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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊申語(Sen-Yeu Yang) | |
dc.contributor.author | Yung Suen | en |
dc.contributor.author | 孫勇 | zh_TW |
dc.date.accessioned | 2021-06-08T03:54:38Z | - |
dc.date.copyright | 2018-08-18 | |
dc.date.issued | 2018 | |
dc.date.submitted | 2018-08-15 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/21950 | - |
dc.description.abstract | 具深寬比奈米柱陣列之材料表面能夠改變元件之物理特性,進而提升產品效能,已應用於檢測、光學、工業多領域。為了快速、低成本、大面積製作奈米柱陣列,本研究製作陽極氧化鋁模具,並轉印為高分子模具及金屬鎳模具,應用氣體輔助UV固化成型,進行結構複製,以得到具高深寬比之奈米柱結構,並用於SERS檢驗、抗反射及改變接觸角。
實驗中先製作陽極氧化鋁孔洞模具,透過改變電解液與電壓參數,得到不同孔洞間距的結構。接著透過AAO模具進行兩次轉印製作相同結構之模具,第一次轉印透過氣輔熱壓將AAO結構轉印到高分子PC基板上,然後透過電鑄獲得結構如AAO母模但機械強度較高之金屬鎳模具,使其可重複使用而不易變形。另外為使模具製作更方便與廉價,透過兩次熱壓轉印製作高分子PETG基板,其過程是利用Tg點較高之PC模為母模,透過氣輔熱壓轉印Tg點較低之PETG模具。 接著以製作出來模具為母模進行結構複製,以黏性低流動性高UV膠為材料,澆鑄到母模空洞內,並以透過氣體輔助施壓,UV壓固化成型,得到具有高深寬比奈米柱結構成品,結構最大深寬比達10.49。最後,使用複製成品進行SERS、抗反射及接觸角量測,以驗證試片之拉曼增強效果、抗反射與疏水效果。經量測其散射光譜檢測靈敏度均達到105以上,其中以180 V AAO模具複製之結構最佳,可達到2.69 × 106;於反射率量測中具有奈米柱結構均低於1 %以下,180 V AAO模具複製之結構具有最佳之抗反射效果,其反射率為0.53%;於接觸角量測中具有奈米結構其接觸角勻大於100゚,具有效之疏水效果,其中以150 V AAO模具複製之結構最佳,其接觸角為107.7゚。本研究證實氣體輔助UV固化製程具有快速、簡易、低成本方式製作奈米結構並應用的潛力。 | zh_TW |
dc.description.abstract | The surface of the material with a high aspect ratio nano-rod array can change the physical properties of the component, thereby improving product performance, and can be applied to a wide range of applications such as inspection, optics, antireflection, and hydrophobic etc. Fabricate large area nano-rod structures with low cost, in this study, an anodized aluminum mold was firstly fabricated and transferred into a polymer mold and a metal nickel mold. The gas-assisted UV curing molding was used to reproduce the nano-rod structure, so that it could be mass-produced, and a high aspect ratio nano-rod was obtained by a simple and rapid method. Final that applications for SERS inspection, antireflection and hydrophobic.
First, through two-step anodization process nanostructure mold, AAO nanostructure were obtained using phosphoric acid and Oxalic acid as electrolyte. AAO templates with different pitches and pore diameter can be fabricated by changing the electrolyte、anodization voltage and the widening time. The second method, uses the two-step transfer method of AAO mold to make the mold with the same structure. One is to make the polymer substrate through two gas-assisted hot pressing methods. The principle is to use two polymers with different Tgs. The second method is to make a nickel metal mold with higher mechanical strength through electroforming to ensure long-life. Then, nano-rod array was fabricated by gas assisted casting of UV-curable resin and UV-curing. The maximum aspect ratio of 10.49 was obtained. Finally, surface-enhanced Raman scattering (SERS)、reflectance and contact angle measurements were performed on the replicated products to verify the Raman enhancement factor(EF) and anti-reflection and hydrophobicity effects. The results showed that, for SERS experiment, the thin silver layer is sputtered on the nanostructured , we can test 4-Aminothiophenol(4-ATP) and Adenine that Raman spectrum, and the 180_AAO structure enhancement factor (EF) value is 2.69 × 106. For reflectance measure, the Nano rod structure all can be reduced to 1%, and the structure by 180 V AAO mold that reflectance can be reduced to 0.53%. For contact angle measure is all over 100°, which has the effect of hydrophobicity effect. Among them, the structure by 150 V AAO mold that contact angle is 107.7°. This research demonstrates the potential of gas assisted UV curing processes to make nanostructures in a fast, easy, and cost-effective manner. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T03:54:38Z (GMT). No. of bitstreams: 1 ntu-107-R05522735-1.pdf: 9079525 bytes, checksum: 5a96823a661534d278a8f544d8a7b45a (MD5) Previous issue date: 2018 | en |
dc.description.tableofcontents | 致謝 i
摘要 iii Abstract iv 目錄 vi 圖目錄 ix 表目錄 XV 第一章 導論 1 1.1 前言 1 1.2 奈米結構製作與複製成型技術 2 1.3 陽極陽化鋁(Anodic Aluminum Oxide)孔洞模具製備 3 1.4 紫外光固化成型技術 4 1.5 研究動機與目標 5 1.6 論文內容與架構 6 第二章 文獻回顧 7 2.1 陽極氧化鋁相關文獻 7 2.2 紫外光固化成型技術 11 2.3 紫外光固化壓印造成缺陷之問題與改善 18 2.4 氣體輔助壓印成型技術 22 2.5 奈米結構應用於表面能改質 30 2.6 表面增強拉曼散射原理 32 2.6.1 SERS基板製作 36 2.6.2 微結構對SERS的影響 40 2.7 整體回顧與研究創新 42 第三章 實驗設置與實驗方法 43 3.1 研究架構與實驗流程 43 3.2 氣體輔助熱壓成型設備 49 3.2.1 氣體壓印設備 49 3.2.2 壓印製程步驟 50 3.3 氣體輔助UV固化成型 52 3.3.1 設備架設 52 3.3.2 氣壓裝置 55 3.3.3 紫外光固化膠(UV Resin) 55 3.4 量測與相關設備 58 3.4.1 場發射電子顯微鏡(FE-SEM) 58 3.4.2 掃描式電子顯微鏡(SEM) 59 3.4.3 離子鍍金機 60 3.4.4 拉曼光譜量測系統 61 3.4.5 接觸角量測儀 63 3.4.6 光譜儀 63 第四章 模具製作及參數探討 65 4.1 陽極氧化鋁模具製作 66 4.1.1 退火 66 4.1.2 電化學拋光 66 4.1.3 第一次陽極陽化鋁 67 4.1.4 移除氧化鋁層 68 4.1.5 第二次陽極陽化鋁 68 4.1.6 擴孔 68 4.2 陽極氧化鋁模具成果探討 70 4.2.1 以草酸製作之陽極氧化鋁模具 70 4.2.2 以磷酸製作之陽極氧化鋁模具 74 4.3 金屬鎳模具製作 78 4.4 高分子模具製作 82 4.5 紫外光固化膠選用 86 4.5.1 膠體曝光時間與光學性質之探討 86 4.5.2 不同黏度紫外光固化膠與結構成型性 88 4.6 本章結論 91 第五章 奈米結構複製與應用 92 5.1 結構複製與參數探討 92 5.2 表面增強拉曼散射設置與檢測 98 5.2.1 不同結構對於拉曼強度之比較 98 5.2.2 Adenine 拉曼光譜分析 105 5.3 反射率量測 107 5.4 接觸角量測 110 5.5 本章結論 114 第六章 結論與未來展望 115 6.1 結論 115 6.2 未來展望 116 參考文獻 117 附錄A 氣體壓力對結構成型之影響 123 附錄B 不同孔洞直徑對成型之影響 127 附錄C 不同UV膠厚度與結構成型之影響 129 附錄D 真空澆鑄成型 131 | |
dc.language.iso | zh-TW | |
dc.title | 氣體輔助UV固化奈米結構成型及其在光學與檢驗應用 | zh_TW |
dc.title | Gas-Assisted UV Curing Nanostructure Fabrication and Application in Optics and Inspection | en |
dc.type | Thesis | |
dc.date.schoolyear | 106-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 邱智瑋(Chih-Wei Chiu),粘世智(Shih-Chih Nian),張致遠(Chih-Yuan Chang) | |
dc.subject.keyword | 陽極氧化鋁,氣體輔助,紫外光固化膠,拉曼散射,奈米結構,抗反射,接觸角, | zh_TW |
dc.subject.keyword | AAO,Gas-assisted,UV curing,Raman,Nanostructures,Antireflection,Contact angle, | en |
dc.relation.page | 131 | |
dc.identifier.doi | 10.6342/NTU201803657 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2018-08-16 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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