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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蘇國棟 | zh_TW |
| dc.contributor.advisor | Guo-Dung Su | en |
| dc.contributor.author | 翁晉笠 | zh_TW |
| dc.contributor.author | Jin-Li Weng | en |
| dc.date.accessioned | 2024-02-22T16:28:48Z | - |
| dc.date.available | 2024-02-23 | - |
| dc.date.copyright | 2024-02-22 | - |
| dc.date.issued | 2024 | - |
| dc.date.submitted | 2024-02-01 | - |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/91735 | - |
| dc.description.abstract | 超穎透鏡是二維結構，可以完全控制光的振幅、相位和偏振。矽結構具有高傳輸率、低損耗以及與現有半導體技術的兼容性。最近，在「lab-on-fiber」技術的新興框架內，奈米尺度上控制光的強大能力而受到了廣泛的研究。由此產生的光纖「meta-tips」有望為典型的光纖應用場景（例如感測、電信、成像等）提供超表面賦予的先進光操縱功能。在這裡，將使用半導體製程技術來完成超穎透鏡製做。首先，先在玻璃柱基板上選擇矽當作元件材料，之後利用電子束微影的技術(正光阻)產生出奈米結構線寬的圖形，最後再透過lift off 以及由上至下的蝕刻得到矽奈米柱。將做好的超穎透鏡與光纖做結合，成功量測到在1550nm波段的入射光，通過自製超穎透鏡有著聚焦點的效果。聚焦效果為60%。 | zh_TW |
| dc.description.abstract | The meta-lens is a two-dimensional structure that can fully control the amplitude, phase, and polarization of light. The silicon structures offer high transmission rates, low losses, and compatibility with existing semiconductor technologies. Recently, within the emerging framework of "lab-on-fiber" technology, the powerful ability to control light at the nanoscale has been widely researched. The resulting fiber-optic "meta-tips" are expected to provide advanced light manipulation capabilities for typical fiber optic applications such as sensing, telecommunications, imaging, etc., endowed by the meta-lens. Here, semiconductor fabrication techniques will be employed to create the meta-lens. Initially, silicon is chosen as the component material on a glass rod substrate. Subsequently, patterns with nanoscale structure linewidths are generated using electron-beam lithography with positive photoresist. Finally, silicon nanocolumns are obtained through lift-off and top-down etching. The completed meta-lens is then integrated with the optical fiber. Successful measurements of incident light at 1550nm wavelength have been achieved, demonstrating a focusing effect with a 60% efficiency. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2024-02-22T16:28:48Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2024-02-22T16:28:48Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | 誌謝 I
中文摘要 II ABSTRACT III CONTENTS IV LIST OF FIGURES VII Chapter 1 Introduction 1 1.1 Quantum Science 1 1.1.1 platforms for quantum communications 1 1.1.2 quantum communication systems 4 1.2 Optical Communication 5 1.3 Fiber Coupling 6 1.3.1 Edge couplings 7 1.3.2 Vertical coupling 8 1.4 Meta-surface 9 1.5 SMF & MMF 10 1.5.1 Core 11 1.5.2 Cladding 12 1.5.3 Coating/Jacket 12 1.6 Fiber combined with meta-surface 13 1.7 Motivation 16 Chapter 2 Fabrication Technology 18 2.1 Cleaning 18 2.2 Lithography 19 2.3 Lift off Process 22 2.4 Etching Process 24 2.4.1 Dry etching 24 2.4.2 Wet Etching 25 Chapter 3 Experimental Methods 27 3.1 Fabrication of Meta-lens 27 3.1.1 Process Equipment in Meta-lens 27 3.1.2 Process Flow of Meta-lens 43 3.2 Measurement Setup 45 Chapter 4 Results and Discussion 48 4.1 Fabricated of Meta-lens 48 4.1.1 Glass Substrate Cleaning 48 4.1.2 Photoresist Pattern by E-beam 49 4.1.3 RIE Etching Process 52 4.2 Meta-lens Measurement 69 Chapter 5 Conclusion 78 REFERENCE 79 | - |
| dc.language.iso | en | - |
| dc.subject | 光纖 | zh_TW |
| dc.subject | 奈米柱 | zh_TW |
| dc.subject | 電子束微影 | zh_TW |
| dc.subject | 非晶矽 | zh_TW |
| dc.subject | 超穎透鏡 | zh_TW |
| dc.subject | 超穎介面 | zh_TW |
| dc.subject | 光通訊 | zh_TW |
| dc.subject | Optical Communication | en |
| dc.subject | Optical Fiber | en |
| dc.subject | Nanocolumns | en |
| dc.subject | Electron Beam Lithography | en |
| dc.subject | Amorphous Silicon | en |
| dc.subject | Meta-lens | en |
| dc.subject | Meta-lens Interface | en |
| dc.title | 超穎透鏡結合單模光纖應用在1550nm光通訊波長 | zh_TW |
| dc.title | A Meta-lens Integrated with a SMF Fiber for 1550nm Optical Communication Wavelength | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 112-1 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.oralexamcommittee | 黃定洧;巫朝陽 | zh_TW |
| dc.contributor.oralexamcommittee | Ding-wei Huang;Jau-Yang Wu | en |
| dc.subject.keyword | 超穎介面,超穎透鏡,非晶矽,電子束微影,奈米柱,光纖,光通訊, | zh_TW |
| dc.subject.keyword | Meta-lens Interface,Meta-lens,Amorphous Silicon,Electron Beam Lithography,Nanocolumns,Optical Fiber,Optical Communication, | en |
| dc.relation.page | 83 | - |
| dc.identifier.doi | 10.6342/NTU202400478 | - |
| dc.rights.note | 未授權 | - |
| dc.date.accepted | 2024-02-05 | - |
| dc.contributor.author-college | 電機資訊學院 | - |
| dc.contributor.author-dept | 光電工程學研究所 | - |
| 顯示於系所單位： | 光電工程學研究所 | |
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