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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 李嗣涔(Si-Chen Li) | |
dc.contributor.author | Che-Shao Guo | en |
dc.contributor.author | 郭哲劭 | zh_TW |
dc.date.accessioned | 2021-06-17T07:13:25Z | - |
dc.date.available | 2019-07-26 | |
dc.date.copyright | 2019-07-26 | |
dc.date.issued | 2019 | |
dc.date.submitted | 2019-07-17 | |
dc.identifier.citation | [1] National Fire Agency, Ministry of the Interior.Website: https://www.nfa.gov.tw/cht/index.php
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/73001 | - |
dc.description.abstract | 在此論文中,整合了本實驗室在紅外光元件製程上既有的研究成果,包括針對一氧化碳氣體的窄頻紅外線發射器,以及相對應波長的窄頻偵測器,實現紅外光一氧化碳氣體偵測系統。發射器部分採用 金/二氧化矽/金 波導型紅外線發射器的結構,以發射窄頻針對一氧化碳碳氧三鍵吸收波長之紅外光。偵測器部分採用 金/氫化非晶矽/金 圓孔式的結構,藉由探討氫化非晶矽厚度,與波長紅位移的關係來微調所要的偵測波段以及製作不同的窄頻紅外線偵測器。將實驗室已經發展的柵狀金屬結構的偵測器與本文發展的圓孔金屬結構偵測器進行特性對比。第四章中將以我們製作的元件與對應的量測系統進行不同濃度的一氧化碳的量測。 | zh_TW |
dc.description.abstract | The thesis investigated the integrated infrared device process, narrow bandwidth infrared thermal emitter and the corresponding plasmonic infrared photodetector developed in our laboratory to realize a Infrared Carbon Monoxide detection system.
The emitter adopt the structure of waveduide mode emitter embedded with golden grating in the dielectric layer and adding the Au / TiO2 / Au island structure on the top to produce the emission of localized surface plasmon resonance. The narrow bandwidth thermal emitter of Au / SiO2 / Au waveguide structure can generated the radiation which can match the absorption wavelength of carbon monoxide C≡O bond. The detector is Au/a-Si:H /Au hexagonal holes structure which can be investigated by observing the wavelength red-shift with the change of dielectric thickness. And the comparison between the Au grating structure detector which has been reported and Au hexagonal holes structure detector. These devices are applied in non-dispersive infrared (NDIR) system for carbon monoxide detection. In Chapter 4, we will measure the different concentration of carbon monoxide. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T07:13:25Z (GMT). No. of bitstreams: 1 ntu-108-R06941069-1.pdf: 3434075 bytes, checksum: 2023edee4fb484ecd694192585da2b0a (MD5) Previous issue date: 2019 | en |
dc.description.tableofcontents | 摘要 I
ABSTRACT II CONTENTS III LIST OF FIGURES V LIST OF TABLES IX Chapter 1 1 Introduction 1 Chapter 2 9 Fundamentals of Surface Plasmons and the Fabrication Processes 9 2.1 The fundamentals of surface plasmons 9 2.2 Process Flow 20 2.3 Measuring Systems 26 Chapter 3 29 Narrow bandwidth Thermal Emitter and the corresponding Plasmonic Infrared Photodetectors for Carbon Monoxide 29 3.1 Narrow Bandwidth Infrared Thermal Emitter for Carbon Monoxide 31 3.2 Plasmonic Infrared Photodetector with Narrow Absorption Bandwidth for Carbon Monoxide 34 3.3 Summary 46 Chapter 4 47 Carbon Monoxide Detection System 47 4.1 Design of the Carbon Monoxide Detection System 48 4.2 Experiments 53 4.3 Results and Discussion 54 4.4 Summary 67 Chapter 5 68 Conclusion 68 Bibliography 69 | |
dc.language.iso | en | |
dc.title | 紅外一氧化碳偵測系統 | zh_TW |
dc.title | Infrared Carbon Monoxide Detection System | en |
dc.type | Thesis | |
dc.date.schoolyear | 107-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蔡熊光(Xiong-Guang Tsai),林致廷(Chi-Ting Lin),林清富(Chin-Fu Lin) | |
dc.subject.keyword | 表面電漿子,一氧化碳偵測,紅外線發光元件,紅外線光偵測器, | zh_TW |
dc.subject.keyword | Surface plasmon,the Carbon Monoxide detection,infrared thermal emitter,infrared photodetector, | en |
dc.relation.page | 78 | |
dc.identifier.doi | 10.6342/NTU201901540 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2019-07-17 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
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