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標題: | 雙電極石英晶體微天平共振之提昇能量集中的三維數值模擬 Three Dimensional Simulations of Enhancing Energy Concentration for a Dual-channel Quartz Crystal Microbalance Thickwise Shear Resonance |
作者: | Ming-Wei Liao 廖銘威 |
指導教授: | 張正憲(Jeng-Shian Chang) |
關鍵字: | 雙通道石英晶體微天平,壓電材料,平台設計,步階設計,能量井效應,有限元素法, dual-channel quartz crystal microbalance,piezoelectric material,mesa design,bi-step design,energy trapping effec,finite element method, |
出版年 : | 2009 |
學位: | 碩士 |
摘要: | 隨著檢測要求的提升及製程技術的純熟,多通道石英晶體微天秤不僅成為可行的夢想,更是未來生物感測器的發展目標
在此論文裡,首先考慮了二維模型模擬。在此,我們利用了以往的研究中,已經證明的平台式設計來提升QCM的敏感度及準確性,然而在某些特定的設計尺寸下,其QCM的能量井效應會有大幅減少的現象,當此現象發生時會使得量測工作準確度下降。接著,在考慮了二維問題時的平面應力下,當展成三維模型時,我們將其展成三種不同的形式,並且討論各平台的高度對於能量井效應的變化,但由結果中仍然發現其掉落現象的發生。因此我們再引進了步階式的設計,並且希望能夠改進此現象。而本文的目標則是為了將QCM的設計最佳化,也因此在本文的最後會經由模擬結果,建議往後QCM適當的設計模型及相關的尺寸。 With the increasing need for gauge and the substantial progress of wafer fabrication technique, Multi-channel Quartz Crystal Microbalance (MQCM) is very attractive for biosensor applications. In this paper, 2D simulations are performed first. The mesa-design dual-channel QCM is utilized to improve the sensitivity and stability. However, the energy trapping effect will decrease suddenly under some specific geometry. This phenomenon is called dropping effect, and those specific sizes are called dropping points. Then, under the assumption of 2D plane strain problems, three distinct 3D mesa-design models are introduced for the simulation. Then, the energy trapping effect varied with mesa height will be discussed for each. Unfortunately, the dropping effect still exists. Therefore, to meliorate the phenomenon, the bi-step design is recommended. Finally, the suggested design dimension and model have been established by the process of optimizing dual-channel quartz crystal microbalance. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/8985 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 應用力學研究所 |
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