Browsing by Author Shao-Wen Chang
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| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2012 | 利用硬體結構改善電子束微影中鄰近效應及電荷累積效應 Applying Hardware Structures to Suppress Proximity Effect and Charging Effect in E-beam Lithography | Shao-Wen Chang; 張韶文 | 電子工程學研究所 |