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標題: | 穩態下無功率損耗之磁驅動微機電鏡片 Magnetically-Actuated MEMS Mirror with Zero Steady-State Power Consumption |
作者: | Chun-Wei Tsai 蔡君偉 |
指導教授: | 蔡睿哲(Jui-che Tsai) |
關鍵字: | 微機電技術,磁驅動,45°傾斜鏡片,磁性粒子,組裝,穩定狀態,零功率損耗,光連結系統,系統重新配置, MEMS,magnetic actuation,45° mirror,magnetic beads,assembly,steady-state,zero power consumption,optical interconnect,system reconfiguration, |
出版年 : | 2014 |
學位: | 博士 |
摘要: | 本研究中提出兩組不同設計的微機電雙鏡片組元件,可應用於光連結系統,每組元件包含兩個45°組裝擺動式磁驅動微鏡片,而這些元件是透過美國MEMSCAP Inc.公司所提供的絕緣層上覆矽結構微機電製程技術(SOIMUMPs)的標準製程來進行製作而成。我們利用磁性粒子附著在微鏡片的鏡板背面,並透過永久磁鐵(Permanent magnet)的移動來控制鏡板的旋轉角度,故這種驅動方式不需要加入饋入導線即可遠端操控且可避免元件受到任何的電子損害。由於我們所製作的磁驅動微鏡片元件可產生大角度的旋轉,並透過微雙鏡片組元件之擺動角度的調整使得該元件具有光束精細微調和重新配置的能力。微機電雙鏡片組元件依照設計的不同可分為屋脊排列式和平行排列式兩組,其最大的擺動角度分別為16.9°和9.8°。在現階段實驗中,微機電雙鏡片組元件的驅動方法是採用手動方式控制永久磁鐵的位置來改變磁場強度的變化,主要是藉由手動控制方式來快速驗證具有氧化鐵磁性材料的微鏡片元件之磁驅動的可行性。然而,本實驗最終的目標是使用電控平移台來準確控制永久磁鐵的移動位置,該電控平移台應具有關閉電源後仍可保持在相同固定位置的特性。藉由電控平台的機制可使我們所提出的光連結系統在穩定狀態下(Steady-state)形成常閉工作模式(Normally-off operation)而不會產生任何的功率消耗(Zero pwer consumption);也就是說只有當光進行切換或是調變時才會啟動電控平移台的電源,進而實現具有低電功率消耗的光連結系統。在我們的研究中,除了使用永久磁鐵的移動來驅動微鏡片元件外,我們也嘗試使用電磁線圈導入電流和電熱驅動的方式來驅動微鏡片元件,而這兩種驅動方法即使在穩定狀態下仍需要導入恆定電流來維持對應的磁場強度和鏡板的角度旋轉。由於這兩種驅動方式皆會產生恆定的功率消耗,因此不能滿足我們所預期的常閉工作模式下操作的目的;但是,在本研究中我們仍然會提出使用電磁鐵驅動和電熱驅動微鏡片元件的實驗結果(旋轉角度versus供應電流),並將其與永久磁鐵驅動的實驗結果作比較分析。 This study presents two MEMS mirror pairs for optical interconnects, each consisting of two 45°-assembled swing-type mirrors that can be magnetically actuated. The mirror has magnetic beads attached to its back side, and its rotation angle is controlled by a sliding permanent magnet. The actuation method does not require wiring and avoids possible electrical damage to the device. The device is fabricated with the SOIMUMPs process developed by MEMSCAP Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. The full swing angles are 16.9° and 9.8° for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively. The MEMS mirror pair is actuated using a manually controlled permanent magnet for proof of concept. The final goal is to use motorized translation stage to carry the permanent magnets. The motorized stage shall have the characteristic that the power can be turned off while remaining at a fixed position. This provides us an optical interconnect which requires no power consumption at the steady state, i.e. normally-off operation; the power of the stages is turned on only when optical switching or tuning is needed. With this approach, an optical interconnect with low electrical power consumption can be achieved. In our study, we have also tried actuating the mirror with an electromagnetic coil and an electrothermal actuation. These actuation methods require a constant electric current and constant power consumption even at the steady state, and do not satisfy our intended purpose. However, we still include the results of electromagnetic and electrothermal actuation (rotation angle versus applied current) to compare with the results of magnetic actuation. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/16815 |
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顯示於系所單位: | 光電工程學研究所 |
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