熱擴散式氣體流量感測器研發

Abstract

近年來由於精密產業崛起，熱擴散式氣體流量計之需求大幅提升，因為熱擴散式流量計在管道中不會造成壓力損失以及可以檢測氣體的優勢，所以被廣泛應用於電子、鋼鐵、半導體…等產業。目前熱擴散式氣體流量計的產品皆為國外進口且價格相當昂貴，約80000 ~ 150000新台幣，且國內尚無此產品的相關專利。故本研究與合作公司桓達科技擬研發此項產品為目標，對此產品進行初期開發，盼能透過此研究奠定開發產品的基礎。本研究係利用COMSOL Multiphysics進行熱擴散式流量計模擬，模擬加熱端溫度與流體流速間之關係，並透過實驗驗證模型之準確度。再利用田口法設計熱擴散式流量計的原型機，訂定原型機的幾何參數，設計感測端的軟性印刷電路板。接著透過實驗取得冷熱端電壓差與流速之關係，最後透過Arduino與LCD螢幕將流速可視化。熱擴散式流量計原型機實驗結果表明，此原型機的再現性佳，且在量測7.6m/s ~ 16.5m/s風速下，其誤差皆小於5%。

In recent years, there has been a significant increase in demand for thermal dispersion gas flow meters due to the rise of the precision industry. This is because thermal dispersion flow meters do not cause pressure loss in pipelines and have the advantage of being able to detect gases. As a result, they are widely used in industries such as electronics, steel, semiconductor, and others. Currently, all thermal dispersion gas flow meter products are imported from foreign countries, and they are quite expensive, costing around 80,000 to 150,000 NTD. Furthermore, there are no relevant patents for this technology domestically. Therefore, this research aims to develop this product as the goal, hoping to lay the foundation for product development through this study. This study utilizes COMSOL Multiphysics to simulate thermal dispersion flow meters, investigating the relationship between the temperature of the heating element and the fluid velocity. The accuracy of the model will be validated through experimental verification. To design the prototype of the thermal dispersion flow meter, the Taguchi method will be utilized. Geometric parameters for the prototype will be determined, and a flexible printed circuit board for the sensing end will be designed. Finally, the flow velocity will be visualized using Arduino and an LCD screen. The experimental results of the thermal dispersion flow meter prototype indicate that the error is less than 5% for wind speeds ranging from 7.6m/s to 16.5m/s.