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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 溫政彥(Cheng-Yen Wen) | |
dc.contributor.author | I-Ta Wang | en |
dc.contributor.author | 汪奕達 | zh_TW |
dc.date.accessioned | 2021-06-17T08:26:29Z | - |
dc.date.available | 2019-08-28 | |
dc.date.copyright | 2019-08-28 | |
dc.date.issued | 2019 | |
dc.date.submitted | 2019-08-12 | |
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Nanotechnol. 21, 065711 (2010) | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/74254 | - |
dc.description.abstract | 石墨烯是近年來炙手可熱的二維材料,擁有良好的性質之外,更被大量應用在不同的領域中,然而不同層數和不同堆疊型態的石墨烯薄膜有不同的物理化學性質,適合使用的地方也不盡相同,因此判斷石墨烯薄膜的層數和堆疊方式就成為重要研究主題,一般方便且非破壞性的量測工具為拉曼光譜儀,藉由特徵峰的峰值對比可以快速得到石墨烯層數的訊息。在本論文中,藉由實驗室使用化學氣相沉積法成長得到的石墨烯薄膜進行分析發現了拉曼光譜儀與穿透式電子顯微鏡橫截面分析產生不一致的現象,利用掃描式電子顯微鏡、拉曼光譜儀、穿透式電子顯微鏡橫截面影像以及平面視角的穿透式電子顯微鏡繞射分析,證明本實驗室所製備的石墨烯薄膜,與之前文獻觀察得到的堆疊型態有所不同,且層數的判斷也需更多實驗佐證,其分析方法展示了二維奈米薄膜材料仍有許多值得研究的空間。 | zh_TW |
dc.description.abstract | Graphene is a popular two-dimensional material which owns a lot of great properties, hence, it has been applied in many areas, such as integrated circuits, bio-sensor, solar cell, and so on. Owing to its great versatile application, it is important to determine the number of layers and the stacking form of graphene. With different number of layers and stacking forms, graphene can present variety properties. Usually, Raman spectroscopy is one of the most important and convenient instrument to determine the number of layers of graphene. In the thesis, we found that some inconsistency between the result of Raman spectroscopy and the cross-sectional Transmission Electron Microscope (TEM) images. Therefore, with the chemical-vapor-deposition (CVD) growth graphene, we use scanning electron microscope (SEM), Raman spectroscopy, cross-sectional TEM images and plan-view TEM diffraction intensity analysis to determine the real number of layers and the stacking form of graphene. It turns out that the stacking form of graphene is different from the expected results, and the number of layers of graphene cannot be judged easily by Raman spectroscopy. Further analysis is required to understand the microstructure of this two-dimensional material. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T08:26:29Z (GMT). No. of bitstreams: 1 ntu-108-R06527001-1.pdf: 5006566 bytes, checksum: 44a3c733feed67ad2a7767c60df1d2ef (MD5) Previous issue date: 2019 | en |
dc.description.tableofcontents | 口試委員審定書 #
誌謝 i 中文摘要 iii ABSTRACT iv CONTENTS v LIST OF FIGURES vii LIST OF TABLES xiv Chapter 1 緒論 1 Chapter 2 石墨烯的堆疊型態分析 2 2.1 石墨烯的基礎性質 2 2.1.1 石墨烯的晶體結構 4 2.1.2 石墨烯的電子性質 5 2.1.3 石墨烯的制備方法 11 2.1.3.1 機械剝離法 11 2.1.3.2 化學溶液合成法 13 2.1.3.3 碳化矽磊晶成長法 15 2.1.3.4 化學氣相沉積法 16 2.1.3.5 固態過飽和析出法 25 Chapter 3 分析儀器與實驗方法 28 3.1 化學氣相沉積法制備石墨烯薄膜 28 3.2 轉印石墨烯薄膜方法 28 3.3 聚焦離子束顯微鏡 29 3.3.1 聚焦離子束顯微鏡原理簡介 30 3.3.2 利用聚焦離子束顯微鏡進行TEM橫截面試片製作 32 3.3.3 平面視角TEM試片制備 34 3.3.3.1 傳統研磨法 34 3.3.3.2 FIB制備法-提取法 36 3.3.3.3 FIB制備法-保護帽法 37 3.3.3.4 FIB制備-微米膠囊法 39 3.4 掃描式電子顯微鏡 43 3.5 穿透式電子顯微鏡 44 3.6 石墨烯堆疊與電子繞射 46 3.6.1 理論計算 46 3.6.2 實驗分析 48 3.7 拉曼光譜儀 49 Chapter 4 實驗結果與討論 55 4.1 拉曼光譜分析 55 4.2 橫截面TEM分析 59 4.3 平面視角TEM分析 61 4.3.1 繞射強度分析方法 62 4.3.2 平面視角TEM繞射分析 63 4.4 結果討論 65 Chapter 5 結論與未來展望 68 References 69 | |
dc.language.iso | zh-TW | |
dc.title | 以穿透式電子顯微鏡分析化學氣相沉積法成長之石墨烯堆疊形式 | zh_TW |
dc.title | Using Transmission Electron Microscope to Analyze the Stacking Form of Graphene Grown in Chemical Vapor Deposition | en |
dc.type | Thesis | |
dc.date.schoolyear | 107-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 王迪彥(Di-Yan Wang),李紹先(Shao-Sian Li) | |
dc.subject.keyword | 石墨烯,化學氣相沉積法,堆疊型態,聚焦離子束顯微鏡,試片制備,穿透式電子顯微鏡,拉曼光譜儀,薄膜分析, | zh_TW |
dc.subject.keyword | Graphene,Chemical-Vapor-Deposition,Stacking forms,Focus-ion Beam,Sample Preparation,Raman spectroscopy,Transmission Electron Microscope,Thin-film analysis, | en |
dc.relation.page | 75 | |
dc.identifier.doi | 10.6342/NTU201903293 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2019-08-13 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 材料科學與工程學研究所 | zh_TW |
顯示於系所單位: | 材料科學與工程學系 |
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