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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 李尉彰(Wei-Chang Li) | |
| dc.contributor.author | Shih-Yuan Liu | en |
| dc.contributor.author | 劉士元 | zh_TW |
| dc.date.accessioned | 2022-11-25T03:04:18Z | - |
| dc.date.available | 2026-08-20 | |
| dc.date.copyright | 2021-11-11 | |
| dc.date.issued | 2021 | |
| dc.date.submitted | 2021-08-23 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/81818 | - |
| dc.description.abstract | 隨著微機電慣性感測器已深入各領域中，其商用之產品，如：陀螺儀(Gyroscope)、加速度計(Accelerometer)等等商品充斥於整體市場，但深入其設計方法不難發現，由於此類裝置之幾何複雜性，多數這類慣性感測器，在設計階段皆仰賴於有限元素法；其根本原因即為因為其繁雜之取捨關係(Trade-off)，導致任何一點的幾何參數調整，都可能起到牽一髮動全身之效果，往往在無提前設想的情形下，調整設計只造成更大的混沌；因此多透過有限元素法來反覆驗證與試驗結果，便是設計方法之大宗；但其耗時耗費不茲，且當有新的設計需要調整時，往往就需要更多嘗試，對於設計者來說，也不夠直觀使用，彷彿只是將參數丟入黑盒子內便能得到答案，難針對特定目標優化。故本研究希望透過輪廓圖(Contour plots)方法來改善此一問題，其架構為首先了解該裝置之問題定義 (幾何參數、製程限制、規格等等)，再透過其相關之物理方程式，從物理的角度上，細分拆解這些參數，並同時利用數值計算，將大量的設計點位透過數學軟體計算，得出每種組合之解，再透過物理之特性，將其結果依據變數劃分。便能得到特定物理量對幾何參數之輪廓圖，利用輪廓圖清晰，趨勢明顯，可多重疊加之特性，協助設計者找出符合目標之設計。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2022-11-25T03:04:18Z (GMT). No. of bitstreams: 1 U0001-2907202121085800.pdf: 9117631 bytes, checksum: 579ef630230816f10795e6954f3f17de (MD5) Previous issue date: 2021 | en |
| dc.description.tableofcontents | 口試委員審定書 i 致謝 iii 中文摘要 iv Abstract v 目錄 vi 圖目錄 ix 表目錄 xiii 第一章 前言 1 1-1 研究背景 1 1-2 文獻回顧 3 1-2-1 利用響應曲面法優化之微機電結構 3 1-2-2 數值模擬與解析解之比較研究 6 1-3 研究動機 10 1-4 論文架構 12 第二章 設計流程 13 2-1 輪廓圖之介紹與工作原理 13 2-2 設計優化流程之介紹與說明 14 2-2-1 問題定義 14 2-2-2 物理方程式 15 2-2-3 輪廓圖產生與MATLAB計算程式 15 2-2-4 選擇設計點 16 2-2-5 有限元素法與測試驗證 16 第三章 慣性感測器製程與材料 18 3-1 製程介紹 18 3-1-1 封裝內之壓力量測 20 3-2 非等向性材料與單晶矽特性 22 3-2-1 非等向性材料 22 3-2-2 單晶矽晶圓之方向與設計利用 23 第四章 三軸加速度計之優化設計 26 4-1-1 電容式加速度計簡介與設計兩難困境 26 4-2 加速度計之現有問題與優化目標 28 4-2-1 靜態偏移 28 4-2-2 機械靈敏度與改善靜態偏移之關係 29 4-3 加速度計之問題定義與物理方程式 30 4-4 加速計之輪廓圖判讀與選擇 42 4-5 有限元素法驗證與量測結果 48 第五章 單軸陀螺儀之輔助設計 56 5-1 微機電陀螺儀感測器介紹 56 5-1-1 陀螺儀感測原理與科氏力 56 5-1-2 微機電陀螺儀感測之基礎結構 57 5-1-3 模態耦合與分離 58 5-2 單軸陀螺儀設計之目標規格 60 5-3 單軸陀螺儀之問題定義與物理方程式 63 5-4 陀螺儀設計之輪廓圖判讀與選擇 70 5-5 陀螺儀設計之有限元素法驗證與量測 75 第六章 結論與未來展望 88 6-1 結論 88 6-2 未來展望 88 第七章 參考文獻 89 第八章 附錄 93 | |
| dc.language.iso | zh-TW | |
| dc.subject | 陀螺儀 | zh_TW |
| dc.subject | 設計方法 | zh_TW |
| dc.subject | 加速度計 | zh_TW |
| dc.subject | 微機電慣性感測器 | zh_TW |
| dc.subject | 最佳化 | zh_TW |
| dc.subject | 輪廓圖 | zh_TW |
| dc.subject | Design methodology | en |
| dc.subject | Contour plots | en |
| dc.subject | MEMS Inertial sensor | en |
| dc.subject | Accelerometer | en |
| dc.subject | Gyroscope | en |
| dc.subject | Optimization | en |
| dc.title | 基於輪廓圖方法之微機電慣性感測器最佳化設計 | zh_TW |
| dc.title | Contour-Plot Methodology for MEMS Inertial Sensor Design Optimization | en |
| dc.date.schoolyear | 109-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 張培仁(Hsin-Tsai Liu),胡毓忠(Chih-Yang Tseng),蔡燿全 | |
| dc.subject.keyword | 輪廓圖,微機電慣性感測器,加速度計,陀螺儀,設計方法,最佳化, | zh_TW |
| dc.subject.keyword | Contour plots,MEMS Inertial sensor,Accelerometer,Gyroscope,Design methodology,Optimization, | en |
| dc.relation.page | 95 | |
| dc.identifier.doi | 10.6342/NTU202101913 | |
| dc.rights.note | 同意授權(全球公開) | |
| dc.date.accepted | 2021-08-23 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| dc.date.embargo-lift | 2026-08-20 | - |
| 顯示於系所單位： | 應用力學研究所 | |
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| U0001-2907202121085800.pdf 此日期後於網路公開 2026-08-20 | 8.9 MB | Adobe PDF |
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