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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 電子工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/20896
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor楊英杰(Ying-Jay Yang)
dc.contributor.authorYing-Pin Wuen
dc.contributor.author巫英賓zh_TW
dc.date.accessioned2021-06-08T03:09:05Z-
dc.date.copyright2017-07-20
dc.date.issued2017
dc.date.submitted2017-06-08
dc.identifier.citationChapter 1
1. Y. Cui, Q. Q. Wei, H. K. Park, C. M. Lieber, Science 2001, 293, 1289
2. Y. Cui, Z. Zhong, D. Wang, W. U. Wang, C. M. Lieber, Nano Lett. 2003, 3, 149
3. F. Patolsky, G. F. Zheng, O. Hayden, M. Lakadamyali, X. W. Zhuang, C. M. Lieber, Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 14017
4. M. C. Lin, C. J. Chu, L. C. Tsai, H. Y. Lin, C. S. Wu, Y. P. Wu, Y. N. Wu, D. B. Shieh, Y. W. Su, C. D. Chen, Nano Lett. 2007, 7, 3656
5. C. J. Chu, C. S. Yeh, C. K. Liao, L. C. Tsai, C. M. Huang, H. Y. Lin, J. J. Shyue, Y. T. Chen, C. D. Chen, Nano Lett. 2013 13, 2564
6. M. Y. Shen, B. R. Li, Y.K. Li, Biosens. Bioelectron. 2014, 60, 101
7. K. I. Chen, B. R. Li, Y. T. Chen, Nano Today 2011, 6, 131
8. F. Leprince, H. Quiquampoix, European Journal of Soil Science. 1996, 47, 511
Chapter 2
1. J.W. Chung, S.D. Kim, R. Bernhardt, J.C. Pyun, Sensors and Actuators B: Chemical 2005, 111, 416
2. N. Maria, Velasco-Garcia, M. Toby Biosystems Engineering, 2003, 84, 1
3. F. Marinella, B. Damià TrAC Trends in Analytical Chemistry, 2003, 22, 299
4. M. S. Thakur, K. V. Ragavan, Journal of Food Science and Technology, 2013, 50, 625
5. R. Sara, J. Maria, M. Maria-Pilar, B. Damià, Talanta, 2005, 65, 291
6. K. Narsaiah, S. N. Jha, R. Bhardwaj, R. Sharma, R. Kumar, Journal of food science and technology, 2012, 49, 383
7. Y. Liu, Q. Liu, S. Chen, F. Cheng, H. Wang, W. Peng, Scientific Reports 2015 12864
8. M. C. Lin, C. J. Chu, L. C. Tsai, H. Y. Lin, C. S. Wu, Y. P. Wu, Y. N. Wu, D. B. Shieh, Y. W. Su, C. D. Chen, Nano Lett. 2007, 7, 3656
9. Y. Cui, Q. Q. Wei, H. K. Park, C. M. Lieber, Science 2001, 293, 1289
10. G. Zheng, F. Patolsky, Y. Cui, W. U. Wang, C. M. Lieber, Nat. Biotechnol. 2005, 23, 1294
11. S. Ingebrandt, Nature Nanotechnology 2015, 10, 734
12. K. Bohinc, V. Kralj-Iglic, A. Iglic, Electrochimica Acta 2001, 46, 3033
13. D. J. Griffiths Introduction to electrodynamics 2nd edition 1989
14. C. Phillip, AC circuit analysis: with illustrative problems 1974
15. R. Chang, Chemistry 2007
16. J. M. Berg, J. L. Tymoczko, L. Stryer, Biochemistry 2015
17. P. Bergveld, Sensors and Actuators B: Chemical. 2003, 88, 1
18. O. Knopfmacher, A. Tarasov, Wangyang Fu, M. Wipf, B. Niesen, M. Calame and C. Schönenberger, Nano Lett., 2010, 10, 2268
Chapter 3
1. M. C. Lin, C. J. Chu, L. C. Tsai, H. Y. Lin, C. S. Wu, Y. P. Wu, Y. N. Wu, D. B. Shieh, Y. W. Su, C. D. Chen, Nano Lett. 2007, 7, 3656
2. C. J. Chu, C. S. Yeh, C. K. Liao, L. C. Tsai, C. M. Huang, H. Y. Lin, J. J. Shyue, Y. T. Chen, C. D. Chen, Nano Lett. 2013 13, 2564
3. F. Patolsky1, G. Zheng, C. M. Lieber Nature Protocols 2006 1, 1711
4. Y. P. Wu, C. J. Chu, L. C. Tsai, Y. W. Su, P. H. Chen, M. K. Moodley, D. Huang, Y. T. Chen, Y. J. Yang, C. D. Chen, Nanotechnology 2017 28, 165501
Chapter 4
1. Y. Cui, Q. Q. Wei, H. K. Park, C. M. Lieber, Science 2001, 293, 1289
2. Y. Cui, Z. Zhong, D. Wang, W. U. Wang, C. M. Lieber, Nano Lett. 2003, 3, 149
3. F. Patolsky, G. F. Zheng, O. Hayden, M. Lakadamyali, X. W. Zhuang, C. M. Lieber, Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 14017
4. M. C. Lin, C. J. Chu, L. C. Tsai, H. Y. Lin, C. S. Wu, Y. P. Wu, Y. N. Wu, D. B. Shieh, Y. W. Su, C. D. Chen, Nano Lett. 2007, 7, 3656
5. C. J. Chu, C. S. Yeh, C. K. Liao, L. C. Tsai, C. M. Huang, H. Y. Lin, J. J. Shyue, Y. T. Chen, C. D. Chen, Nano Lett. 2013 13, 2564
6. M. Y. Shen, B. R. Li, Y.K. Li, Biosens. Bioelectron. 2014, 60, 101
7. K. I. Chen, B. R. Li, Y. T. Chen, Nano Today 2011, 6, 131.
8. E. Stern, R. Wagner, F. J. Sigworth, R. Breaker, T. M. Fahmy and M. A. Reed Nano Letters 2007, 7, 3405
9. S. Sorgenfrei, C. Chiu, M. Johnston, C. Nuckolls and K. L. Shepard Nano Letters 2011, 11, 3739
10. G. Drin, J. F. Casella, R. Gautier, T. Boehmer, T. U. Schwartz, B. Antonny, Nature Structural & Molecular Biology 2007, 14, 138.
11. Y. Paska, T. Stelzner, S. Christiansen, H. Haick, ACS Nano 2011, 5, 5620.
12. F. Lisdat and D. Schäfer Analytical and Bioanalytical Chemistry 2008, 391, 1555
13. X. Liu, P. Lin, X.Q. Yan, Z. Kang, Y.G. Zhao, Y. Lei, C.B. Li, H.W. Du, Y. Zhang, Sens. Actuators B-Chem. 2013, 176 , 22
14. A. Menzel, K. Subannajui, F. Güder, D. Moser, O. Paul, M. Zacharias, Adv. Funct. Mater. 2011, 21, 4342
15. M.W. Ahn, K. S. Park, J. H. Heo, J. G. Park, D. W. Kim, K. J. Choi, J. H. Lee, S. H. Hong, Applied Physics Letters 2008, 93, 263103.
16. K. Besteman, J. O. Lee, Frank G. M. Wiertz, H. A. Heering, C. Dekker, Nano Lett. 2003, 3, 727
17. J. Wang, Electroanalysis 2005, 17, 7; c) M. Mittal, A. Kumar, Sens. Actuators B 2014, 203, 349.
18. M. Mittal and A. Kumar Sensors and Actuators B: Chemical 2014, 203, 349
19. Y. C. Liu, N. Rieben, L. Iversen, B. S. Sorensen, J. Park, J. Nygard, K. L. Martinez, Nanotechnology 2010, 21, 245105.
20. P. Duch, A. W. Nørgaard, J. S. Hansen, J. B. Sørli, P. Jacobsen, F. Lynggard, M. Levin, G. D. Nielsen, P. Wolkoff, N. E. Ebbehøj, S. T. Larsen, Clinical Toxicology 2014, 52, 498
21. N. Bachar, L. Mintz, Y. Zilberman, R. Ionescu, X. Feng, K. Müllen, H. Haick, ACS Appl. Mater. Interfaces 2012, 4, 4960
Chapter 5
1. P. Bergveld, Sensors and Actuators. 1985, 8, 109
2. P. Bergveld, Biosensors. 1986, 2, 15
3. P. Bergveld, Biosensors and Bioelectronics. 1991, 6, 55
4. P. Bergveld, Sensors and Actuators B: Chemical. 2003, 88, 1
5. H. Cho, K. Kim, J. S. Yoon, T. Rim, M. Meyyappan, C. K. Baek, IEEE Sensors Journal, 2017, 17, 2792
6. Z. Dong, U. C. Wejinya, S. N. S. Chalamalasetty, Sensors and Actuators A: Physical 2012, 173, 293
7. F. Chen, Q. Qing, J. Xia, J. Li, N. E. Tao, J. Am. Chem. Soc. 2009, 131, 9908
8. M. C. Lin, C. J. Chu, L. C. Tsai, H. Y. Lin, C. S. Wu, Y. P. Wu, Y. N. Wu, D. B. Shieh, Y. W. Su, C. D. Chen, Nano Lett. 2007, 7, 3656
9. C. J. Chu, C. S. Yeh, C. K. Liao, L. C. Tsai, C. M. Huang, H. Y. Lin, J. J. Shyue, Y. T. Chen, C. D. Chen, Nano Lett. 2013 13, 2564
10. J. G. Nørby, M. Esmann J. Gen. Physiol. 1997 109, 555
11. N. Clément, K. Nishiguchi, F. Dufreche, D. Guerin, A. Fujiwara and D. Vuillaume, Applied Physics Letters 2011, 98, 014104
12. O. Knopfmacher, A. Tarasov, Wangyang Fu, M. Wipf, B. Niesen, M. Calame and C. Schönenberger, Nano Lett., 2010, 10, 2268
13. M. W. Shinwari, D. Zhitomirsky, I. A. Deen, P. R. Selvaganapathy, M. J. Deen, D. Landheer Sensors 2010, 10, 1679
14. J. M. Honig Thermodynamics (4th Edition) 2014
15. D. J. Griffiths Introduction to electrodynamics 2nd edition 1989
16. W. Schmickler, E. Santos, Interfacial Electrochemistry 2010
Chapter 6
1. Y. P. Wu, C. J. Chu, L. C. Tsai, Y. W. Su, P. H. Chen, M. K. Moodley, D. Huang, Y. T. Chen, Y. J. Yang, C. D. Chen, Nanotechnology 2017 28, 165501
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/20896-
dc.description.abstract首先,我們提出一項以奈米矽線場效應電晶體為基礎來偵測離子溶液環境中非極性以及電中性分子的技術,此技術原理是基於分子交互作用後電容會改變的特性,當奈米線表面發生分子交互作用便會改變表面分子的電容,此一改變會反映在奈米線交流阻抗的振幅大小與相位,搭配數值計算我們可以從振幅大小及相位的變化推測此分子交互作用中電場與電容何者的改變較為顯著。實驗上我們用不同帶電極性以及電中性的組胺酸對這項技術進行驗證,我們證明了不論帶正負電還是不帶電,組胺酸都可以成功的被偵測,而偵測中性組胺酸的靈敏度更高達到10-12莫爾/公升。我們更進一步證明此技術可以運用在非極性己烷分子的偵測,除此之外,此技術也成功證明可以應用在表面沒有絕緣層的奈米線。
接下來利用雙閘極奈米矽線電晶體為架構,因其二氧化矽絕緣層在緩衝溶液中會水解進而進行質子化與去質子化而形成帶電的表面,造就了一個研究帶電表面與離子交互作用的平台。首先,我們以放入金屬電極的離子溶液中做為液態閘極,此液態閘極與背閘極都有控制電晶體的功能,藉著量測「電流-液態閘極電壓」與「電流-背閘極電壓」的曲線我們可以對兩個閘極的功效做評估,研究中得到本系統液態閘極的作用能力比背閘極強21.8倍。除此之外,改變緩衝溶液的離子濃度我們發現電流-閘極電壓呈現水平偏移,而此偏移量與溶液濃度的對數呈線性相關,我們藉此證明此系統可以成為離子濃度定量的工具。進一步比較「電流-液態閘極電壓」與「電流-背閘極電壓」的曲線,我們在重合時發現兩者之間在不同濃度底下有不同的修正量,進一步分析發現此修正量與德拜長度有關,這也提供了另一種濃度定量的方法。
zh_TW
dc.description.abstractFirst, we report on a technique that can extend the use of nanowire sensors to the detection of interactions involving nonpolar and neutral molecules in ionic solution environment. This technique makes use of the fact that molecular interactions result in a change in the capacitance of the involving molecules. For the interactions taking place at the surface of nanowires, this capacitance change can be determined from the analysis of the measured nanowire complex impedance. To demonstrate this technique, histidine with different charge polarities controlled by the solutions pH value was detected, including the detection of electrically neutral histidine at a sensitivity of 1 pM. Furthermore, it is shown that nonpolar molecules, such as hexane, can also be detected. The technique is applicable to the use of nanowires with and without surface insulating oxide. We show that the information about the changes in the amplitude and phase of the complex impedance reveals the fundamental characteristics of the molecular interactions, including the electric field and the capacitance.
Next, we demonstrate a method that can quantitatively determinate the ionic strength of the electrolyte solution using dual-gated Si nanowire field effect transistor (SiNW-FET) without the need of reference electrode. Shifts of current-backgate voltage (I-Vbg) character measured using FET reveals the information about the sum of potentials that arise from the liquid gate-electrolyte interface and distribution of ions at electrolyte-SiO2 interfaces, allowing quantitative determination of ion strength. Comparing I-Vbg with current-liquid gate voltage (I-Vlg), it’s shown the liquid gate is more effective than the backgate by a factor of 21.8. Also, an extra offset voltage which is proportional to the Debye length was observed, providing another approach to quantitatively acquire the ionic strength.
en
dc.description.provenanceMade available in DSpace on 2021-06-08T03:09:05Z (GMT). No. of bitstreams: 1
ntu-106-D99943046-1.pdf: 2648587 bytes, checksum: 76539606bc1f51e1fb2032833469c2bc (MD5)
Previous issue date: 2017
en
dc.description.tableofcontents論文口試委員審定書 i
致謝 ii
中文摘要 iii
Abstract: iv
List of Figures ix
List of Table xii
Chapter 1 Introduction 1
1.1 Outline of this dissertation 2
1.2 Reference 3
Chapter 2 Background, principles and concepts 5
2.1 Bio- and chemical sensors 5
2.2 Silicon Nanowire Field Effect Transistor-Based Biosensor 5
2.2.1. Debye length 8
2.2.2. Permittivity, susceptibility and dielectric constant 9
2.2.3. Impedance 10
2.2.4. Chemical polarity 10
2.2.5. Zwitterion 12
2.3 Ion Sensitive Field Effect Transistor 13
2.3.1. Site-binding-model 13
2.4 Reference 14
Chapter 3 Device fabrication and measurement techniques 16
3.1 Silicon on insulator wafer 16
3.2 The sample layouts 17
3.3 Details of fabrication process 18
3.4 Simultaneous measurement system 21
3.5 Reference 23
Chapter 4 Detections of electrically neutral and nonpolar molecule in ionic solution environment 24
4.1 Introduction 24
4.2 Sample preparation 26
4.2.1 Attachment of probe nickel-nitrilotriacetic acid (Ni-NTA) on the SiNWs chip 26
4.2.2 Attachment of Isooctyl Trimethoxysilane (IOTMS) molecules 27
4.3 Result and discussion 27
4.4 Reference 43
Chapter 5 Quantitative determination of ionic concentration using dual-gated Si nanowire FET sensors 46
5.1 Introduction 46
5.2 Sample preparation 47
5.3 Result and discussion 48
5.4 Reference 60
Chapter 6 Conclusion 62
6.1 Reference 63
Appendix I Derivation of Debye length 64
Appendix II Calculation of AC circuit 66
Appendix III Derivation of Grahame equation 69
Appendix IV Frequency issues in AC measurement 71
List of Abbreviation 75
dc.language.isoen
dc.subject奈米矽線感測器zh_TW
dc.subject生物晶片zh_TW
dc.subject濃度定量zh_TW
dc.subject非極性分子zh_TW
dc.subject電中性zh_TW
dc.subjectbio chipen
dc.subjectnonpolar moleculeen
dc.subjectmolecular permittivityen
dc.subjectnanowire sensoren
dc.subjectISFETen
dc.subjectneutral moleculeen
dc.title以奈米矽線場效應電晶體檢測中性分子與離子濃度zh_TW
dc.titleDetection of neutral molecules and determination of ionic
concentration using silicon nanowire field-effect-transistors
en
dc.typeThesis
dc.date.schoolyear105-2
dc.description.degree博士
dc.contributor.coadvisor陳啟東(Chii-Dong Chen)
dc.contributor.oralexamcommittee郭華丞(Watson Kuo),陳逸聰(Yit-Tsong Chen),吳憲昌(Cen-Shawn Wu)
dc.subject.keyword生物晶片,奈米矽線感測器,電中性,非極性分子,濃度定量,zh_TW
dc.subject.keywordbio chip,nanowire sensor,molecular permittivity,nonpolar molecule,neutral molecule,ISFET,en
dc.relation.page77
dc.identifier.doi10.6342/NTU201700881
dc.rights.note未授權
dc.date.accepted2017-06-08
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept電子工程學研究所zh_TW
顯示於系所單位:電子工程學研究所

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