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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/23386完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蔡睿哲 | |
| dc.contributor.author | Yu-Fan Chen | en |
| dc.contributor.author | 陳昱帆 | zh_TW |
| dc.date.accessioned | 2021-06-08T05:00:16Z | - |
| dc.date.copyright | 2011-08-22 | |
| dc.date.issued | 2011 | |
| dc.date.submitted | 2011-08-18 | |
| dc.identifier.citation | [1] R. Agarwal and S. Bhansali, 'Corner cube retroreflector,' US, 2007.
[2] T. S. Chu, L.-S. Huang, C. Y. Chang, C. S. Chang, W. F. Ye, M. H. Wen, and C. C. Yang, 'A new addressable corner micromirror array for free space optical applications,' 2002 IEEE/LEOS International Conference, 2002, pp. 45- 46. [3] http://zh.wikipedia.org/zh-tw/%E6%9D%A1%E5%BD%A2%E7%A0%81 [4] http://zh.wikipedia.org/zh-tw/QR%E7%A2%BC [5] Keng-hsing Chao, “The analysis and fabrication of switchable MEMS optical retro-reflector arrays,” July 2010 [6] X. Zhu, V. S. Hsu, and J. M. Kahn, “Optical modeling of MEMS corner cube retroreflectors with misalignment and nonflatness,” IEEE J. Sel. Top. Quantum Electron., vol. 8, pp. 26-32, 2002. [7] K. I. Jolic, M. K. Ghantasala, and E. C. Harvey, 'Excimer laser machining of corner cube structures,' Journal of Micromechanics and Microengineering, vol. 14, pp. 388-397, Mar 2004. [8] E. Brinksmeier, R. Glabe, and C. Flucke, 'Manufacturing of molds for replication of micro cube corner retroreflectors,' Production Engineering, vol. 2, pp. 33-38, 2008. [9] C. S. Chang, T. S. Chu, L. S. Huang, C. Y. Chang, S. Y. Zeng, M. H. Wen, and Y. K. Yen, 'A novel addressable switching micro corner cube array for free-space optical applications,' in Proc. of MEMS 2002, pp. 279- 282. [10] T. Dillon, A. Sure, J. Murakowski, and D. Prather, 'Continuous-tone grayscale mask fabrication using high-energy-beam-sensitive glass,' Journal of Microlithography Microfabrication and Microsystems, vol. 3, pp. 550-554, Oct 2004. [11] PolyMUMPsTM Design Handbook Revision 11.0 [12] PolyMUMPsTM General Release Instruction [13] Supercritical CO2 Dry Release操作手冊 [14] http://threeleafedclover.wordpress.com/2009/05/05/%E4%B8%89%E5%8F%B6%E8%8D%89%E7%9A%84%E8%8A%B1%E8%AF%AD%E5%B0%B1%E6%98%AF%EF%BC%9A%E5%B9%B8%E7%A6%8F/ [15] K. S. J. Pister, M. W. Judy, S.R. Burgett, and R. S. Fearing,“Microfabricated hinges,” Sensors and Actuators A, vol. 33, pp. 249-256,1992. [16] H. Toshiyoshi, H. Fujita, “Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix,” IEEE J. Microelectromech. Syst., vol. 5, pp.231-237, 1996. [17] V.S. Hsu, J.M. Kahn, K.S.J. Pster, “MEMS corner cube retroreflectors for free-space optical communications,” 1999. [18] K. Chao, et al., Fabrication and characterization of a micro tunable cat's eye retro-reflector, Opt. Commun. (2011), doi:10.1016/j.optcom.2011.06.063 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/23386 | - |
| dc.description.abstract | 本論文擬以Corner Cube Retro-reflector (CCR)來設計一光學回射器元件。藉由調變反射面鏡來破壞回射之條件，以此作為訊號調變器，可以用來傳送圖形或文字，產生動態之圖像。利用傳遞的光資訊可以同時擁有時間上及空間上的編碼(即動態之金鑰圖案)，如此便可建構具備高隱密性、高安全性的光學式的身分識別系統(Optical ID)。 | zh_TW |
| dc.description.abstract | A three-leaf trefoil-type corner cube retro-reflector (CCR) fabricated by the MUMPs polysilicon surface micromachining process is presented. Unlike most of other MEMS CCRs, our CCR’s opening faces straight upwards, making its (1, 1, 1) direction, i.e. the direction along which the retro-reflection efficiency is maximum, perpendicular to the surface of the substrate. This architecture is more suitable for applications such as CCR-based portable, dynamic, optical identification cards. The tunability can be achieved by employing an electrostatically-actuated gap-closing mirror (0.4°tilt at 250 V) as one of the three CCR reflecting ‘leaves’. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T05:00:16Z (GMT). No. of bitstreams: 1 ntu-100-R98941063-1.pdf: 9934223 bytes, checksum: 7d86c09217909da7206f77ade2d801f3 (MD5) Previous issue date: 2011 | en |
| dc.description.tableofcontents | 誌謝 i
中文摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vi 表目錄 ix Chapter 1 緒論 1 1.1 前言 1 1.2 回射器元件之簡介及其應用 2 1.2.1 自由空間光通訊系統 2 1.2.2 光學式身分識別系統 3 1.2.3 其他方面相關之應用 3 1.3 回射器元件之種類及其原理 4 1.3.1 貓眼式回射器 (Cat’s Eye Retro-reflector) 元件 4 1.3.2 CCR (Corner Cube Retro-reflector) 元件 5 1.3.3 直立式CCR回射器陣列 6 1.3.4 仰天式金字塔型類CCR回射器陣列 7 1.3.5 仰天式Triangle型CCR回射器陣列 7 1.3.6 仰天式Hexagon型CCR回射器陣列 8 Chapter 2 製程技術 9 2.1 微機電製程技術 9 2.1.1 MUMPs製程 (Multi User MEMS Process) 9 2.1.2 PolyMUMPs製程 (PolyMUMPs Process) 10 2.2 MEMS Structure Release 12 2.2.1 PolyMUMPs General Release 12 2.2.2 二氧化碳超臨界乾燥機(Supercritical CO2 Dry Release) 13 Chapter 3 設計原理 15 3.1 三葉草型CCR光學回射器 15 3.1.1 標準型 16 3.1.2 蜈蚣型 17 3.2 元件結構與理論計算 19 3.3 各種元件之設計概念 25 3.3.1 標準型 26 3.3.2 蜈蚣型 31 Chapter 4 實驗量測 33 4.1 元件組裝方式 33 4.2 回射特性量測 34 4.2.1 量測原理 34 4.2.2 實驗架構與步驟 34 4.2.3 實驗結果與分析 35 4.3 調變機制量測 36 4.3.1 量測原理 36 4.3.2 實驗架構與步驟 38 4.3.3 實驗結果與分析 40 4.4 共振頻譜量測 41 4.4.1 量測原理 41 4.4.2 實驗架構與步驟 42 4.4.3 實驗結果與分析 42 Chapter 5 結論 43 REFERENCE 48 | |
| dc.language.iso | zh-TW | |
| dc.subject | MUMPs製程 | zh_TW |
| dc.subject | corner cube 回射器 | zh_TW |
| dc.subject | 表面微機電製程技術 | zh_TW |
| dc.subject | corner cube retro-reflector | en |
| dc.subject | surface micromachining | en |
| dc.subject | MUMPs | en |
| dc.title | 三葉草型微機電可調變Corner Cube Retro-reflector (CCR)光學回射器 | zh_TW |
| dc.title | Three-Leaf Trefoil-Type MEMS Tunable Corner Cube Retro-reflector | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 孫家偉,呂志偉 | |
| dc.subject.keyword | corner cube 回射器,表面微機電製程技術,MUMPs製程, | zh_TW |
| dc.subject.keyword | corner cube retro-reflector,surface micromachining,MUMPs, | en |
| dc.relation.page | 49 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2011-08-18 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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