Browsing by Subject (110)單晶矽,外凸角隅,蝕刻速率,
Showing results 1 to 1 of 1
| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2006 | 應用(110)單晶矽之外凸角隅量測單晶矽蝕刻速率 Measurement of etch rate through applicatity of Si(110) undercut convex corner | chau-shiung shiu; 許朝雄 | 應用力學研究所 |