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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 鍾添東(Tien-Tung Chung) | |
dc.contributor.author | Chih-Hsiang Chu | en |
dc.contributor.author | 朱志祥 | zh_TW |
dc.date.accessioned | 2021-05-20T21:28:27Z | - |
dc.date.available | 2010-08-20 | |
dc.date.available | 2021-05-20T21:28:27Z | - |
dc.date.copyright | 2010-08-20 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-18 | |
dc.identifier.citation | [1] HIWIN Corporation, http://www.hiwin.com/.
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/10424 | - |
dc.description.abstract | 本論文提出了對於高精度平面運動平台之結構設計與分析。該平面運動定位平台將具有高精度、長行程與奈米定位精度之特性。這個平台包含了底座、由四組空氣軸承所支撐的移動載台、四組線性馬達和一組二維光學尺。本文中提出使平台性能較佳的配置設計,並且透過有限元素分析方法來分析結構特性。透過最佳化設計方法來完成移動載台的輕量化設計,並且使其最大變形量為2μm。為了避免載台結構共振現象的產生,進行了移動載台在不同情況下的模態分析,並且分析平台在0.5g的加速度規格下,移動載台受到的慣性力而產生的變形量。本文提出在平面運動平台之中空氣軸承對向放置的配置方法,此配置方法可以解決因空氣軸承氣壓源之氣壓變化時,對移動載台所產生的振動現象。本文中並提出利用磁力來校正移動載台偏移的問題與移動載台對正原點的設計概念。本定位平台在X方向與Y方向之行程為50 mm x 50 mm,移動載台的最大加速度經過最佳化的輕量化設計後可達到1g以上的加速度。 | zh_TW |
dc.description.abstract | This study proposes the structural design and analysis of a precision positioning planar motion stage. The planar motion stage will have characteristics of high precision, long travel range, and nano-positioning accuracy. The stage consists of a stage base, a carriage supported by four air bearings, four linear motors, and a two-dimensional optical encoder. Configuration design is proposed for better operation characteristics. The structural characteristics of the stage are analyzed through static finite element analysis. A light weight design of the carriage is carried out through optimum design method. Modal analyses of the carriage in different conditions are also considered. The deformation of the carriage due to inertial loading by 0.5g acceleration is analyzed too. An opposed air bearings configuration in the planar motion stage is proposed to solve the vibration problem from air pressure variation. A mechanism by magnetic force to calibrate the tilt problem of the carriage and a homing alignment concept are proposed. The travel range of the stage in X-direction and Y-direction is 50 mm x 50 mm, and the maximum acceleration of the carriage after weight reduction by optimization will reach more than 1g. | en |
dc.description.provenance | Made available in DSpace on 2021-05-20T21:28:27Z (GMT). No. of bitstreams: 1 ntu-99-R97522607-1.pdf: 7852053 bytes, checksum: 4b806761b11c4a9e5a20bd4e1180f6ba (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 學位論文口試委員會審定書 I
Acknowledgements II 中文摘要 III Abstract IV Table of Content V List of Figures VIII List of Tables XI Chapter 1 Introduction 1 1.1 Background and Motivation 1 1.2 Paper Review 3 1.3 Research Objective 13 1.4 Thesis Outline 14 Chapter 2 Related Design Theorems 17 2.1 Structural Analysis Theorems of Finite Element Method 17 2.1.1 Static Structural Characteristics in Finite Element Analysis 18 2.1.2 Natural Frequency and Mode Shape in Finite Element Analysis 18 2.2 Structural Optimum Design Theorem 19 2.3 Components of The Positioning Stage 22 2.3.1 Air Bearings 22 2.3.2 Linear Motors 27 Chapter 3 Positioning Stage Layout Design 30 3.1 Illustration of The Stage System 30 3.1.1 Carriage 33 3.1.2 Stage Base 36 3.2 Design Integration 40 3.2.1 Controlling System 40 3.2.2 Measurement System 41 3.2.3 System Profile 42 Chapter 4 Structural Analysis and Design 44 4.1 Convergence Tests 44 4.2 Structural Static Analysis 45 4.3 Stage Plate Weight Reduction Design 47 4.3.1 Stage Carriage Parametric Design 47 4.3.2 Stage Carriage Optimum Design 49 4.4 Modal Analysis 56 4.5 Inertial Loading 64 4.6 Carriage with Cross Type Ribs 66 4.6.1 Weight Reduction Design 67 4.6.2 Modal Analysis 68 4.6.3 Inertial Loading 70 Chapter 5 New Configuration Design 72 5.1 Opposed Air Bearing Arrangement 72 5.2 Stage Table Tilt Calibration Mechanism 74 5.3 Carriage Homing Alignment 79 Chapter 6 Conclusions and Suggestions 80 6.1 Conclusions 80 6.2 Suggestions 81 References 82 Appendix A Parametric Model Generation Program 85 A-1 Installation of Model Generation Program 85 A-2 Execution of Model Generation Program 86 A-3 Listing of Model Generation Program 86 Appendix B ANSYS Parametric Analysis Program 92 B-1 Installation of ANSYS Analysis Program 92 B-2 Execution of ANSYS Analysis Program 92 B-3 Listing of ANSYS Macro Files 93 B-3-1 Macro File for Static Structural Analysis 93 B-3-2 Macro File for Modal Analysis 97 B-3-3 Macro File for Inertial Loading Analysis 100 Appendix C Optimum Design Program for Planar Stage 103 C-1 Installation of Optimum Design Program 103 C-2 Execution of Optimum Design Program 104 C-3 Listing of Optimum Design Program 104 C-3-1 *.bat File 104 C-3-2 *.txt File 104 C-3-3 AutoCAD LISP File 105 C-3-4 ANSYS Macro File 107 Vitae 108 | |
dc.language.iso | en | |
dc.title | 精密定位平面運動平台之結構設計與分析 | zh_TW |
dc.title | Structural Design and Analysis of a Precision Positioning Planar Motion Stage | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 范光照(Kuang-Chao Fan),絲國一(Kou-I Szu) | |
dc.subject.keyword | 平面運動平台,空氣軸承,線性馬達,光學尺,有限元素法, | zh_TW |
dc.subject.keyword | Planar motion stage,air bearing,linear motor,optical encoder,finite element analysis, | en |
dc.relation.page | 108 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2010-08-19 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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