請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/9818
標題: | 應用乾膜光阻直接製作微結構於金屬滾輪之技術開發與應用 Direct Fabrication of Metal Rollers with Microstructures Using Dry Film Resist and its Rolling Application |
作者: | Chih-Lung Lee 李志隆 |
指導教授: | 楊申語 |
關鍵字: | 乾膜光阻,滾輪壓印, Dry Film Resist,Rolling, |
出版年 : | 2008 |
學位: | 碩士 |
摘要: | 精密光學元件多以射出或傳統微熱壓成型,效率有待提升,而且製作有反覆升降溫,耗時又成品殘留應力大且,複製面積也受限等缺點。因此,具連續生產特性之滾輪壓印製程便日受重視。滾輪壓印關鍵在於滾輪製作,一般是將具有微結構之薄金屬片包覆在滾輪上,導致在壓印過程中容易模具位移或翹曲等問題;若以軟性材料進行模具製作,模具不耐高溫、強度不足與耐久性不佳。
本研究應用乾膜光阻貼附於曲面滾輪基材,將微結構直接製作在滾輪上,達到一體成型之優點,可避免包覆式緊附不易與軟性模具強度不足等缺點。加上塑膠光罩可以AutoCAD繪製,輸出至PET可撓性基材,設計製作簡易、成本低廉且圖案製作彈性大,更是一大優點,曝光後之濕式蝕刻與無電鍍鎳,在滾輪上製作微結構技術也十分成熟。以乾膜光阻直接製作滾輪,大幅降低將圖案轉至滾輪之門檻。 利用乾膜光阻製作微結構滾輪有三種方式:(1)先貼合、後曝光再蝕刻;(2)先曝光、後貼合再蝕刻;(3)先曝光、後貼合再無電鍍鎳。本研究探討此三種製程順序,並探討貼合、曝光與蝕刻參數對品質影響,歸納出一完整之成型操作窗與最佳參數。 本研究進一步應用上述三種方法所製作之滾輪,裝設在擠出微壓印系統與氣體輔助平台轉印系統壓印微結構,實際進行微結構薄膜製作。擠出微壓印系統結合「滾輪微壓印」與「薄膜擠出成型」製程,以三種不同實驗設置:(1)微結構滾輪無紅外線加熱,驅動輪為矽膠滾輪;(2)微結構滾輪有紅外線加熱,驅動輪為矽膠滾輪;(3)微結構滾輪有紅外線加熱,驅動輪為剛性滾輪。以上述三種實驗設置,探討壓印後微結構於PC塑膠薄膜上成型之微結構高度,並成功將微結構轉印至PC塑膠薄膜上,且成功使用氣體輔助平台設備將無電鍍後於鋁輪上之微結構轉印至PET基材上。 最後,以結構直徑79.8μm之圓形陣列孔洞模具,成功壓印出直徑86.98μm,焦距為216μm之微透鏡陣列,量測觀察後可知以本研究之製作流程,可大量複製微結構並達到大面積且均勻之連續生產,有效提升微結構滾輪之製作與整合微結構壓印製程之開發及其應用。 Conventionally, the precise optical elements are usually fabricated using injection molding and hot embossing processes. The disadvantages of these processes are long cycle time, residual stress in products, and limited replicating area. Hence, it is important and demanding to develop a continuous roller embossing process with the capacities of high throughput and rapid fabrication. A typical roller was made from that the thin metal sheet which had the microstructure was wrapped onto the roller. With this method, mold sliding and warping were observed during the process. On the other hand, if the mold was soft material, insufficient strength and poor durability of the mold were also problems. This study proposes a process of fabricating microstructures on the surface of metal rollers. The direct metal roller fabricating process involves three methods including dry film resist (DFR) laminating, wet etching and electroless plating process. Additionally, the flexible film photomask can be easily designed using CAD software; it enhances the design simplicity and flexibility, so the cost is lowered. In this study, three kinds of roller fabrication processes are developed: (1) lamination before exposure, etching process; (2) exposure before lamination, etching process; and (3) exposure before lamination, electroless plating process. The parameters of lamination, exposure and etching are also investigated. After the microstructure rollers have been fabricated, the metal rollers with microstructures are used both in the hybrid extrusion embossing system and roller UV micro-stamping process. The hybrid extrusion embossing system combines “ roller embossing ” and “ film extrusion ” methods to fabricate microlens arrays and grating on PC film. In this experiment, we discuss three conditions in the hybrid extrusion embossing system: (1) non-infrapara radiant ceramic heater using silicon roller; (2) with infrapara radiant ceramic heater using silicon roller; and (3) with infrapara radiant ceramic heater using rigid roller. The height of the microstructures on PC film is discussed. Second, the fabricated roller is used as the mold in the roller UV micro-stamping process to replicate grating pattern on PET film. Finally, the microlens arrays with 86.98 μm diameter and 216 μm focal length are fabricated successfully using the roller mold with micro-holes array structures. This result proves that the rollers fabricated in this method can be used in roller embossing and UV micro-stamping for microstructure mass production. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/9818 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 機械工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-97-1.pdf | 9.31 MB | Adobe PDF | 檢視/開啟 |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。