Browsing by Author Li-Hsuan Chung
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| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2020 | 100nm精密對位之莫瑞條紋分析及13.5nm極紫外光光罩缺陷檢測
Accurate alignment of Moiré fringe within 100 nm and photomask defect detection by 13.5 nm extreme ultraviolet | Li-Hsuan Chung; 鍾溧媗 | 工程科學及海洋工程學研究所 |