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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/86404完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 林新智 | zh_TW |
| dc.contributor.advisor | Hsin-Chih Lin | en |
| dc.contributor.author | 林丕晟 | zh_TW |
| dc.contributor.author | Pi-Chen Lin | en |
| dc.date.accessioned | 2023-03-19T23:53:51Z | - |
| dc.date.available | 2023-12-26 | - |
| dc.date.copyright | 2022-08-26 | - |
| dc.date.issued | 2022 | - |
| dc.date.submitted | 2002-01-01 | - |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/86404 | - |
| dc.description.abstract | 過於快速的生物降解率是阻礙鎂合金在生物醫學領域應用的一個重要議題。透過原子層沉積（ALD）的獨有特性，原子層沉積被認為是一種適合用於提升鎂合金性能的方式。一般而言，製備上較厚或多層結構的ALD膜能達到較高耐腐蝕阻抗，而本研究採用一種逐層電漿處理的原子層電漿處理技術來提升透過熱驅動原子層沉積模式生長的二氧化鋯膜的腐蝕保護特性。原子層退火對材料特性的影響具有時間依賴性，30秒的原子層退火時間能提供二氧化鋯膜薄膜最大限度的極化阻抗提升，由原先的1.8kΩ·cm2提升至到74.7kΩ·cm2，這來自於高程度的結晶性提升，以及氧空缺數量達40個百分比的改善。與增加厚度效應相比較，30秒的原子層退火於二氧化鋯薄膜的腐蝕阻抗提升效果相當於厚度由200個循環增加到300個循環的效果，甚至原子層退火能使熱驅動原子層沉積所製備出的二氧化鋯薄膜，較電漿增益型原子層沉積製備的薄膜具有更高的腐蝕阻抗。透過等效電路研究和腐蝕行為研究，原子層退火顯著改善薄膜結晶度和缺陷，從而抑制離子擴散的機制。 本研究中也透過XRD與TEM的分析確認二氧化鉿鋯能成功的被製備於擠製態的鎂鈣合金表面。而且，二氧化鉿鋯薄膜可以提高擠製態鎂鈣合金的腐蝕阻抗，從而降低鎂鈣合金的生物降解率。腐蝕電流密度、pH值評估和腐蝕表面影像提供腐蝕速率提高的證據。與二氧化鋯薄膜相比，二氧化鉿鋯薄膜表現出更好的短期耐腐蝕性能。並且納入WST-1測定和LDH試驗，以表明二氧化鉿鋯薄膜毒性低，適用於生物植入物的保護塗層。 | zh_TW |
| dc.description.abstract | Excessive biodegradation rate is a critical problem for magnesium alloys in the biomedical field. With its unique properties, atomic layer deposition (ALD) is seen as a potential method that can be applied in corrosion protection for magnesium alloys. So far, using thicker film or multilayer structure design can enhance the corrosion resistance of ALD films. However, extended techniques of ALD have not been applied to such areas. In the first part of this work, atomic layer plasma annealing (ALA) that ALD films are exposed by in-situ plasma treatment can effectively enhance the corrosion protection of ZrO2 film deposited by thermal ALD mode (TALD-ZrO2). As the ALA effect is time-dependent, the influence of ALA time is investigated. The maximum enhancement of polarization resistance of ZrO2 films from 1.8kΩ·cm2 to 74.7kΩ·cm2 is found when the ALA time is 30s, which is because of the high-level crystallization and dramatic improvement of oxygen vacancy of 40%. In addition, the maximum ALA effect is relevant to the thickness effect that increases the film thickness from 200 cycles to 300 cycles. In the first part of this work, the ALA effect on the characteristics and corrosion properties of ZrO2 films are studied. Furthermore, by discussing the equivalent circuit and corrosion behavior of the system with the characteristics, the improvement of the crystallinity and defects of the films leads to the suppression of mass transfer which is the main mechanism of the ALA effect. In the second part of this study, HfZrO2 (HZO) films are deposited on an as-extruded Mg-Ca alloy. The identification of the compound is processed by XRD and TEM analysis. When the as-extruded Mg-Ca alloy is covered by the HZO films, the corrosion resistance of the alloy is enhanced. This result reflects in the decrease in corrosion rate. By involving HfO layer to ZrO2, continuous electrochemical impedance spectroscopy (EIS) is used to measure the decline of corrosion resistance. The corrosion resistance of HZO films decreases faster than that of ZrO2 films within the certain period. As the corrosion properties of HZO films are investigated, its biocompatibility is confirmed by 3-day WST-1 assay and LDH test. HZO films have low toxicity signifying that HZO films are suitable as a protective layer for biomedical implants. | en |
| dc.description.provenance | Made available in DSpace on 2023-03-19T23:53:51Z (GMT). No. of bitstreams: 1 U0001-2008202216562400.pdf: 11001532 bytes, checksum: 8762ad9d063fbcce64142dd0700dd0ea (MD5) Previous issue date: 2022 | en |
| dc.description.tableofcontents | 誌謝 I Table of Contents II List of Figures IV List of Tables XII Abstract XIII 中文摘要 XV Chapter 1 Preface 1 Chapter 2 Literature review 3 2.1 Improvement in the corrosion rate of magnesium alloy 6 2.1.1 Composition 6 2.1.2 Processing 8 2.1.3 Surface modification 9 2.2 Atomic layer deposition (ALD) 10 2.2.1 Plasma-enhanced ALD 21 2.2.2 Application of ALD on corrosion protection of metal 24 2.2.3 Atomic layer annealing (ALA) 27 Chapter 3 Design of experiment 32 3.1 Magnesium-calcium alloy preparation and pretreatment 32 3.2 ALD film fabrication 33 3.3 Characterization of Mg-Ca alloy and ALD film 36 3.3.1 Crystal structure, crystallinity, and film density 36 3.3.2 Defect analysis 37 3.3.3 Cross-sectional observation of ALD film 37 3.3.4 Morphology and element distribution observation 38 3.3.5 Corrosion properties measurement 39 3.3.6 Biocompatibility 41 Chapter 4 Results and discussion 42 4.1 Effect of atomic layer annealing on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy 42 4.1.1 Microstructure analysis 42 4.1.2 Electron configuration 47 4.1.3 Thickness measurement 49 4.1.4 Corrosion resistance measurement 50 4.1.5 Corrosion rate measurement 54 4.1.6 pH value evolution 56 4.1.7 Identification of ALA time effect on corrosion protection 57 4.1.8 Surface morphology 63 4.1.9 Element distribution 64 4.1.10 Mechanism discussion 72 4.2 Improvement of corrosion resistance and biocompatibility of biodegradable Mg-Ca alloy by ALD HfZrO2 film 77 4.2.1 Microstructure analysis 77 4.2.2 Characteristics of HZO film 79 4.2.3 Corrosion protection of HZO film 82 4.2.4 Corrosion rate of Mg-Ca alloy with/without HZO film 82 4.2.5 Biocompatibility 92 Chapter 5 Conclusion 94 Reference 96 | - |
| dc.language.iso | en | - |
| dc.subject | 原子層退火 | zh_TW |
| dc.subject | 生物可降解植體 | zh_TW |
| dc.subject | 鎂鈣合金 | zh_TW |
| dc.subject | 腐蝕保護 | zh_TW |
| dc.subject | 原子層退火 | zh_TW |
| dc.subject | 原子層沉積 | zh_TW |
| dc.subject | 生物可降解植體 | zh_TW |
| dc.subject | 鎂鈣合金 | zh_TW |
| dc.subject | 腐蝕保護 | zh_TW |
| dc.subject | 原子層沉積 | zh_TW |
| dc.subject | atomic layer annealing (ALA) | en |
| dc.subject | magnesium-calcium alloy | en |
| dc.subject | biodegradable implants | en |
| dc.subject | biodegradable implants | en |
| dc.subject | magnesium-calcium alloy | en |
| dc.subject | corrosion protection | en |
| dc.subject | atomic layer annealing (ALA) | en |
| dc.subject | atomic layer deposition (ALD) | en |
| dc.subject | atomic layer deposition (ALD) | en |
| dc.subject | corrosion protection | en |
| dc.title | 應用原子層沉積技術改善可生物降解鎂鈣合金抗蝕性之研究 | zh_TW |
| dc.title | Improvement of corrosion resistance of biodegradable Mg-Ca alloy by atomic layer deposition technique | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 110-2 | - |
| dc.description.degree | 博士 | - |
| dc.contributor.oralexamcommittee | 陳敏璋;林招松;林昆明;楊凱強;丘群 | zh_TW |
| dc.contributor.oralexamcommittee | Miin-Jang Chen;Chao-Sung Lin;Kun-Ming Lin;Kai-Chiang Yang;Chun Chiu | en |
| dc.subject.keyword | 原子層沉積,原子層退火,腐蝕保護,鎂鈣合金,生物可降解植體, | zh_TW |
| dc.subject.keyword | atomic layer deposition (ALD),atomic layer annealing (ALA),corrosion protection,magnesium-calcium alloy,biodegradable implants, | en |
| dc.relation.page | 110 | - |
| dc.identifier.doi | 10.6342/NTU202202611 | - |
| dc.rights.note | 同意授權(全球公開) | - |
| dc.date.accepted | 2022-08-22 | - |
| dc.contributor.author-college | 工學院 | - |
| dc.contributor.author-dept | 材料科學與工程學系 | - |
| dc.date.embargo-lift | 2027-08-21 | - |
| 顯示於系所單位： | 材料科學與工程學系 | |
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