合變異增加，工作負載量差距變大，使用代數快解法則能夠改善下游機台期望失效次數累積。

Ion implant area is one of the most important processes in semiconductor manufacturing industry. One of interesting property of components in Ion implantation is the effect on the variation of machine failure rate while processing different kind of WIP. The research considers the failure property of Ion implantation. The new idea is proposed – through sending the information of downstream (Ion implantation) to upstream so that the new scheduling could be developed by cooperation between supply chain nodes. The research also constructs the control mechanism which could suggest the timing to send the information. Unlike scheduling in just single area, which considers only WIP within one area, the research considers WIP in multi-area. By sending information in different area, the variation of disruption can be deceased. The contributions of the research have two parts. First part is to develop the effective algorithm including failure property and prove it is significant. Second, we provide the right timing to active the control mechanism. The study shows the expected failure times can be improved when the upstream has disruption.