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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 楊宏智(Hong-Tsu Young) | |
| dc.contributor.author | Shih-Che Huang | en |
| dc.contributor.author | 黃士哲 | zh_TW |
| dc.date.accessioned | 2021-06-07T17:56:06Z | - |
| dc.date.copyright | 2012-08-19 | |
| dc.date.issued | 2012 | |
| dc.date.submitted | 2012-08-15 | |
| dc.identifier.citation | [1] 黃欣怡, '雷射精密加工於常用工程材料之研究,' Laser Micro-machining on Engeering Materials, 臺灣大學, 2006.
[2] X. Liu, et al., 'Laser ablation and micromachining with ultrashort laser pulses,' Ieee Journal of Quantum Electronics, vol. 33, pp. 1706-1716, Oct 1997. [3] A. Zoubir, et al., 'Practical uses of femtosecond laser micro-materials processing,' Applied Physics A: Materials Science & Processing, vol. 77, pp. 311-315, 2003. [4] S. Nolte, et al., 'Polarization effects in ultrashort-pulse laser drilling,' Applied Physics A: Materials Science & Processing, vol. 68, pp. 563-567, 1999. [5] A. Weck, et al., 'Ripple formation during deep hole drilling in copper with ultrashort laser pulses,' Applied Physics A: Materials Science & Processing, vol. 89, pp. 1001-1003, 2007. [6] X. C. Wang, et al., 'Femtosecond pulse laser ablation of sapphire in ambient air,' Applied Surface Science, vol. 228, pp. 221-226, 2004. [7] 顏庭瑜, '飛秒雷射於工程材料精密加工之可行性研究,' 臺灣大學, 2008. [8] A. Luft, et al., 'A study of thermal and mechanical effects on materials induced by pulsed laser drilling,' Applied Physics A: Materials Science & Processing, vol. 63, pp. 93-101, 1996. [9] 黃懷諄, '飛秒雷射光源穩定系統設計與精密加工之研究,' 碩士, 國立台灣大學, 2011. [10] P. B. G. Philip V. Mitchell, and Donald K. Henderson. (2011) Fast-steering mirrors improve active beam stabilization. OPTOELECTRONICS WORLD. [11] B. Chichkov, et al., 'Femtosecond, picosecond and nanosecond laser ablation of solids,' Applied Physics A: Materials Science & Processing, vol. 63, pp. 109-115, 1996. [12] S. Nolte, et al., 'Ablation of metals by ultrashort laser pulses,' JOSA B, vol. 14, pp. 2716-2722, 1997. [13] 陳政雄. (2005) 硬脆性材料的雷射超精密加工技術(Laser material processing of brittle materials). 機械工業雜誌. 206-215. [14] H. L. T. L.Jiang, 'Femtosecond Lasers Ablation: Challenges and Opportunities,' in NSF Workshop on Research Needs in Thermal Aspects of Material Removal Stillwater OK, 2003, pp. 51-53. [15] R. R. Gattass, et al., 'Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates,' Optics Express, vol. 14, pp. 5279-5284, 2006. [16] X. Ni, et al., 'Thermal character in organic polymers with nanojoule femtosecond laser ablation,' Chinese Optics Letters, vol. 1, pp. 547-549, 2003. [17] G. H. G. Muller, P. Greve, 'Beam Position Control for a Laser Machine Device,' US Patent, 1986. [18] S. Grafstrom, et al., 'Fast Laser-Beam Position Control with Submicroradian Precision,' Optics Communications, vol. 65, pp. 121-126, Jan 15 1988. [19] T. Kanai, et al., 'Pointing stabilization of a high-repetition-rate high-power femtosecond laser for intense few-cycle pulse generation,' Applied Physics Letters, vol. 92, Feb 2008. [20] J. Elijah Kannatey-Asibu, PRINCIPLES OF LASER MATERIALS PROCESSING, 2009. [21] P. Gros, et al., 'Beam position stabilization for a confocal multiphoton microscope,' Appl. Opt., vol. 50, pp. 5361-5368, 2011. [22] J. Gray, et al., Laser pointing stability measured by an oblique-incidence optical transmittance difference technique vol. 72: AIP, 2001. [23] R. A. Hardin, et al., 'Active beam position stabilization of pulsed lasers for long-distance ion profile diagnostics at the Spallation Neutron Source (SNS),' Optics Express, vol. 19, pp. 2874-2885, Feb 14 2011. [24] G. Genoud, et al., 'Active control of the pointing of a multi-terawatt laser,' Review of Scientific Instruments, vol. 82, pp. -, Mar 2011. [25] Newport. FSM-300 Fast Steering Mirror & FSM-CD300B Controller/Driver user's manual. [26] Hamamatsu, 'Two-dimensional PSD Datasheet,' H. P. K.K., Ed., ed, 2007. [27] Hamamatsu, 2D PSD Signal Processing Circuit For Pin-cushion type PSD Type No. C7563 OPERATION MANUAL: Hamamatsu, 2003. [28] Hamamatsu, Signal Processing Circuit for 2-D PSD C4674, C7563 Datasheet, 2007. [29] S. Katayama, et al., 'Structure induced by irradiation of femtosecond laser pulse in dyed polymeric materials,' Journal of Polymer Science Part B: Polymer Physics, vol. 40, pp. 2800-2806, 2002. [30] S. Baudach, et al., 'Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate,' Applied Surface Science, vol. 154, pp. 555-560, 2000. [31] Spectra-Physics, Tsunami, Mode-Locked Ti:Sapphire Laser, User's Manual, 1995. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/15946 | - |
| dc.description.abstract | 超快雷射的發展與應用使得雷射加工有了新的發展方向。該項技術透過單光子離子化、多光子離子化的原理，使得能夠加工各種透明與非透明材料，並且具有熱影響區較小與精密度較高的優點。
然而，現實環境中充滿各種影響雷射指向性穩定的因子，舉凡機械震動、空氣擾動、溫濕度變化…等因素，皆可能成為在應用飛秒雷射進行高精密加工時造成精密度誤差的原因。 故本論文的研究目的在於透過觀察加工時的雷射指向性與加工結果之關係，評估在進行雷射加工時指向穩定性對於加工結果之影響。隨後透過使用本論文中所建立的雷射指向穩定系統中的快速轉動鏡組製造可人為控制之擾動，觀察加工結果與擾動性之關係，以期能夠作為出未來相關領域使用雷射指向穩定性進行加工之評估參考。 | zh_TW |
| dc.description.abstract | The development of ultra-fast technology has given a brand new approach in laser fabricating applications. With this technology featuring with the principles of single photon absorption and multi-photon absorption, machining any kind of transparent or opaque materials is now available and has superior advantages of small thermal effected zone and high machining precision.
In real world, however, there are kinds of factors that may be able to degrade the laser pointing stability, such as mechanical vibration, air flow disturbance, variation in ambient temperature and humidity, etc. Those factors may degrade the precision in ultra-fast laser fabrication. The main purpose in this thesis is to observe the correlation of laser pointing stability and laser fabrication result and make an assessment of influence of laser instability in ultra-fast laser fabrication regime. Moreover, with the adjusted laser pointing stabilization system in this work, finding the relationship of laser pointing instability with machining result by making worse laser pointing condition with the fast steering mirror in the system is the second objective in this thesis. With the relation of laser pointing and laser machining result, it may provide a new reference to those want to build up a laser pointing stabilization system in ultra-fast laser fabricating regime. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-07T17:56:06Z (GMT). No. of bitstreams: 1 ntu-101-R99522708-1.pdf: 6698570 bytes, checksum: a8c3113414ffb44322ca0e3ab14781a3 (MD5) Previous issue date: 2012 | en |
| dc.description.tableofcontents | 論文口試委員審定書 I
誌謝 II 摘要 V Abstract VI 目錄 VII 圖目錄 X 表目錄 XX 第一章 緒論 1 1.1 前言 1 1.2 研究動機 2 1.3 文獻回顧 5 1.3.1 飛秒雷射加工原理 5 1.3.1.1 飛秒雷射脈衝之光學穿透與加工 6 1.3.2 高重複率奈焦耳飛秒雷射微加工 11 1.3.3 雷射指向穩定系統回顧 13 1.3.4 雷射指向性擾動與分類 16 1.4 論文架構與流程 19 1.5 小結 21 第二章 雷射加工與指向穩定性之探討 22 2.1 前言 22 2.2 實驗系統簡介與工作原理 22 2.2.1 飛秒雷射光源系統與光路系統介紹 22 2.2.2 雷射指向性穩定系統介紹 24 2.2.3 快速反射鏡組 24 2.2.4 脈衝光偵測器 28 2.2.5 自製電路轉接盒 33 2.2.6 雷射光源指向穩定系統工作原理 35 2.3 指向穩定系統調整 36 2.3.1 系統修改 37 2.4 雷射指向穩定性之學理分析 55 2.4.1 數學模型之學理分析 55 2.5 小結 58 第三章 實驗設計 59 3.1 前言 59 3.2 加工材料設定 59 3.2.1 材料考量 60 3.2.2 材料特性描述 62 3.3 雷射加工參數之規劃 65 3.4 雷射指向穩定性之規劃 68 3.5 小結 73 第四章 實驗結果與討論 74 4.1 前言 74 4.2 加工期間雷射光指向性之探討 76 4.3 加工孔洞定量標準定義 90 4.4 擾動幅度與頻率對於加工結果之影響探討 92 4.4.1 擾動幅度對於加工結果之影響探討 92 4.4.2 擾動頻率對於加工結果之影響探討 109 4.5 小結 114 第五章 結論與未來展望 115 5.1 結論 115 5.2 未來展望 116 參考文獻 117 作者簡歷 120 | |
| dc.language.iso | zh-TW | |
| dc.subject | 飛秒雷射加工 | zh_TW |
| dc.subject | 鍍聚合物玻璃 | zh_TW |
| dc.subject | 指向性分析 | zh_TW |
| dc.subject | 雷射脈衝偵測器 | zh_TW |
| dc.subject | 快速反射鏡組 | zh_TW |
| dc.subject | 雷射指向穩定系統 | zh_TW |
| dc.subject | 高重複頻率奈焦耳飛秒雷射 | zh_TW |
| dc.subject | high-repetition rate femtosecond laser | en |
| dc.subject | polymer coated glass | en |
| dc.subject | pointing analysis | en |
| dc.subject | laser position sensing detector | en |
| dc.subject | laser pointing stabilization system | en |
| dc.subject | femtosecond laser machining | en |
| dc.title | 飛秒雷射光束指向穩定系統應用於微加工之分析 | zh_TW |
| dc.title | Analysis of Application in Micro-Machining with Femtosecond Laser Beam Stabilization System | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 100-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 王俊凱(Juen-Kai Wang),郭佳儱(C-L Kou),何正義(Je-Ee Ho) | |
| dc.subject.keyword | 飛秒雷射加工,高重複頻率奈焦耳飛秒雷射,雷射指向穩定系統,快速反射鏡組,雷射脈衝偵測器,指向性分析,鍍聚合物玻璃, | zh_TW |
| dc.subject.keyword | femtosecond laser machining,high-repetition rate femtosecond laser,laser pointing stabilization system,laser position sensing detector,pointing analysis,polymer coated glass, | en |
| dc.relation.page | 120 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2012-08-15 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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