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標題: | 高速壓電三軸掃描器之非線性效應補償方法 A Nonlinear Effect Compensation Method for a High Speed Piezoelectric Three-Axis Scanner |
作者: | YU CHEN KUO 郭昱辰 |
指導教授: | 廖先順(Shun Hsien Liao) |
關鍵字: | 原子力顯微鏡,壓電致動器,遲滯效應,系統鑑別, Atomic force microscope,High-speed scanner,Hysteresis effect,System identification, |
出版年 : | 2019 |
學位: | 碩士 |
摘要: | 原子力顯微鏡為一利用探針掃描樣品表面以得到奈米解析度之成像技術,其致動器採用壓電材料以達到奈米級精度。然而,遲滯效應造成控制壓電材料之驅動電壓與實際伸長量呈現一非線性關係。遲滯效應會降低量測的正確度,並造成表面影像失真。此外,在材料機械特性之計算上亦會產生誤差。本研究為了改善一自製高速掃描器之非線性特性,設計一像散式位移量測架構以量測致動器之電壓與位移關係,並且藉由系統鑑別建構致動器之數學模型,進而推算出校正驅動電壓訊號。實驗結果顯示利用校正驅動訊號可成功提升致動器之位移線性度,在XYZ三個軸向上皆達到0.995以上之決定係數。最後,利用校正驅動訊號控制原子力顯微鏡對一標準方格樣品進行掃圖,結果顯示本方法可改善遲滯效應所造成之失真現象。 Atomic force microscopy (AFM) is an imaging technique that utilizes a cantilever tip to scan the sample surface at nanoscale. Piezoelectric materials are used in the AFM scanner to achieve nanometer resolution. However, the hysteresis effect of the piezoelectric materials causes a nonlinear relationship between the driving signal and the actual displacement, which causes the accuracy reduction and image distortion. Moreover, the hysteresis effect also generates calculation error in the mechanical properties measurement. In this thesis, to compensate the nonlinear effect of a home-made high-speed scanner, an astigmatic detection system was built to measure the scanner displacement. Mathematical models of the three-axis scanner were constructed by system identification. To generate modified driving signals. The experimental results show that the proposal method improved the scanner linearity with the coefficient of determination of over 0.995 in three directions. Finally, a standard sample was imaged using the modified driving signals. The result confirms that the proposed method can improve the image distortion due to the hysteresis effect. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/73267 |
DOI: | 10.6342/NTU201901034 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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