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標題: | 葉片式可變焦及掃描微型鏡片之研析 Study on Scanning and Variable-Focusing Micromirrors of Fan-Shaped Segments |
作者: | Chao-Ching Ku 古朝境 |
指導教授: | 蔡睿哲(Jui-che Tsai) |
關鍵字: | 微機電系統,微反射鏡,殘留應力,靜電力驅動,變焦,掃描, Micro-electro-mechanical systems (MEMS),Micromirror,Residual stress,Electrostatic actuation,Variable focusing,Scanning, |
出版年 : | 2017 |
學位: | 碩士 |
摘要: | 本研究使用表面微加工技術PolyMUMPs製程,製作可調變及掃描之微凹面鏡,利用葉片式的微鏡面與多段電極的調變,能有效的增加元件在空間中的自由度,達到可變焦與掃描之功能。本文將探討不同結構之元件設計,分別以元件大小、葉片角度及鍍金面積為考量,並加入特殊鏡面截角設計,分析元件翹曲高度,並經由開合式(Gap-closing)靜電驅動,操作微凹面鏡之表面曲率及高度。
經由表面輪廓分析計算500 μm之元件,扇葉角度30度且鍍金面積為3/3的設計有最高的翹曲高度7.88 μm及最長的焦距415.3 μm,為較佳之元件設計。經由元件動態測試,特殊鏡面截角設計能有效的降低其驅動電壓。 In this study, we propose a scanning and variable-focusing micro-concave mirror which is fabricated with the surface-micromachined PolyMUMPs process provided by MEMSCAP Inc. The use of the fan-shaped segments structure and multi-electrode modulation can effectively increase the degree of the freedom of the device in the space to achieve scanning and variable-focusing function. In this thesis, we will discuss the design of devices with different structures, considering the device size, segment angle and gold area, and add the special mirror design to analyze the height of the device warping. Through the gap-closing electrostatic actuator, the surface curvature and height of the micro-concave mirror can be operated. With the surface profile analysis, the 500 μm, 30 degrees segment and 3/3 gold area device is the best design. Its warpage height is 7.88 μm and the focal length is 415.3 μm. By the dynamic testing of the device, special mirror angle design can effectively reduce its driving voltage. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/77697 |
DOI: | 10.6342/NTU201702974 |
全文授權: | 未授權 |
顯示於系所單位: | 光電工程學研究所 |
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ntu-106-R04941025-1.pdf 目前未授權公開取用 | 5.88 MB | Adobe PDF |
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