以數位光學處理進行3D列印製作微米級結構

Abstract

近幾年3D列印技術發展成熟，以印製微小結構來說，雙光子聚合技術(Two-photon Polymerization, TPP)是目前能達到奈米等級的製造技術，但設備相對來說也較貴；微機電製程技術在微小結構之製作上也已經非常成熟，但由於光罩上的限制，設計結構方面較不方便。本論文主要在研究如何以數位光學處理(Digital Light Processing, DLP)之光固化技術，印製微米級結構，使用商用DLP投影機並將鏡頭改裝，搭配顯微物鏡縮小影像，接著探討在此系統下樹酯之選用及配方調整、曝光時間、切層厚度等等列印參數對於製程上的影響。目標是以較低成本之DLP技術做出既能逼近雙光子聚合技術之微小尺寸，又能快速的印製出較大的微米級結構。利用MATLAB軟體分析及實驗後，設計結構為六角形蜂窩狀，並將結構尺寸縮小，設計尺寸邊長由150μm逐漸縮小至20μm，最後可成功印出實際邊長為23μm之通透結構。最後再對不同尺寸之結構做三點彎曲測試，探討列印時不同參數下對結構之影響。

The technology of 3D Printing has been well-developed in recent years. To print micro-scale structure, the TPP (Two-photon Polymerization) is the only feasible production technology for nanostructure but it requires the most expensive equipments. The micro-electromechanical system for producing micro-scale structure is also a well-defined technique. However, owing to the limitation of Reticle-Mask, it is considerably challenged for structure designing. The main issue of this article is to research on how to use the DLP (Digital Light Processing) Vat Polymerization to print micro-scale structure. The business DLP projector is adopted and its lens has been adjusted to fit the microscope to shrinkage the image. Furthermore, the study discusses the following variables that influence the production procedure, including different DB composition, exposure time and cutting thickness. My study intends to find a cost-efficient DLP technology that simulates the effect of micro-scale structure by using TPP technology and maintains the privilege to print larger micro-scale structure in a higher rate. By using MATLAB software to analyze and experiment, it has been decided to use the hex honeycomb structure model and gradually reduce the size of the structure from 150μm to 20μm. The edge length of 23μm is successfully printed to be a penetrable structure. Finally, 3-point bending test is used to compare the influences of different parameters.