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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕 | |
dc.contributor.author | "Hsin-Ting, Liu" | en |
dc.contributor.author | 劉信廷 | zh_TW |
dc.date.accessioned | 2021-05-20T20:45:20Z | - |
dc.date.available | 2008-07-16 | |
dc.date.available | 2021-05-20T20:45:20Z | - |
dc.date.copyright | 2008-07-16 | |
dc.date.issued | 2008 | |
dc.date.submitted | 2008-07-11 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/9853 | - |
dc.description.abstract | 高精度定位平台伴隨精密科技之發展,奈米級解析度的定位平台更扮演了奈米科技發展之重要角色。本論文以壓電元件作為致動系統,而以全像術DVD讀取頭做為量測系統,開發三軸定位平台。壓電元件常被運用到微米以下的致動器上,經由精確的電壓控制亦可獲得奈米級的位移解析,但最大行程卻受限於其幾何尺寸。為了擴大致動行程,本論文採用無背隙之撓性結構來放大壓電元件之行程,並透過理論分析以及軟體模擬來探討行程放大效果與撓性結構幾何外形之關係。為了迎合致動行程之放大,像散式位移量測系統也利用改變物鏡焦長方式,來提昇其位移量測範圍。除此之外,並採用體積極為緊緻的全像光碟機讀取頭作為位移感測器,使整體系統體積更多縮小,更有力於奈米定位平台之運用和推廣。定位平台之行程、線性誤差、重現性誤差及解析度等特性也透過實驗測試方式予以驗證。 | zh_TW |
dc.description.abstract | High-resolution position stage is the footstone of the precision technology. A nano-level resolution positioning stage plays a important role in the development of nanotechnology. This paper proposes a 3-axis positioning stage built up by piezoelectric actuators as the actuating system and HOE-DVD pickup head as the displacement measurement system. Piezoelectric units are often used in micro-level actuator; by using the precise voltage control piezoelectric units can also fulfill a nano-level actuation. In order to increase the stroke of piezoelectric actuator, a flexible structure without backlash and friction is utilized. Its relationship between the displacement amplifying effect and the geometric parameters of flexible structure is studied by the theoretical analysis and the finite element analysis. For matching the actuation stroke, the optical displacement measurement system is modified by varying focal length of the lens. Besides, the elaborate application of the miniature HOE pickup head makes the whole system more compact to promote the widespreading application of the nano-level positioning systems. Furthermore, diverse properties of the positioning stage including stroke, linearity, repeatability and resolution are verified by experimental testings. | en |
dc.description.provenance | Made available in DSpace on 2021-05-20T20:45:20Z (GMT). No. of bitstreams: 1 ntu-97-R95522617-1.pdf: 3030893 bytes, checksum: ed8d12a88e1d13170c5045c4bd9d67bd (MD5) Previous issue date: 2008 | en |
dc.description.tableofcontents | 口試委員會審定書……………………………………………… i
誌謝……………………………………………………… ………. ii 中文摘要………………………………………………… ……… iii 英文摘要……………………………………………… …………. iv 目錄…………… ………………… V 表目錄 VII 圖目錄 VIIIi 符號表 XI 第一章 緒論 1 1.1 研究背景與動機 1 1.2相關文獻回顧 3 1.2.1 壓電致動系統 3 1.2.2 非接觸式量測系統 4 1.3研究目標 6 1.4內容簡介 7 第二章 三軸位移定位系統 8 2.1 功能與構想 8 2.2 整體架構 13 第三章 壓電式致動子系統 16 3.1 壓電原理與材料特性 16 3.1.1壓電效應 16 3.1.2壓電材料之非線性特性 17 3.1.3壓電材料的剛性 19 3.1.4壓電元件應變表現式 21 3.2 位移放大壓電致動器之幾何構形設計 25 3.2.1撓性位移放大結構 25 3.2.2 菱形位移放大結構 25 3.2.3圓形彈簧鋼片之位移放大機構 30 3.2.4 橢圓形彈簧鋼片之位移放大機構 35 3.2.5 橢圓形位移放大機構之壓電致動器 41 3.2.6 位移放大壓電致動器位移對電壓關係 42 第四章 光學式量測子系統 43 4.1 光學讀取頭聚焦量測之原理 43 4.1.1光學讀取頭原理及光學元件功能介紹 43 4.1.2雷射光束和能量密度分佈 46 4.1.3以幾何光學計算光點成像位置與形狀 48 4.2 全像雷射整合之DVD讀取頭 54 4.2.1 全像光學DVD讀取頭 54 4.3全像雷射讀取頭之構型與應用 59 4.3.1全像雷射讀取頭量測光路 59 4.3.2全像雷射讀取頭模組化構型 62 第五章 三軸定位系統之設計開發與控制程式 64 5.1 總系統架構 64 5.2 電路架構與程式 67 第六章 三軸閉迴路奈米定位致動系統之系統性能 69 第七章 結論與未來展望 81 參考文獻 83 附錄 85 | |
dc.language.iso | zh-TW | |
dc.title | 三軸閉迴路奈米定位致動系統之設計開發與特性研究 | zh_TW |
dc.title | Design and Development of a 3-axes Close-looped Nano-scale Positioning System | en |
dc.type | Thesis | |
dc.date.schoolyear | 96-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蔡德民,林沛群 | |
dc.subject.keyword | 全像術DVD讀取頭,壓電致動器,位移量測,聚焦誤差訊號,線性範圍,撓性結構, | zh_TW |
dc.subject.keyword | HOE-DVD pickup head,piezoelectric actuators,displacement measurement,focus error signal,linear range,flexible structure, | en |
dc.relation.page | 89 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2008-07-14 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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