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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 廖先順(Hsien-Shun Liao) | |
dc.contributor.author | Shih-Han Cheng | en |
dc.contributor.author | 鄭詩翰 | zh_TW |
dc.date.accessioned | 2021-05-20T00:54:20Z | - |
dc.date.available | 2022-07-29 | |
dc.date.available | 2021-05-20T00:54:20Z | - |
dc.date.copyright | 2020-08-04 | |
dc.date.issued | 2020 | |
dc.date.submitted | 2020-07-29 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/8432 | - |
dc.description.abstract | 光學輪廓儀為一種非接觸式量測儀器,可以用來量測樣品的表面輪廓、反射率以及粗糙度等資訊,目前已經被廣泛應用於電子電機、半導體製程、生醫工程以及微機電元件等各種領域。相較於接觸式表面輪廓儀,光學輪廓儀有著量測速度快、不會傷害到樣品表面、不需要探針耗材等優點。然而目前許多致力於光學輪廓儀之研究,主要用於量測待測樣品之表面資訊,沒有辦法得到樣品之內部資訊。為了得到薄膜樣品之上下表面資訊,本論文利用商用DVD讀取頭以及自製之共振掃描器設計一像散式光學輪廓儀,透過此像散式光學輪廓儀對半透明薄膜樣品進行掃描量測,除了有著相較於過去像散式光學輪廓儀更快的Z軸掃描速度,同時也可以透過像散式原理得到薄膜上下表面之聚焦誤差訊號(Focus error signal),進而透過分析計算求得薄膜厚度。論文最後透過商用雷射共焦顯微鏡校正,本論文建構之像散式光學輪廓儀系統可以有效量測約10 μm至40 μm之薄膜厚度。 | zh_TW |
dc.description.abstract | Optical profilometer is a non-contact measuring instrument for measuring the sample surface profile, reflectivity and roughness information, which has been widely used in electronics, semiconductor manufacturing processes, biomedical engineering, and MEMS. Comparing with the contact profilometer, the optical profilometer has the advantages of fast scanning, sample protection, and no need for stylus. Currently, most studies on optical profilometer mainly focus on the surface information of the samples, and the sub-surface information of the sample is not available. To overcome this limitation, an astigmatic optical profilometer equipped a commercial DVD pick up head and a homemade resonant scanner was developed. Comparing with the previous astigmatic optical profilometer, the proposed system can achieve a faster Z-axis scanning speed and obtain the focus error signal on upper and lower surfaces of the semi-transparent thin film through astigmatic principle. Moreover, an analysis method was proposed to calculate the thin film thickness. The experimental result was verified by a commercial laser confocal microscope. The astigmatic optical profilometer constructed in this thesis can effectively measure the thin film with a thickness from 10 μm to 40 μm. | en |
dc.description.provenance | Made available in DSpace on 2021-05-20T00:54:20Z (GMT). No. of bitstreams: 1 U0001-1807202013484200.pdf: 5706893 bytes, checksum: 82baff93f465da988e98edb9f16aa590 (MD5) Previous issue date: 2020 | en |
dc.description.tableofcontents | 論文審定書 I 誌謝 II 摘要 III Abstract IV 圖目錄 VIII 表目錄 XII 符號表 XIII 第一章 緒論 1 1.1研究背景 1 1.2文獻回顧 2 1.2.1薄膜膜厚量測方法 2 1.2.2像散式光學輪廓儀之發展 8 1.2.3撓性機構介紹 16 1.3研究目的 18 1.4內容簡介 18 第二章 像散式薄膜量測原理之探討 19 2.1像散光學原理 19 2.2量測模式原理 21 2.2.1固定高度掃描模式 21 2.2.2 Z軸調變模式 25 2.2.3共振掃描器弦波運動資料校正方法 27 第三章 像散式光學輪廓儀系統架構 31 3.1輪廓儀系統架構與量測元件 31 3.1.1共振式撓性結構 33 3.1.2像散式讀取頭結構 36 3.1.3薄膜載台 36 3.1.4 XYZ微調平台與Z-stage 37 3.1.5控制系統 39 3.1.6壓電掃描器 掃描器控制器 39 3.1.7高壓放大器 41 3.1.8自製放大器 41 3.1.9客製化放大器 42 3.2薄膜量測操作流程 43 3.2.1固定高度模式 43 3.2.2 Z軸調變模式 44 3.3實驗資料分析流程 46 3.3.1薄膜厚度計算 46 3.3.2耦合厚度計算 52 第四章 像散式光學輪廓儀之測試與分析 61 4.1厚度40 μm之薄膜量測分析 62 4.1.1 40 μm薄膜表面影像量測 62 4.1.2 40 μm薄膜厚度及反射率量測 63 4.1.4 40 μm薄膜三維影像 65 4.2 厚度30 μm之薄膜量測分析 67 4.2.1 30 μm薄膜表面影像量測 67 4.2.2 30 μm薄膜厚度及反射率量測 68 4.2.4 30 μm薄膜三維影像 70 4.3 厚度15 μm之薄膜量測分析 72 4.3.1 15 μm薄膜表面影像量測 72 4.3.2 15 μm薄膜厚度量測 72 4.4薄膜膜厚校正與整理 77 4.4.1實驗與校正結果整理 78 第五章 結論與未來展望 80 參考文獻 81 附錄A 壓電掃描器規格表 83 | |
dc.language.iso | zh-TW | |
dc.title | 基於像散式光學之膜厚量測方法之開發 | zh_TW |
dc.title | Development of Film Thickness Measurement Method based on Astigmatic Optics | en |
dc.type | Thesis | |
dc.date.schoolyear | 108-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 楊志文(Chih-Wen Yang),高豐生(Feng-Sheng Kao) | |
dc.subject.keyword | 光學輪廓儀,DVD讀取頭,像散,薄膜,厚度量測,共振, | zh_TW |
dc.subject.keyword | optical profilimeter,DVD pick up head,astigmitism,thin film,thickness measurement,resonancce, | en |
dc.relation.page | 83 | |
dc.identifier.doi | 10.6342/NTU202001619 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2020-07-29 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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