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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 蔡睿哲(Jui-che Tsai) | |
dc.contributor.author | Cheng-Yen Yu | en |
dc.contributor.author | 游承晏 | zh_TW |
dc.date.accessioned | 2021-07-10T22:05:21Z | - |
dc.date.available | 2021-07-10T22:05:21Z | - |
dc.date.copyright | 2018-08-21 | |
dc.date.issued | 2018 | |
dc.date.submitted | 2018-08-15 | |
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Lee, 'Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever.' Japanese Journal of Applied Physics, Vol. 44, No. 5A, pp. 3180-3186, 2005. [35] Stephen D. Senturia, 'Microsystem Design.' Massachusetts Institute of Technology, 2002. [36] Allen Cowen, Busbee Hardy, Ramaswamy Mahadevan and Steve Wilcenski, 'PolyMUMPs design handbook.', 13 ed.: MEMSCAP Inc. [37] MEMSCAP Inc. PolyMUMPs™ Notes: (copyright Microsoft Research) [Online]. Available:http://www.memscap.com/__data/assets/pdf_file/0013/1732/PolyMUMPsNotes.Microsoft.pdf. [38] MEMSCAP Inc. PolyMUMPs™ General Release Instructions [Online]. Available: http://www.memscap.com/__data/assets/pdf_file/0014/1733/PolyMUMPs.Release.Instructions.pdf. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/77497 | - |
dc.description.abstract | 本研究提出了具有變焦及非對稱式照明功能的微型扇片組凹面鏡,元件製作方面,使用MEMSCAP Inc提供的表面微加工技術PolyMUMPs製程代工服務,再經由後段製程將其釋放完成,驅動元件時,可藉由對電極多段及分區式的控制,使扇片狀鏡面產生相應的形變,達到改變焦距和形成非對稱光強度分布的能力。
在本論文中將會探討不同的元件設計及後段製程處理結果,首先分析不同設計的扇片組在不同熱烘烤溫度下的翹曲情況,接下來利用光學軟體模擬在理想的觀測距離下,不同形狀的電極對於反射光結果的影響,此處我們針對直徑為500 m、由12片鍍金比例100%的扇片所組成的鏡面,設計了四種電極,分別為圓形、半圓形、六片形和十二片形,最後將編號1-3的元件實際施加電壓驅動,並斜向打入綠光雷射,觀察鏡面結構的機械變化和屏幕上反射光的光學變化。 | zh_TW |
dc.description.abstract | In our study, we propose a multiple-sector concave micromirrors which can change the position of focus and has the function of asymmetric illumination. Device is fabricated by MEMSCAP Inc. with the surface-micromachined PolyMUMPS process and released by back-end process. The fan-shaped mirror can generate different deformation to achieve the ability of optical zoom and asymmetric light intensity distribution with multi-stage and multi-section electrode control simultaneously.
This thesis will discuss different device design and back-end process. We investigate the warping of multiple-sector with different temperature of hot baking and use optical simulation to analyze how the different shapes of electrode to affect reflected light at ideal distance. In optical simulation, mirror with the structure of diameter 500 m, twelve sectors and 100% gold area is adopted. The different shapes of electrode are circle, semicircle, six-section and twelve-section. At last we apply the voltage and laser on device to observe the variety of mechanical structure and reflected light. | en |
dc.description.provenance | Made available in DSpace on 2021-07-10T22:05:21Z (GMT). No. of bitstreams: 1 ntu-107-R05941039-1.pdf: 5789159 bytes, checksum: 0d215629de00a0fb9b3a3f74aa4c5a76 (MD5) Previous issue date: 2018 | en |
dc.description.tableofcontents | 致謝 i
中文摘要 iii ABSTRACT iv 目錄 v 圖目錄 viii 表目錄 xi Chapter 1 文獻探討與研究動機 1 1.1 微機電系統簡介 1 1.1A 微光機電面鏡 4 1.1B 可調變式微凹面鏡之驅動與應用 6 1.1B-1 電熱驅動 6 1.1B-2 壓電驅動 6 1.1B-3 靜電驅動 7 1.2 非對稱式照明介紹 9 1.2.1 非對稱式照明之相位成像 9 1.2.2 非對稱式照明之立體內視鏡系統 10 1.3 研究動機 - 結合微機電凹面鏡及非對稱光強度分佈 11 Chapter 2 元件設計與原理 14 2.1 微凹面鏡之設計 14 2.1.1 鏡面結構 14 2.1.2 電極結構 16 2.2 扇片熱應力翹曲 16 2.3 鏡面驅動 17 2.3.1 靜電驅動原理 17 2.3.2 鏡面驅動 19 2.3.3 防護及抗黏著設計 20 2.3.4 特殊設計 21 Chapter 3 元件製程及後段熱處理探討 22 3.1 微凹面鏡之製程 22 3.1.1 PolyMUMPs製程說明 22 3.1.2 凹面鏡製程說明 24 3.1.3 Dimple製程說明 26 3.2 後段製程 27 3.3 後段熱處理探討 28 3.3.1 熱烘烤溫度120 °C之元件分析 28 3.3.2 熱烘烤溫度160 °C之元件分析 32 Chapter 4 光學模擬探討 34 4.1光學模擬之微凹面鏡設計 34 4.1.1 電極設計 34 4.1.2 扇片設計 34 4.2 光學模擬架構 40 4.3 光學模擬結果與分析 41 4.3.1 模式一之模擬結果 41 4.3.2 模式二、三、四之正向入射模擬結果 43 4.3.3 模式二、三、四之斜向入射模擬結果 49 Chapter 5 量測實驗分析 55 5.1 元件量測架構 55 5.2 元件量測流程 56 5.3 元件量測結果 58 Chapter 6 結論與未來工作 62 6.1結論 62 6.2未來工作 63 參考文獻 64 | |
dc.language.iso | zh-TW | |
dc.title | 可調變微形扇片組凹面鏡之研析 | zh_TW |
dc.title | Study of Tunable Multiple-Sector Concave Micromirrors | en |
dc.type | Thesis | |
dc.date.schoolyear | 106-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 孫家偉(Chia-Wei Sun),鍾仁傑(Ren-Jei Chung) | |
dc.subject.keyword | 微光機電系統,微形凹面鏡,熱應力翹曲,調變焦距,非對稱式照明, | zh_TW |
dc.subject.keyword | Micro-Opto-Electro-Mechanical Systems (MOEMS),Concave micromirror,Thermal stress warping,Variable focusing,Asymmetric Illumination, | en |
dc.relation.page | 68 | |
dc.identifier.doi | 10.6342/NTU201803492 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2018-08-16 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
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