常壓噴射電漿改質氧化鎳應用於p-i-n鈣鈦礦太陽能電池

Abstract

本研究透過掃描噴射式大氣電漿(atmospheric pressure plasma jet, APPJ)對氧化鎳(NiO)薄膜進行後處理，應用於倒置結構(Inverted structure) p-i-n鈣鈦礦太陽能電池(PSC)之製程中，而此氧化鎳薄膜為其中之電洞傳輸層。氧化鎳以醋酸鎳作為前驅物，並使用溶膠凝膠法完成製備；而掃描噴射式大氣電漿處理之峰值溫度為500℃，噴射氣體為氮氣。在掃描噴射式大氣電漿處理後增加了摻雜氟之氧化錫透明導電玻璃(FTO)上氧化鎳的霧度，進而導致鈣鈦礦太陽能電池中的光散射增強，提高光電轉換效率(PCE)。在氧化鎳上進行掃描噴射式大氣電漿處理還提高了表面潤濕性，以利於後續鈣鈦礦薄膜(CH3NH3PbI3)的沉積。這也導致更好的鈣鈦礦太陽能電池性能。此外，X射線光電子能譜(XPS)中顯示掃描噴射式大氣電漿的處理能減少C-N鍵和的NiAc2的比例，這項結果顯示出液體前驅物更完整的轉化成為氧化鎳。通過三遍APPJ掃描，平均的光電轉換效率可以從11.91％提高到13.47％，而性能最佳的鈣鈦礦太陽能電池達到了15.67％的效率。

In this study, we have fabricated the p-i-n perovskite solar cell by introducing scanning atmospheric-pressure plasma jet (APPJ) process as the post treatment of the NiO film which is used as hole transport layer. APPJ post treatment increases the haze of NiO film which increases the forward light scattering. Also, scanning electron microscopy (SEM), and water contact angle (WCA) measurement confirmed the enhanced wettability of a dense and well crystalized perovskite film. This reduces the trap density of the perovskite layer. X-ray photoelectron spectroscopy (XPS) shows that the C-N bond and NiAc2 decreased as the APPJ scanning time increased, suggesting the better conversion into NiO. Electrochemical impedance spectroscopy (EIS) was also involved to determine the electrical properties. The average power conversion efficiency (PCE) can improve from 11.91% to 13.47% with the champion device achieved 15.67%.