太陽能矽單晶提拉爐高效率熱場設計與製程改善

Abstract

太陽能的單晶需要低成本，因此在不影響單晶品質的前題下，提升產能，降低成本是晶棒成長製程最重要的工作。 所以本論文透過熱場模擬與實驗的驗證，針對中美矽晶公司使用之Kayex CG6000 長晶爐熱場之複合式熱帷幕、保溫系統及晶棒界面凹陷大小作有系統的設計，以期能提升產能、降低生產成本。 經模擬及實驗的驗証，我們開發出新一代的熱帷幕及下部側向保溫元件，在不影響晶體含氧含碳及少數載子壽命的前題下，使長晶爐巳能有效的由原始熱場使用之正常操作能耗84kw降低至68kw，並且生產力由原始熱場1.34kg/hr大幅提升至2.21kg/hr。

The solar cell industry need low cost monocrystalline wafer to enlarge it’s application due to it’s remarkable high material cost. Reducing manufacturing cost is the most important task in the photovoltaics (PV) industry without down grading the quality of the solar ingot. In this paper, the hot-zone of the Kayex CG 6000 puller is well systematic designed through hot-zone simulation and experiment verification to raise throughput (in term of production per hours (PPH) and reduce production cost. The new generation hot-zone design including thermal shield cone, inside insulation and bottom insulation were developed through the software simulation and experiment verification. Without sacrificing the quality of solar ingot, the power consumption was significantly reduced from the original 84KW to 68KW. Also PPH is greatly promoted from original 1.34 kg/hr to 2.21 kg/hr.