常壓介電質自組織電漿束與其於金屬之表面改質

Abstract

本研究設計出以氦氣為主之常壓平板型介電質電漿系統，且於實驗中發現電漿之自組織型態(細絲與電漿束兩種)。系統電極長度為5公分長，產生之電漿束可長達2公分，因不會對金屬表面產生電弧之現象，因此可直接被運用。實驗結果顯示，於加入不同濃度之氧氣比例、改變電源之操作頻率與輸入功率大小，均可控制自組織細絲型態之數目，然不同氣體流量並不會影響自組織細絲型態之數目變化。此外，加入氧氣比例介於百分比0.03至0.09間，特別於加入百分比0.05時，自組織型態之電漿束將產生型態轉變，進而變成一均勻之電漿束。此一介電質電漿系統亦針對鋁金屬表面做應用處理。量測所得之接觸角，由未處理前之60度降低至處理後（加入百分比0.03之氧氣）之1.7度，處理時間低於0.5秒。顯示現階段之介電質電漿束可有效被應用於金屬表面改質。

In this study, the self-organized pattern of atmospheric helium based planar dielectric barrier discharge (DBD) jet has been experimentally investigated. With specially arranged electrodes (5 cm long), this DBD jet with a maximum length of 2 cm can be applied directly to a metal surface without any arcing phenomenon. Measurements show that the number of self-organized filaments can be controlled by varying the concentration of added oxygen, the driving frequency of the power source, and the magnitude of the power input. It also shows that the number of self-organized filaments is relatively independent from the gas flow rate. Mode transition is found from a self-organized pattern to a homogeneous one with oxygen addition of 0.03 to 0.09%, while oxygen addition of 0.05% leads to a very uniform pattern. This DBD jet has also been applied to treat aluminum surface. Experimental results show that a contact angle decreases from 60 degrees down to 1.7 degrees of the sample after plasma treatment with oxygen addition of 0.05% in less than effective residence time of 0.5 second. This implies that the current DBD jet system can indeed effectively perform metal surface modification without arcing.