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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 朱有花 | zh_TW |
| dc.contributor.advisor | You-Hua Chu | en |
| dc.contributor.author | 王彥竣 | zh_TW |
| dc.contributor.author | Yan-Jun Wang | en |
| dc.date.accessioned | 2023-03-19T22:20:36Z | - |
| dc.date.available | 2023-11-10 | - |
| dc.date.copyright | 2022-09-14 | - |
| dc.date.issued | 2022 | - |
| dc.date.submitted | 2002-01-01 | - |
| dc.identifier.citation | [1] C. M. JANSKY, “The beginnings of radio astronomy,” American Scientist, vol. 45,
no. 1, pp. 5–12, 1957. [2] A. D. Bolatto, J. Carpenter, S. Casassus, D. Iono, R. Ivison, K. Johnson, H. van Langevelde, J. Martín-Pintado, M. Momose, R. Moreno, et al., “A road map for developing alma: Asac recommendations for alma 2030,” 2016. [3] P. T. Ho, J. M. Moran, and K. Y. Lo, “The submillimeter array,” The Astrophysical Journal, vol. 616, no. 1, p. L1, 2004. [4] J. Payne, “Multibeam receiver for millimeter-wave radio astronomy,” Review of scientific instruments, vol. 59, no. 9, pp. 1911–1919, 1988. [5] W. Shan, J. Yang, S. Shi, Q. Yao, Y. Zuo, Z. Lin, S. Chen, X. Zhang, W. Duan, A. Cao, et al., “Development of superconducting spectroscopic array receiver: A multibeam 2sb sis receiver for millimeter-wave radio astronomy,” IEEE Transactions on Terahertz Science and Technology, vol. 2, no. 6, pp. 593–604, 2012. [6] S. Ezaki, J. Liu, S. Asayama, S. Iguchi, T. Noguchi, and W. Shan, “Planar superconductor-insulator-superconductor mixer array receivers for wide field of view astronomical observation,” in Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX (J. Zmuidzinas and J.-R. Gao, eds.), SPIE, July 2018. [7] T. Van Duzer, Principles Super Devices Crcts. Stamford, CT: Appleton & Lange, Dec. 1992. [8] P. Cox, R. Lucas, P. Huggins, T. Forveille, R. Bachiller, S. Guilloteau, J. Maillard, and A. Omont, “Multiple molecular outflows in afgl 2688,” Astronomy and Astrophysics, vol. 353, pp. L25–L28, 2000. [9] I. Sliusar, V. Slyusar, S. Voloshko, A. Zinchenko, and Y. Utkin, “Synthesis of a broadband ring antenna of a two-tape design,” in 2020 IEEE Ukrainian Microwave Week (UkrMW), pp. 161–165, 2020. [10] AnsoftCorporation, “Hfssv10userguide.” https://vdocuments.mx/ hfss-v10-user-guide.html, 2005. [11] R. E. Collin, Foundations for Microwave Engineering. IEEE Press Series on Electromagnetic Wave Theory, Nashville, TN: John Wiley & Sons, 2 ed., Dec. 2000. [12] V. F. Hanna, “Parameters of coplanar diretional couplers with lower ground plane,” in 1985 15th European Microwave Conference, pp. 820–825, 1985. [13] B. C. Wadell, Transmission Line Design Handbook. Microwave Library, Norwood, MA: Artech House, May 1991. [14] M. Spirito, G. Gentile, and A. Akhnoukh, “Multimode analysis of transmission lines and substrates for (sub) mm-wave calibration,” in 82nd ARFTG Microwave Measurement Conference, pp. 1–6, IEEE, 2013. [15] D. Pozar, Microwave engineering. Harlow, England: Addison-Wesley, 1991. [16] E. Wilkinson, “An n-way hybrid power divider,” IRE Transactions on Microwave Theory and Techniques, vol. 8, no. 1, 1960. [17] X. Zhu, J.-P. Geng, X. Liang, R.-H. Jin, and Y. Huang, “A distinctive method of eliminating out-band instability in cascaded active device system based on narrowband attenuation,” Progress In Electromagnetics Research Letters, vol. 48, pp. 59– 65, 2014. [18] B. W. Maxfield and W. McLean, “Superconducting penetration depth of niobium,” Physical Review, vol. 139, no. 5A, p. A1515, 1965. [19] M. A. Gosalvez, R. Nieminen, P. Kilpinen, E. Haimi, and V. Lindroos, “Anisotropic wet chemical etching of crystalline silicon: atomistic monte-carlo simulations and experiments,” Applied surface science, vol. 178, no. 1-4, pp. 7–26, 2001. | - |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/84687 | - |
| dc.description.abstract | 由於大型電波望遠鏡的造價昂貴，其觀測時間一直以來都是個相當珍貴的資源。多像素的外插接收機是一個可以提升電波望遠鏡單位時間資料接收量、並減少每個天體所需觀測時間的方法。而緊緻的多像素模組是一個建立大型多像素陣列的關鍵。依據外插接收機的接收結構，在這個多像素模組中，必須要有一個元件來處理複數本地震盪訊號(LO)。本論文利用SiNx/Si薄膜結構來發展在200 GHz到240 GHz的LO訊號分流器，以在晶片上的平面電路來處理LO訊號的分流來讓像素的排列可以更加緊緻。
我們設計了三片晶片，分別是一片1-to-2的LO等效功率分配器晶片做為基礎的分流結構測試，以及兩個不同傳輸線條件的1-to-1的LO功率發射器晶片作為分流結構的量測基準。LO等效功率分配器主要由三個結構所組成，在SiNx/Si薄膜上用來連接波導與平面電路的過度探針(發射器)、作為平面傳輸線的共面波導(CPW)、以及讓訊號分流的CPW形式的威爾金森功率分配器。我們以HFSS電磁模擬軟體來驗證這些結構的可行性。其計算出功率分配器的S11與S21(S31)在操作頻率分別小於-17 dB和大於-5 dB。這三個晶片已通過製程被成功製造出來，而薄膜製程的細節亦會在本論文中討論。同樣地，晶片封裝模組的設計與量測環境的設定亦囊括在論文中。其中一個20mm 1-to-1晶片的量測顯示其性能有-1.3 dB與-5.5 dB兩種可能，這兩個數值是相對於等長的矩形波導的性能。而造成量測上有這兩種可能的原因仍在調查。 | zh_TW |
| dc.description.abstract | Multipixel receiver is an intuitive way to increase the mapping speed of radio telescope and reduce the observation time of each target. To build the large format array, a compact and easy to be scaled up multi-pixel receiver module is crucial. Multiple local oscillator (LO) source is a necessary part in this module. In this thesis, we will present our study on chip-type LO power distributor's work at the frequency from 200 GHz to 240 GHz, which is based on SiNx/Si membrane structure.
We designed a 1-to-2 LO power divider as our starting point. Two types of 1-to-1 LO power transmitters are also designed as the baseline. The LO power divider includes a transition probe (emitter) on SiNx/Si membrane in the waveguide, the coplanar waveguide (CPW) transmission line, and Wilkinson power divider in the CPW form. The design of these elements was simulated by an EM simulator, HFSS®. The calculated S11 and S21 (S31) of power divider would be below -17 dB and higher than -5 dB respectively. The fabrication process of membrane structure has been developed, and it will be explained in detail in this thesis. The housing block design and measurement device setting are also included. One type of the 20 mm 1-to-1 coupler has been measured and presented in the thesis. The measurement result shows two possibilities of chip's performance. Comparing to the isometric rectangular waveguide, one is -1.3 dB, and the other is -5.5 dB. The reason for these two possible results is still under investigation. | en |
| dc.description.provenance | Made available in DSpace on 2023-03-19T22:20:36Z (GMT). No. of bitstreams: 1 U0001-0609202220072700.pdf: 28288243 bytes, checksum: 1b15e8f9affcddcf13e9bef9a48b4ba2 (MD5) Previous issue date: 2022 | en |
| dc.description.tableofcontents | Verification Letter from the Oral Examination Committee i
Acknowledgements iii 摘要 v Abstract vii Contents ix List of Figures xiii Denotation xvii Chapter 1 Introduction 1.1 Multipixel receiver for radio telescope . . . . . . . . . . . . . . . . . 1 1.2 Unit module of a compact multipixel receiver . . . . . . . . . . . . . 3 1.3 Early studies on multipixel receiver . . . . . . . . . . . . . . . . . . 4 1.4 Chip-type LO distributor . . . . . . . . . . . . . . . . . . . . . . . . 6 1.5 The structure of this thesis . . . . . . . . . . . . . . . . . . . . . . . 7 Chapter 2 Design and Simulation 2.1 Electromagnetic simulator, HFSS® . . . . . . . . . . . . . . . . . . 9 2.2 Transmission line . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 2.2.1 Type of transmission line . . . . . . . . . . . . . . . . . . . . . . . 10 2.2.2 Normal CPW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.2.3 Membrane CPW . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 2.3 Power divider . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 2.4 On-chip probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 2.4.1 Waveguide and backshort . . . . . . . . . . . . . . . . . . . . . . . 20 2.4.2 Probe on the membrane structure . . . . . . . . . . . . . . . . . . . 21 2.4.3 Impedance matching between normal CPW and mCPW . . . . . . . 22 2.4.4 On-chip probe performance . . . . . . . . . . . . . . . . . . . . . . 24 2.5 Trail chips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 2.5.1 Arrangement of trail chips . . . . . . . . . . . . . . . . . . . . . . 25 2.5.2 Mask design layout . . . . . . . . . . . . . . . . . . . . . . . . . . 27 2.5.3 Simulated performance of chips . . . . . . . . . . . . . . . . . . . 30 Chapter 3 Fabrication Process 3.1 Flow chart of device fabrication process . . . . . . . . . . . . . . . . 33 3.2 Wet Si etching-membrane process . . . . . . . . . . . . . . . . . . . 36 3.3 Nb stress issue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 Chapter 4 Housing Block 4.1 Design of housing block . . . . . . . . . . . . . . . . . . . . . . . . 47 4.2 Membrane damage issue . . . . . . . . . . . . . . . . . . . . . . . . 49 Chapter 5 Measurement Results 5.1 Measurement setup . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 5.1.1 Cryogenic system . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 5.1.2 RF system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55 5.2 Measured result of normal 1-to-1 chip . . . . . . . . . . . . . . . . . 57 5.2.1 Measured result . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57 5.2.2 Modified result with assumption . . . . . . . . . . . . . . . . . . . 61 Chapter 6 Conclusions and Future works 6.1 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63 6.2 Future works . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 References Appendix A — Simulation about directional coupler of CPW 71 Appendix B — Data sheet of the whole process 73 Appendix C — Record of each process run 79 Appendix D — Engineering drawing of wet etching holder 81 Appendix E — Engineering drawing of housing block 83 | - |
| dc.language.iso | zh_TW | - |
| dc.subject | 接收機 | zh_TW |
| dc.subject | 電波望遠鏡 | zh_TW |
| dc.subject | SiNx/Si薄膜技術 | zh_TW |
| dc.subject | 本地振盪源 | zh_TW |
| dc.subject | 共面波導 | zh_TW |
| dc.subject | Local oscillator | en |
| dc.subject | SiNx/Si membrane technology | en |
| dc.subject | Receiver | en |
| dc.subject | Radio telescope | en |
| dc.subject | Coplanar Waveguide | en |
| dc.title | 利用SiNx/Si薄膜結構發展在次毫米波段接收機的本地振盪源分流器 | zh_TW |
| dc.title | Power Distributor of Local Oscillator for sub-mm Wave Receiver Based on SiNx/Si Membrane Technology | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 110-2 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.author-orcid | 0000-0001-9403-8445 | |
| dc.contributor.advisor-orcid | 朱有花(0000-0003-3667-574X) | |
| dc.contributor.coadvisor | 王明杰 | zh_TW |
| dc.contributor.coadvisor | Ming-Jye Wang | en |
| dc.contributor.coadvisor-orcid | 王明杰(0000-0001-9263-8295) | |
| dc.contributor.oralexamcommittee | 鄭宇翔;張鴻埜 | zh_TW |
| dc.contributor.oralexamcommittee | Yu-Hsiang Cheng;Hong-Yeh Chang | en |
| dc.contributor.oralexamcommittee-orcid | 鄭宇翔(0000-0001-9202-3338),張鴻埜(0000-0003-4598-9097) | |
| dc.subject.keyword | 電波望遠鏡,接收機,本地振盪源,共面波導,SiNx/Si薄膜技術, | zh_TW |
| dc.subject.keyword | Radio telescope,Receiver,Local oscillator,Coplanar Waveguide,SiNx/Si membrane technology, | en |
| dc.relation.page | 83 | - |
| dc.identifier.doi | 10.6342/NTU202203206 | - |
| dc.rights.note | 同意授權(限校園內公開) | - |
| dc.date.accepted | 2022-09-12 | - |
| dc.contributor.author-college | 理學院 | - |
| dc.contributor.author-dept | 天文物理研究所 | - |
| dc.date.embargo-lift | 2022-09-14 | - |
| 顯示於系所單位： | 天文物理研究所 | |
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