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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 鍾添東 | |
| dc.contributor.author | Chia-Hung Ma | en |
| dc.contributor.author | 馬嘉宏 | zh_TW |
| dc.date.accessioned | 2021-05-20T21:26:29Z | - |
| dc.date.available | 2012-08-20 | |
| dc.date.available | 2021-05-20T21:26:29Z | - |
| dc.date.copyright | 2010-08-20 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2010-08-19 | |
| dc.identifier.citation | [1] J. Muller, J. Klein, J. Rayho, “In-process verification of MLC substrates,” Microelectronics Reliability, Vol.43, pp.371-375, 2003.
[2] K. C. Fan and C. Hsu, “Strategic planning of developing automatic optical inspection (AOI) technologies in Taiwan,” J. of Physics—Conference Series, Vol.13, pp.394-397, 2005. [3] J. J. Wu, “Finite element modeling and experimental modal testing of a three-dimensional framework,” International Journal of Mechanical Sciences, Vol.46, pp. 1245–1266, 2004. [4] Jochen M. Rieber and David G. Taylor, “Integrated control system and mechanical design of a compliant two-axes mechanism,” Mechatronics, Vol. 14, pp.1069-1087, 2004. [5] D.R. Griffiths and J.C. Miles, “Determining the optimal cross-section of beams,” Advanced Engineering Informatics, Vol. 17, pp. 59-76, 2003. [6] R. N. Mathivanan, R. S. Sharma, Dr V P Raghupathy, “Dynamic analysis and optimization of machine base for crankshaft pin milling machine,” IE(I) Journal–MC, vol. 88, 2007. [7] J. Gomand, R. Bearee, X. Kestelyn, P. J. Barre, “Physical dynamic modeling and systematic control structure design of a double linear drive moving gantry stage industrial robot,” 2007 European Conference on Power Electronics and Applications, 2007. [8] Ling Zhao, Wu-yi Chen, Jian-feng Ma, Yong-bin Yang, “Structural bionic design and experimental verification of a machine tool column,” Journal of Bionic Engineering Supply. pp. 46-52, 2008. [9] Soon Chul Jung, Jae Euna Lee, Seuna Hwan Chang, “Design of inspecting machine for next generation LCD glass panel with high modulus carbon/eproxy composites,“ Composite Structures, Vol. 66, pp. 439-447, 2004. [10] Ju Ho Kim, Jae Eung Lee, Seung Hwan Chang, “Robust design of microfactory elements with high stiffness and high damping characteristics using foam-composite sandwich structures,” Composite Structures, Vol. 86, pp. 220-226, 2008. [11] Sun-Kyu Lee, Jae-Heung Yoo, Moon-Su Yang, “Effect of thermal deformation on machine tool slide guide motion,” Tribology International, Vol. 36, pp. 41-47, 2003. [12] E. Creighton, A. Honegger, A. Tulsian, D. Mukhopadhyay, “Analysis of thermal errors in a high-speed micro-milling spindle,” International Journal of Machine Tools & Manufacture, Vol. 50, pp. 386-393, 2010. [13] A. Gelman, E. Maliah, “Mechanism for passive thermal compensation in harsh environment,” Proc. of SPIE, Vol. 6715, pp. 671506-1-671506-12, 2007. [14] Mark Stern, Charles Airesman, Vijay Pandit, all of Cumberland, Md., “Load cell temperature compensation system,” United States Patent No. 4543837, 1985. [15] Michael J. O’Brien, William B. Smith, Both of Rochester, N. Y., “Method and apparatus for combined active and passive athermalization of an optical assembly,” United States Patent No. 5313333, 1994. [16] Donald McCrary, Orlando, Fla., “Thermal loading retainer,” United States Patent No. 6108145, 1999. [17] A. Yunus, Heat transfer - a practical approach, McGraw-Hill, pp. 466-475, 1997. [18] J. M. Gere, Mechanics of materials-fifth edition, Brooks/Cole, pp. 271-302, 2001. [19] ANSYS® Academic Research, Release 10, Help System, ANSYS, Inc. [20] Polytec, http://www.polytec.com/ [21] Nippon Avionics CO.,LTD., http://www.avio.co.jp/ | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/10399 | - |
| dc.description.abstract | 本文主要探討高精度自動化光學檢測(automatic optical inspection, AOI)機台結構的最佳化設計與熱補償設計。首先，介紹一種現有的AOI 機台結構，並發展一套參數化實體模型繪圖程式以自動化更新此機台結構模型之主要設計參數。接著透過有限元素分析(finite element analysis, FEA)與實驗，得到此機台之結構特性。現有機台結構之各種結構響應(structural response)，諸如機台底座與檢測模組之變形量等，便可經由分析取得。一整合型最佳化程式亦被提出。此程式包括了四個部份：實體模型產生、有限元素分析模擬、行為響應近似模型產生與最佳化數值搜尋等。利用此整合型最佳化程式，對此AOI 機台之底座結構與移動件分別進行最佳化設計。此最佳化之結果，將可改善底座結構與移動件之結構特性，如結構剛性增強與輕量化等。另經由溫度分佈實驗得到機台於工作達到穩態時之溫度分佈，便可利用有限元素分析得到機台之熱變形情形。最後提出一熱補償設計，來改善此熱膨脹變形情形。 | zh_TW |
| dc.description.abstract | This paper studies the optimum design and thermal compensation design of a high precision automatic optical inspection (AOI) machine structure. First, the structure of AOI machine is introduced. A parametric program for AOI machine is developed to generate solid models of the AOI machine automatically. Then, structural characteristics of the AOI machine are analyzed by the finite element analysis (FEA) and obtained by experiments. Structural responses, such as deformation of the base frame and inspection lens tip, of the original structure are analyzed. An integrated program is also developed by combining solid model generation, FEA simulation, response approximation and numerical optimization searches. Using this integrated program, optimum design of the machine base and moving parts of AOI machine are conducted. The results of optimum design improve the structural characteristics of the AOI machine structure. After the temperature distribution experiment, the thermal deformation of the AOI machine can be analyzed by FEA. Finally, a thermal compensation design is proposed to compensate this thermal error. | en |
| dc.description.provenance | Made available in DSpace on 2021-05-20T21:26:29Z (GMT). No. of bitstreams: 1 ntu-99-R95522638-1.pdf: 5962148 bytes, checksum: 3b0e40e8c51d7023f6c9a670a0861bc6 (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | Abstract V
摘要 VII Table of Contents IX List of Figures XI List of Tables XV List of Symbols XVII Chapter 1 Introduction 1 Chapter 2 Theory and Development of AOI Machine Structure 17 2.1 Evaluation of Heat Generation and Air Convection Coefficients 17 2.2 Thermal Deformation Analysis of AOI Machine Structure 20 Chapter 3 Analysis of AOI Machine Structure 25 3.1 Structure of AOI Machine 25 3.2 Parametric Design of AOI Machine Structure 26 3.3 Finite Element Model of AOI Machine Structure 28 3.4 Structural Deformation Analysis and Experiments 31 3.5 Deformation Due to Inertial Force 33 3.6 Modal Analysis and Modal Test 35 3.7 Concept of Structural Optimum Design Program 40 Chapter 4 Optimum Design of AOI Machine 43 4.1 Modified Design for AOI Machine Base 43 4.2 Beam-Shell Finite Element Model for AOI Machine Base and Optimization 45 4.3 Modified and Optimum Design for X-axis Beam of AOI Machine 48 Chapter 5 Thermal Compensation Design of AOI Machine 53 5.1 Temperature Distribution Analysis 53 5.2 Thermal Deformation Analysis 58 5.3 Thermal Compensation Design 61 Chapter 6 Conclusions and Perspectives 67 6.1 Conclusions 67 6.2 Perspectives 68 References 71 Appendix A Parametric Solid Model Design by SolidWorks 75 A.1 SolidWorks API by Visual Basic of MicroSoft Visual Studio 2005 75 A.2 Code Description 76 Appendix B Instruction of the Structural Optimum Design Program 79 B.1 The description of Structural Optimum Design Program 79 B.2 The Description of Optimum Design Problem Setting 79 B.3 The Optimum Design Problem Solver Setting 80 B.4 The Approximation Setting 80 B.5 The Optimum Integrated Environment Setting 80 B.6 The Macro program for structural analysis of AOI machine 80 B.7 The Example of Optimum Design Problem Setting 82 VITA(作者簡歷) 85 | |
| dc.language.iso | en | |
| dc.title | AOI機台之結構最佳化與熱補償設計 | zh_TW |
| dc.title | Structural Optimum Design and Thermal Compensation Design of an AOI Machine Structure | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 98-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 范光照,劉正良 | |
| dc.subject.keyword | 自動化光學檢測,結構最佳化設計,有限元素分析,熱補償設計, | zh_TW |
| dc.subject.keyword | Automatic optical inspection,structural optimum design,finite element analysis,thermal compensation design, | en |
| dc.relation.page | 85 | |
| dc.rights.note | 同意授權(全球公開) | |
| dc.date.accepted | 2010-08-19 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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