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標題: | 靜電驅動微型葉片式可形變鏡之設計及特性量測 Design and Characterization of Electrostatically-Actuated Radially-Segmented Deformable Micromirror |
作者: | Cheng-You Yao 姚承佑 |
指導教授: | 蔡睿哲 |
關鍵字: | 微機電系統,微反射鏡,殘留應力,靜電力驅動,變焦,掃描, micro-electro-mechanical systems (MEMS),micromirror,residual stress,electrostatic actuation,scanning,variable focusing, |
出版年 : | 2016 |
學位: | 碩士 |
摘要: | 本研究以微機電技術中的表面微加工技術「PolyMUMPs」製程,製作微型葉片式可形變鏡(Radially-Segmented Deformable Micromirror),利用靜電力微調元件表面。目標是,達到調焦及掃描之功能,以用於建構微型反射式光學系統,減少色散像差,並藉微調元件表面,使其近似拋物面的某片段,以解決普通凹面鏡斜向入射時產生的散光像差。
未來,此元件可應用於生醫相關之無創光學檢測探頭中,以取代傳統探頭中的透鏡與掃描鏡,縮小探頭體積。 初步實驗結果,利用殘留應力成形的葉片式可形變鏡,未調變時具有最小焦距約1.4 mm。實驗中,除了能同時驅動所有葉片,也可分別控制特定區域的葉片曲率。 In this study, we propose a radially-segmented deformable micromirror fabricated with a surface-micromachining process, the PolyMUMPs process, which is provided by MEMSCAP Inc. The electrostatic force is used to change the surface curvature. Our goal is to achieve scanning and variable focusing. This device has the potential to be incorporated into a reflective optical microsystem in order to reduce the chromatic aberration. Our goal also includes finely adjusting the mirror surface to form a portion of a paraboloid to decrease the astigmatism which is commonly observed under oblique incidence on an ordinary concave mirror. In the future, this device can be used in a non-invasive optical probe for biomedical applications, replacing the lens and scanning mirror in a traditional probe to reduce the probe size. According to our experimental results, the micromirror with residual-stress-induced initial curvature has the minimum focal length 1.4 mm at 0 V. Not only can all the segments be driven simultaneously, but the curvature of the segment along a certain area can also be changed individually. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/76642 |
DOI: | 10.6342/NTU201603767 |
全文授權: | 未授權 |
顯示於系所單位: | 光電工程學研究所 |
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