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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/81733完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 呂宥蓉(Yu-Jung Lu) | |
| dc.contributor.author | Jing-Wei Yang | en |
| dc.contributor.author | 楊景崴 | zh_TW |
| dc.date.accessioned | 2022-11-24T09:26:26Z | - |
| dc.date.available | 2022-11-24T09:26:26Z | - |
| dc.date.copyright | 2022-01-17 | |
| dc.date.issued | 2021 | |
| dc.date.submitted | 2021-10-29 | |
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(32) 喬宗毅. 過渡金屬氮化物薄膜的電漿子特性研究. 國立臺灣大學, 2020. (33) Dhakal, P.; Ciovati, G.; Pudasaini, U.; Chetri, S.; Balachandran, S.; Lee, P. J. Surface characterization of nitrogen-doped high purity niobium coupons compared with superconducting rf cavity performance. Physical Review Accelerators and Beams 2019, 22 (12), 122002. (34) Jouve, G.; Sévérac, C.; Cantacuzène, S. M. XPS study of NbN and (NbTi)N superconducting coatings. Elsevier 1996, 287. (35) Yang, Z.; Lu, X.; Tan, W.; Zhao, J.; Yang, D.; Yang, Y.; He, Y.; Zhou, K. XPS studies of nitrogen doping niobium used for accelerator applications. Applied Surface Science 2018, 439, 1119-1126. (36) Ermolieff, A.; Girard, M.; C.Raoul; Bertrand, C.; Duc, T. An XPS Comparative Study on Thermal Oxide Barrier. Applications of Surface Science 1985, 21, 65-79. (37) Shy, Y. M.; Toth, L. E.; Somasundaram, R. Superconducting properties, electrical resistivities, and structure of NbN thin films. Journal of Applied Physics 1973, 44 (12), 5539-5545. 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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/81733 | - |
| dc.description.abstract | 超導光偵測器由於有極低的暗計數及極短的時間抖動，因此擁有卓越的偵測表現。然而大多數文獻探討的偵測器僅在優化近紅外光波段，可見光的研究鮮少被研究。另一方面，超導奈米線單光子偵測器由於具有高於微米線的內秉偵測效率，在過去十年已被廣泛研究，但考量到低動感與光纖耦合率高等特性，微米線亦有發展的必要。 在本論文中，我們利用超高真空射頻磁控濺鍍機，並在800 ºC 的基板溫度下成長出以氧化鎂為基板的氮化鈮薄膜，其具有高品質的晶相。此外，我們發現由於在濺鍍過程中，氮化鈮薄膜超導性會受到氬氮氣流比、靶材種類、射頻功率、成長溫度以及成長基板影響，藉由調整以上參數，我們優化氮化鈮的金屬性及超導性(相變溫度達到15.5 K)。我們利用橢圓偏光儀、X射線光電子光譜、原子力顯微鏡、穿透式電子顯微鏡、X射線干涉圖形以及超導量子干涉元件來測定氮化鈮薄膜的品質。 為了增加光偵測力，我們在氮化鈮微米線上加上5奈米的氧化鋁及銀的奈米立方共振器形成隙電漿子，其共振波段設定在可見光區域，超導態在可見光入射下，將因為被局域強場的破壞，而提高光偵測力。此外我們利用時域有限差分計算奈米立方的場分布，並發現為入射光波長532奈米時，邊長40奈米、厚度30 奈米的銀顆粒在邊緣有很強的電漿共振。因此，藉由增加有隙電漿共振的奈米結構，光子的響應在9 K被推廣至可見光波段，特別在入射光波長為532奈米，其中最小可偵測到的光強為4.4奈瓦特。最後我們將進一步討論其機制及在氮化鈮超導單光子偵測器上應用的潛力，如大偵測面積及偏振無關性等。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2022-11-24T09:26:26Z (GMT). No. of bitstreams: 1 U0001-2810202108343300.pdf: 5639025 bytes, checksum: a86dc10f906daad66968bd4836b54a71 (MD5) Previous issue date: 2021 | en |
| dc.description.tableofcontents | "口試委員審定書 I 中文摘要 III Abstract IV Contents VI List of Figures VIII List of Tables XI Chapter 1. Introduction 1 1.1 Literature Review and Motivation 1 1.2 Introduction to the Superconductors 4 1.2.1 Phase Transition at Critical Temperature, Tc 4 1.2.2 Perfect Diamagnetism ─ Meissner effect 6 1.2.3 London Equation and London Penetration Depth, λ_L 7 1.2.4 Ginzburg-Landau theory and GL Coherence Length, ξ_GL 10 1.2.5 Bardeen-Cooper-Schrieffer Theory and Energy Gap, 'Δ' 13 1.3 Introduction to Superconducting Photon Detectors 16 1.3.1 Detection Efficiency 16 1.3.2 Dark Count Rate 18 1.3.3 Time Jitter 18 1.3.4 Recovery Time 20 1.3.5 Photodetection Mechanism of the SPDs 21 1.4 Classical Theory of Light-Matter Interaction 24 1.4.1 Free Electrons and Drude Model 24 1.4.2 Bounded Electrons and Lorentz Model 28 1.4.3 Complex Dielectric Function 30 1.4.4 Surface Plasmon 31 1.4.5 Gap Plasmon Mode 33 Chapter 2. NbN Samples Preparation and Material Analysis 37 2.1 Physical Vapor Deposition ─ Magnetron Sputter 37 2.2 Optical Properties and Ellipsometer 40 2.2.1 RF Sputtering Power Dependency 45 2.2.2 Substrates Dependency 47 2.2.3 Argon/Nitrogen Ratio Dependency 48 2.3 Atomic Content and X-ray Photoelectron Spectroscopy 49 2.4 Surface Roughness and Atomic Force Microscope 52 2.5 Crystal structure 54 2.5.1 Transmission Electron Microscopy and Selected Area Diffraction 54 2.5.2 X-ray Diffractometer 57 2.6 Superconductivity and Superconducting Quantum Interference Device 58 Chapter 3. Gap Plasmon Enhanced NbN Superconducting Photodetector 59 3.1 Fabrication of the Device 59 3.2 Low Temperature Ohm Measurement 64 3.2.1 Wavelength Dependency 65 3.2.3 Width of Strip Dependency 67 3.2.4 Polarization Independency 68 3.3 Numerical Simulation 69 Chapter 4. Conclusion and Future Prospects 72 References 73 " | |
| dc.language.iso | en | |
| dc.subject | 可見光偵測 | zh_TW |
| dc.subject | 超導性氮化鈮薄膜 | zh_TW |
| dc.subject | 超導微米線光子偵測器 | zh_TW |
| dc.subject | 奈米製程 | zh_TW |
| dc.subject | 隙電漿子 | zh_TW |
| dc.subject | uperconducting NbN thin films | en |
| dc.subject | detection in visible range | en |
| dc.subject | gap plasmon | en |
| dc.subject | nanofabrication | en |
| dc.subject | superconducting microstrip photon detectors | en |
| dc.title | 隙電漿子增強之氮化鈮超導光子偵測器的開發與應用 | zh_TW |
| dc.title | Development of Gap-Plasmon-Enhanced NbN Superconducting Photodetectors and Its Applications | en |
| dc.date.schoolyear | 110-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.author-orcid | 0000-0002-3063-4085 | |
| dc.contributor.oralexamcommittee | 梁啟德(Hsin-Tsai Liu),王立民(Chih-Yang Tseng),張亞中,褚志崧 | |
| dc.subject.keyword | 超導性氮化鈮薄膜,超導微米線光子偵測器,奈米製程,隙電漿子,可見光偵測, | zh_TW |
| dc.subject.keyword | uperconducting NbN thin films,superconducting microstrip photon detectors,nanofabrication,gap plasmon,detection in visible range, | en |
| dc.relation.page | 75 | |
| dc.identifier.doi | 10.6342/NTU202104393 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2021-10-31 | |
| dc.contributor.author-college | 理學院 | zh_TW |
| dc.contributor.author-dept | 應用物理研究所 | zh_TW |
| 顯示於系所單位： | 應用物理研究所 | |
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