請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/80265完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 曾雪峰(Snow H. Tseng) | |
| dc.contributor.author | Szu-Yung Huang | en |
| dc.contributor.author | 黃思詠 | zh_TW |
| dc.date.accessioned | 2022-11-24T03:03:30Z | - |
| dc.date.available | 2021-08-04 | |
| dc.date.available | 2022-11-24T03:03:30Z | - |
| dc.date.copyright | 2021-08-04 | |
| dc.date.issued | 2021 | |
| dc.date.submitted | 2021-07-10 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/80265 | - |
| dc.description.abstract | 在本篇論文中，我們將以低成本的奈米製程技術來製作覆蓋大面積的複雜奈米結構。首先，我們透過奈米球鏡微影術(NLL)於光阻層上製作出週期性的奈米孔洞陣列，再以孔洞遮罩微影術的概念，將此層作為之後蒸鍍金屬的遮罩。藉由我們提出的幾項關鍵製程技術，例如水平與垂直旋轉控制的斜向蒸鍍金屬、光阻厚度的控制等等，以更精準的旋轉角度與傾角的控制製作出精細的二維和三維奈米結構。最後，我們成功做出單體間隔小至20奈米的多聚體結構、垂直型態的二聚體結構以及倒立U型環。我們還進行了各種光學特性和理論的模擬以了解製作出的奈米結構特性，並和實驗量測結果相互驗證。我們相信這些改進的奈米製程技術在未來可以作為一種更有效的方式應用在超穎材料和其他可能的應用中。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2022-11-24T03:03:30Z (GMT). No. of bitstreams: 1 U0001-0307202123593500.pdf: 22354551 bytes, checksum: 7b44aa41f8c085b3db2e207291b4569c (MD5) Previous issue date: 2021 | en |
| dc.description.tableofcontents | "目錄 口試委員會審定書 # 誌謝 I 中文摘要 II ABSTRACT III 目錄 IV 圖目錄 VII CHAPTER 1 序論 1 1.1 研究動機與本文內容 1 1.2 奈米球排列與製程應用 2 1.2.1 奈米球自組裝排列現象 2 1.2.2 奈米球自組裝排列裝置 3 1.2.3 奈米球鏡微影術(Nanospherical-Lens Lithography, NLL) 4 1.3 奈米結構的表面電漿共振 8 1.3.1 表面電漿共振 (Surface Plasmon Resonance, SPR) 8 1.3.2 侷域性表面電漿共振 (Localized Surface Plasmon Resonance, LSPR) 9 CHAPTER 2 研究背景與實驗儀器 12 2.1 法諾共振 (Fano Resonance) 12 2.2 奈米天線與U型結構 16 2.3 製程儀器 19 2.3.1 奈米球排列裝置 19 2.3.2 汞氙燈曝光系統 20 2.3.3 手持式紫外燈 20 2.3.4 高真空薄膜鍍膜系統 21 2.3.5 電漿蝕刻系統 22 2.4 量測與分析儀器 23 2.4.1 場發射掃描式電子顯微鏡 23 2.4.2 分光光譜儀 24 CHAPTER 3 模擬方法與實驗架構 26 3.1 模擬方法-有限元素分析法(FEM) 26 3.1.1 有限元素分析法 26 3.1.2 有限元素分析法的運算過程 26 3.1.3 有限元素分析法軟體COMSOL 27 3.2 模擬模型建構 28 3.3 金屬材料-杜魯德模型(Drude Model) 29 3.4 基板製作-奈米孔洞陣列 30 3.5 奈米陣列結構的設計與製作 32 3.5.1 水平控制旋轉載台 33 3.5.2 氧化物的縮洞 34 3.5.3 垂直控制旋轉載台 35 CHAPTER 4 結構製作結果與分析 37 4.1 水平旋轉蒸鍍奈米結構 37 4.1.1 多聚體(Oligomers) 37 4.1.2 七聚體(Heptamer)與六聚體(Hexamer)的模擬結果 38 4.1.3 七聚體(Heptamer)的法諾共振 41 4.1.4 七聚體結構與其應用 44 4.2 垂直型態奈米結構 45 4.2.1 垂直對準(Vertically aligned)的金屬二聚體 45 4.2.2 垂直倒立U型環 49 4.3 其他二氧化矽延伸結構 54 CHAPTER 5 結論與未來展望 58 5.1 結論 58 5.2 未來展望 59 REFERENCE 60 " | |
| dc.language.iso | zh-TW | |
| dc.subject | 奈米球鏡微影術 | zh_TW |
| dc.subject | 多聚體 | zh_TW |
| dc.subject | 法諾共振現象 | zh_TW |
| dc.subject | 奈米光學天線 | zh_TW |
| dc.subject | U 型環 | zh_TW |
| dc.subject | Nanoantenna | en |
| dc.subject | Oligomers | en |
| dc.subject | Nanospherical-lens lithography | en |
| dc.subject | U-ring | en |
| dc.subject | Fano resonance | en |
| dc.title | 利用奈米球鏡微影術製作垂直型態奈米光學天線之研究 | zh_TW |
| dc.title | Fabrication of Vertically Aligned Optical Nanoantenna using Nanospherical-Lens Lithography | en |
| dc.date.schoolyear | 109-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.coadvisor | 張允崇(Yun-Chorng Chang) | |
| dc.contributor.oralexamcommittee | 蕭惠心(Hsin-Tsai Liu),張世慧(Chih-Yang Tseng) | |
| dc.subject.keyword | 多聚體,法諾共振現象,奈米光學天線,U 型環,奈米球鏡微影術, | zh_TW |
| dc.subject.keyword | Oligomers,Fano resonance,Nanoantenna,U-ring,Nanospherical-lens lithography, | en |
| dc.relation.page | 64 | |
| dc.identifier.doi | 10.6342/NTU202101257 | |
| dc.rights.note | 同意授權(限校園內公開) | |
| dc.date.accepted | 2021-07-12 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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