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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 田維誠(Wei-Cheng Tian) | |
dc.contributor.author | Po-Shin Chen | en |
dc.contributor.author | 陳柏欣 | zh_TW |
dc.date.accessioned | 2021-07-11T14:43:44Z | - |
dc.date.available | 2021-10-14 | |
dc.date.copyright | 2016-10-14 | |
dc.date.issued | 2016 | |
dc.date.submitted | 2016-08-10 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78146 | - |
dc.description.abstract | 氣相層析系統為一標準之分析儀器,用以分離及檢測未知的混和氣體。由於其高解析度和高靈敏度,已被廣泛應用於食物檢測、環境監控以及藥物分析。但是,由於其體積過於龐大,無法達到可攜式以及即時檢測之目標;除此之外,過多的功率損耗,也是其缺點之一。因此,如何將其微小化達到可攜式的目標,以及降低系統的功率損耗,為目前重要的課題。
本論文利用微機電(Micro-electromechanical System, MEMS)製程技術開發一微型分離管柱晶片,並使用新穎之無電極鍍金法製備金加熱器於流道內,成功地整合加熱器及微型分離管柱晶片。相較於過去文獻所提出之金屬加熱器製備法,無電極鍍金法優點為不需要經過大型且昂貴的真空機台即可製備金加熱器,不僅具備較低之製備成本,且所製備出之金層可以分布於流道四周,相較於傳統半導體製程只能進行水平面塗佈,具有相當大的優勢。本研究使用之微型分離管柱晶片,結合DB-1靜相後可以成功地於250秒內分離如烷類、苯類等分子量較大之有機氣體。此外,本研究提出一稱為四乙氧基矽烷的多孔性化學結構材料作為靜相,用以分離分子量較低、無法藉由DB-1靜相而分離之混和氣體;以TEOS為靜相之微型分離管柱晶片成功地在300秒內分離4種醇類混和氣體。 本研究成功地提出之無電極電鍍法製備金加熱器不僅可以塗佈於流道四周、除去了過去烘箱的使用,也免除了其他外部加熱器的使用。而整合了此加熱器與微機電系統製作出之微型分離管柱晶片大幅地縮小了氣相層析系統分離步驟所佔據的體積。除此之外,TEOS靜相的使用使得微型分離管柱晶片成功地於2米流道內達成低分子量有機氣體分離並偵測,希望在未來能將此些應用嵌入於微型氣相層析系統中用於如酒測等等之即時量測上。 | zh_TW |
dc.description.abstract | Gas chromatography (GC) is one of the best analytical methods to separate and analyze the unknown gas mixture. Because of the high resolution and sensitivity, a GC system has been widely applied to food processing, environmental monitoring, and medical diagnostic, etc. However, the size of a conventional GC is very large that can’t be carried for the point-of-test applications. Although having a great accuracy, the conventional GC is unable to do point-of-test analysis. In addition, high power consumption is also one of the disadvantages of a conventional GC. Therefore, miniaturizing the size of the GC and lower power consumption are important research topics in recent years.
In this research, a micro-machined separation column (μSC) is fabricated by micro-electromechanical systems (MEMS) technologies. A novel electroless gold deposition method is utilized to fabricate a gold heater on the surface of the μSC channels. Compared to electroplating, this process is very simple and requires no vacuum based equipment, which has the advantages of not only lower cost but also capable of depositing the gold layer on all sides of the channels. With DB-1 stationary phase coated inside the μSC, our column is able to separate selected heavy hydrocarbons, such as alkanes or aromatics hydrocarbons in less than 250 seconds. Moreover, a porous chemical structure material called TEOS is developed as a novel stationary phase for light mixture’s separation, which cannot be achieved by utilizing DB-1 as stationary phase. With a programmed temperature control, μSC with TEOS as stationary phase can separate the alcohols easily in less than 300 seconds. The electroless gold deposition method not only eliminates the requirement of the heating element, but also provides great uniformity of the Au film on all sides of the channels. With the combination of the Au heater and micro-machined column, the size of the separation process is successfully reduced. In addition, the development of the TEOS stationary phase is indeed a breakthrough for light hydrocarbons’ separation with 2-meter μSC. It could apply to point-of-test measurements such as driving under the influence (DUI) detection in the future by integrating this μSC to a portable GC or Micro-GC system. | en |
dc.description.provenance | Made available in DSpace on 2021-07-11T14:43:44Z (GMT). No. of bitstreams: 1 ntu-105-R03943079-1.pdf: 6818941 bytes, checksum: 45ea2a037289944ca23ec19d72d5e880 (MD5) Previous issue date: 2016 | en |
dc.description.tableofcontents | 謝誌 I
中文摘要 II ABSTRACT III 第一章 緒論 1 1.1 研究動機 1 1.2氣相層析系統介紹 2 1.2.1採樣/濃縮 3 1.2.2 層析分離管柱 3 1.2.3 偵測器 5 1.3分離管柱文獻回顧 7 1.3.1 毛細管柱加熱器文獻回顧 7 1.3.2微型分離管柱晶片文獻回顧 9 1.4 靜相分析 13 1.4.1 DB-1 13 1.4.2 四乙氧基矽烷(tetraethyl orthosilicate,TEOS) 14 1.5 論文架構 15 第二章 微型層析晶片設計及製程介紹 16 2.1 以無電極鍍金法製備微流道內金層做為加熱器應用於 16 微型分離管柱晶片 16 2.2 色譜原理 17 2.2.1滯留時間 18 2.2.2 塔版理論 18 2.3微型層析晶片設計 20 2.4微型層析晶片製程流程 22 2.4.1黃光微影製程 23 2.4.2感應耦合電漿離子蝕刻系統(ICP) 23 2.4.3 陽極接合(Anodic Bonding) 25 2.5化學離子鍍金法製程 27 2.5.1流道內表面處理與氧化 28 2.5.2 表面矽烷化處理(Silanization) 30 2.5.3 金種子層(奈米金)之塗佈 31 2.5.4 無電極鍍金 33 2.6流道內靜相塗佈 36 2.6.1 DB-1靜相配置及塗佈 36 2.6.2 TEOS靜相配置及塗佈 38 第三章 實驗藥品耗材、儀器設備及量測流程 39 3.1實驗藥品耗材 39 3.1.1 實驗藥品 39 3.1.2實驗耗材 40 3.2 實驗儀器設備 41 3.3 量測流程介紹 42 3.3.1系統架設介紹 42 3.3.2氣相層析系統運作流程 46 3.3.2軟體架構 48 第四章 實驗結果及數據分析 49 4.1 薄膜金層加熱器效果測試 49 4.1.1鍍金時間與阻抗值的關係 49 4.1.2電壓與溫度關係測試 50 4.1.3 金層之溫度梯度測試 51 4.2 DB-1微型分離管柱晶片氣體分離比較結果 52 4.2.1:DB-1靜相微型分離管柱晶片之分離效果 52 4.2.2:流速與升溫梯度對塗佈DB-1靜相之微型分離管柱晶片分離效果之影響 54 4.3 TEOS微型分離管柱晶片氣體分離比較結果 57 4.3.1 TEOS靜相對各種類氣體分離效果之影響 57 4.3.2:塗佈TEOS之微型層析分離管柱晶片之再現性 62 4.4 TEOS靜相與DB-1靜相分離效果之比較 63 4.4.1 混合氣體之比較 63 4.4.2 對醇類之層析圖譜比較 65 4.4.3 對烷類之層析圖譜比較 66 4.4.4 對低碳數混和氣體之層析圖譜比較 67 第五章 結論與未來展望 69 5.1 結論 69 5.2未來展望 70 參考資料 72 | |
dc.language.iso | zh-TW | |
dc.title | 整合TEOS靜相及無電極電鍍加熱金層之微型分離管柱晶片應用於微型氣相層析系統之研究 | zh_TW |
dc.title | Integration of MEMS-Based Separation Column with Electroless Gold Plated Heater and Novel TEOS Stationary Phase for Micro Gas Chromatography | en |
dc.type | Thesis | |
dc.date.schoolyear | 104-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 沈弘俊,呂家榮 | |
dc.subject.keyword | 無電極電鍍,微型氣相層析系統,分離管柱晶片,加熱器,四乙氧基矽烷, | zh_TW |
dc.subject.keyword | Electroless Gold Deposition,Micro gas chromatography,Separation Column,Heater,Tetraethyl orthosilicate (TEOS), | en |
dc.relation.page | 78 | |
dc.identifier.doi | 10.6342/NTU201601406 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2016-08-10 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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