使用晶片載板製程及玻璃IPD製程設計水平極化韋瓦第天線陣列之D-頻段天線系統封裝

Abstract

本論文的研究內容分成二部分，第一部分在次太赫茲頻段設計傳輸線，板材使用欣興電子的BT載板製程和TSRI的玻璃IPD製程。在BT載板設計了低損耗的微帶線和接地共平面波導，GCPW的β低於微帶傳輸線，可能是由於GCPW間隔處的電場較大，這也有助於降低GCPW的損耗。玻璃IPD製程則設計了GCPW與兩種開槽型GCPW，透過調整開槽寬度，開槽後在140GHz的損耗減少了約37%，在300GHz的損耗減少了約34%。較寬的開槽有較低的損耗。 第二部分利用玻璃IPD製程設計水平極化一維端射Vivaldi天線，對單元天線和1×4陣列天線進行模擬與量測，1x4陣列天線波束掃描範圍達到-34⁰~34⁰。單元天線藉由下針量測在140GHz時的S_11為-8dB，頻寬為110-125GHz和155-165GHz共35GHz。在140GHz時1x4陣列天線的S_11為-20dB，頻寬從110GHz至170GHz，實現了60GHz的全頻段匹配。通過暗室量測，單元天線在140GHz的最大增益出現在φ=109⁰，約6.2dB。θ=100⁰時的HPBW為60⁰。在140GHz時1x4陣列天線最大增益也出現在φ=109⁰，約8.3dB。θ=105⁰時的HPBW為25⁰。

This thesis is divided into two main parts. The first part designs transmission lines in the sub-terahertz frequency band, using Unimicron electronics' BT substrate process and TSRI's glass IPD process. Low-loss microstrip lines and grounded coplanar waveguides (GCPW) are designed on the BT substrate, and the β of GCPW is lower than that of microstrip transmission lines, likely due to the larger electric field in the gap of the GCPW, which helps to reduce its loss. In the glass IPD process, a grounded coplanar waveguide and two types of slotted grounded coplanar waveguides are designed. With slot at ground plane, the loss is reduced by approximately 37% at 140GHz and 34% at 300GHz. Wider slot gives lower loss. The second part uses the glass IPD process to design a horizontal polarized one-dimensional end-fire Vivaldi antenna. Both the element antenna and the 1x4 antenna array are simulated and measured. The 1x4 antenna array has a beam steering range from -34°~34°. The single antenna measured with a probe at 140GHz has an S_11 of -8dB, with a 10dB bandwidth of 110-125GHz and 155-165GHz, a total of 35GHz. The 1x4 antenna array at 140GHz has an S_11 of -20dB, with a bandwidth of 110-170GHz, a total of 60GHz full-band matching. The 2D radiation pattern measured in the anechoic chamber shows the maximum gain of the single antenna at 140GHz is 6.2dB at φ=109°. The half-power beamwidth at θ=100° is 60°. The 1x4 antenna array at 140GHz has a maximum gain of 8.3dB at φ=109°, with a half-power beamwidth of 25° at θ=105°.